11/18/2011	9:51:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/18/2011	9:51:57 AM	Recipe started at 9:51 AM
11/18/2011	9:51:57 AM	Helium valve closed
11/18/2011	9:51:57 AM	H2 valve closed
11/18/2011	9:51:57 AM	BCl3 valve closed
11/18/2011	9:51:57 AM	PH3 valve closed
11/18/2011	9:51:57 AM	SiCl4 pre valve closed
11/18/2011	9:51:57 AM	SiCl4 post valve closed
11/18/2011	9:51:57 AM	Main Vac valve closed
11/18/2011	9:51:57 AM	Bypass valve closed
11/18/2011	9:51:57 AM	Bubbler valve closed
11/18/2011	9:51:57 AM	Helium MFC set to  0.000000
11/18/2011	9:51:57 AM	H2 MFC set to  0.000000
11/18/2011	9:51:57 AM	BCl3 MFC set to  0.000000
11/18/2011	9:51:57 AM	PHl3 MFC set to  0.000000
11/18/2011	9:51:57 AM	SiCl4 MFC set to  0.000000
11/18/2011	9:51:57 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	9:51:57 AM	Tube furnace set to 0
11/18/2011	9:52:00 AM	H2 valve closed
11/18/2011	9:52:00 AM	BCl3 valve closed
11/18/2011	9:52:00 AM	PH3 valve closed
11/18/2011	9:52:00 AM	SiCl4 pre valve closed
11/18/2011	9:52:00 AM	SiCl4 post valve closed
11/18/2011	9:52:00 AM	Main Vac valve closed
11/18/2011	9:52:00 AM	Bypass valve closed
11/18/2011	9:52:00 AM	Bubbler valve closed
11/18/2011	9:52:00 AM	Helium valve opened
11/18/2011	9:52:00 AM	Helium MFC set to  500.000000
11/18/2011	9:52:00 AM	H2 MFC set to  0.000000
11/18/2011	9:52:00 AM	BCl3 MFC set to  0.000000
11/18/2011	9:52:00 AM	PHl3 MFC set to  0.000000
11/18/2011	9:52:00 AM	SiCl4 MFC set to  0.000000
11/18/2011	9:52:00 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	9:52:00 AM	Tube furnace set to 0
11/18/2011	9:53:05 AM	Helium valve closed
11/18/2011	9:53:05 AM	H2 valve closed
11/18/2011	9:53:05 AM	BCl3 valve closed
11/18/2011	9:53:05 AM	PH3 valve closed
11/18/2011	9:53:05 AM	SiCl4 pre valve closed
11/18/2011	9:53:05 AM	SiCl4 post valve closed
11/18/2011	9:53:05 AM	Main Vac valve closed
11/18/2011	9:53:05 AM	Bypass valve closed
11/18/2011	9:53:05 AM	Bubbler valve closed
11/18/2011	9:53:05 AM	Helium MFC set to  0.000000
11/18/2011	9:53:05 AM	H2 MFC set to  0.000000
11/18/2011	9:53:05 AM	BCl3 MFC set to  0.000000
11/18/2011	9:53:05 AM	PHl3 MFC set to  0.000000
11/18/2011	9:53:05 AM	SiCl4 MFC set to  0.000000
11/18/2011	9:53:05 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	9:53:05 AM	Tube furnace set to 0
11/18/2011	9:53:06 AM	Run finished at 9:53 AM
11/18/2011	9:53:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/18/2011	9:57:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/18/2011	9:57:44 AM	Recipe started at 9:57 AM
11/18/2011	9:57:44 AM	Helium valve closed
11/18/2011	9:57:44 AM	H2 valve closed
11/18/2011	9:57:44 AM	BCl3 valve closed
11/18/2011	9:57:44 AM	PH3 valve closed
11/18/2011	9:57:44 AM	SiCl4 pre valve closed
11/18/2011	9:57:44 AM	SiCl4 post valve closed
11/18/2011	9:57:44 AM	Main Vac valve closed
11/18/2011	9:57:44 AM	Bubbler valve closed
11/18/2011	9:57:44 AM	Bypass valve opened
11/18/2011	9:57:44 AM	Helium MFC set to  0.000000
11/18/2011	9:57:44 AM	H2 MFC set to  0.000000
11/18/2011	9:57:44 AM	BCl3 MFC set to  0.000000
11/18/2011	9:57:44 AM	PHl3 MFC set to  0.000000
11/18/2011	9:57:44 AM	SiCl4 MFC set to  0.000000
11/18/2011	9:57:44 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	9:57:44 AM	Tube furnace set to 0
11/18/2011	9:59:37 AM	Helium valve closed
11/18/2011	9:59:37 AM	H2 valve closed
11/18/2011	9:59:37 AM	BCl3 valve closed
11/18/2011	9:59:37 AM	PH3 valve closed
11/18/2011	9:59:37 AM	SiCl4 pre valve closed
11/18/2011	9:59:37 AM	SiCl4 post valve closed
11/18/2011	9:59:37 AM	Main Vac valve closed
11/18/2011	9:59:37 AM	Bubbler valve closed
11/18/2011	9:59:37 AM	Bypass valve opened
11/18/2011	9:59:37 AM	Helium MFC set to  0.000000
11/18/2011	9:59:37 AM	H2 MFC set to  0.000000
11/18/2011	9:59:37 AM	BCl3 MFC set to  0.000000
11/18/2011	9:59:37 AM	PHl3 MFC set to  0.000000
11/18/2011	9:59:37 AM	SiCl4 MFC set to  0.000000
11/18/2011	9:59:37 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	9:59:37 AM	Tube furnace set to 0
11/18/2011	10:00:37 AM	Helium valve closed
11/18/2011	10:00:37 AM	H2 valve closed
11/18/2011	10:00:37 AM	BCl3 valve closed
11/18/2011	10:00:37 AM	PH3 valve closed
11/18/2011	10:00:38 AM	SiCl4 pre valve closed
11/18/2011	10:00:38 AM	SiCl4 post valve closed
11/18/2011	10:00:38 AM	Bypass valve closed
11/18/2011	10:00:38 AM	Bubbler valve closed
11/18/2011	10:00:38 AM	Main Vac valve opened
11/18/2011	10:00:38 AM	Helium MFC set to  0.000000
11/18/2011	10:00:38 AM	H2 MFC set to  0.000000
11/18/2011	10:00:38 AM	BCl3 MFC set to  0.000000
11/18/2011	10:00:38 AM	PHl3 MFC set to  0.000000
11/18/2011	10:00:38 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:00:38 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:00:38 AM	Tube furnace set to 0
11/18/2011	10:00:39 AM	Run finished at 10:00 AM
11/18/2011	10:00:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/18/2011	10:28:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/18/2011	10:28:04 AM	Recipe started at 10:28 AM
11/18/2011	10:28:04 AM	Helium valve closed
11/18/2011	10:28:04 AM	H2 valve closed
11/18/2011	10:28:04 AM	BCl3 valve closed
11/18/2011	10:28:04 AM	PH3 valve closed
11/18/2011	10:28:04 AM	SiCl4 pre valve closed
11/18/2011	10:28:04 AM	SiCl4 post valve closed
11/18/2011	10:28:04 AM	Main Vac valve closed
11/18/2011	10:28:04 AM	Bypass valve closed
11/18/2011	10:28:04 AM	Bubbler valve closed
11/18/2011	10:28:04 AM	Helium MFC set to  0.000000
11/18/2011	10:28:04 AM	H2 MFC set to  0.000000
11/18/2011	10:28:04 AM	BCl3 MFC set to  0.000000
11/18/2011	10:28:04 AM	PHl3 MFC set to  0.000000
11/18/2011	10:28:04 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:28:04 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:28:04 AM	Tube furnace set to 0
11/18/2011	10:28:08 AM	H2 valve closed
11/18/2011	10:28:08 AM	BCl3 valve closed
11/18/2011	10:28:08 AM	PH3 valve closed
11/18/2011	10:28:08 AM	SiCl4 pre valve closed
11/18/2011	10:28:08 AM	SiCl4 post valve closed
11/18/2011	10:28:08 AM	Main Vac valve closed
11/18/2011	10:28:08 AM	Bypass valve closed
11/18/2011	10:28:08 AM	Bubbler valve closed
11/18/2011	10:28:08 AM	Helium valve opened
11/18/2011	10:28:08 AM	Helium MFC set to  500.000000
11/18/2011	10:28:08 AM	H2 MFC set to  0.000000
11/18/2011	10:28:08 AM	BCl3 MFC set to  0.000000
11/18/2011	10:28:08 AM	PHl3 MFC set to  0.000000
11/18/2011	10:28:08 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:28:08 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:28:08 AM	Tube furnace set to 0
11/18/2011	10:29:04 AM	Helium valve closed
11/18/2011	10:29:04 AM	H2 valve closed
11/18/2011	10:29:04 AM	BCl3 valve closed
11/18/2011	10:29:04 AM	PH3 valve closed
11/18/2011	10:29:04 AM	SiCl4 pre valve closed
11/18/2011	10:29:04 AM	SiCl4 post valve closed
11/18/2011	10:29:05 AM	Main Vac valve closed
11/18/2011	10:29:05 AM	Bypass valve closed
11/18/2011	10:29:05 AM	Bubbler valve closed
11/18/2011	10:29:05 AM	Helium MFC set to  0.000000
11/18/2011	10:29:05 AM	H2 MFC set to  0.000000
11/18/2011	10:29:05 AM	BCl3 MFC set to  0.000000
11/18/2011	10:29:05 AM	PHl3 MFC set to  0.000000
11/18/2011	10:29:05 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:29:05 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:29:05 AM	Tube furnace set to 0
11/18/2011	10:29:06 AM	Run finished at 10:29 AM
11/18/2011	10:29:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/18/2011	10:35:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/18/2011	10:35:36 AM	Recipe started at 10:35 AM
11/18/2011	10:35:36 AM	Helium valve closed
11/18/2011	10:35:36 AM	H2 valve closed
11/18/2011	10:35:36 AM	BCl3 valve closed
11/18/2011	10:35:36 AM	PH3 valve closed
11/18/2011	10:35:36 AM	SiCl4 pre valve closed
11/18/2011	10:35:36 AM	SiCl4 post valve closed
11/18/2011	10:35:36 AM	Main Vac valve closed
11/18/2011	10:35:36 AM	Bubbler valve closed
11/18/2011	10:35:36 AM	Bypass valve opened
11/18/2011	10:35:36 AM	Helium MFC set to  0.000000
11/18/2011	10:35:36 AM	H2 MFC set to  0.000000
11/18/2011	10:35:36 AM	BCl3 MFC set to  0.000000
11/18/2011	10:35:36 AM	PHl3 MFC set to  0.000000
11/18/2011	10:35:36 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:35:36 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:35:36 AM	Tube furnace set to 0
11/18/2011	10:37:33 AM	Helium valve closed
11/18/2011	10:37:33 AM	H2 valve closed
11/18/2011	10:37:33 AM	BCl3 valve closed
11/18/2011	10:37:33 AM	PH3 valve closed
11/18/2011	10:37:33 AM	SiCl4 pre valve closed
11/18/2011	10:37:33 AM	SiCl4 post valve closed
11/18/2011	10:37:33 AM	Main Vac valve closed
11/18/2011	10:37:33 AM	Bubbler valve closed
11/18/2011	10:37:33 AM	Bypass valve opened
11/18/2011	10:37:33 AM	Helium MFC set to  0.000000
11/18/2011	10:37:33 AM	H2 MFC set to  0.000000
11/18/2011	10:37:33 AM	BCl3 MFC set to  0.000000
11/18/2011	10:37:33 AM	PHl3 MFC set to  0.000000
11/18/2011	10:37:33 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:37:33 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:37:34 AM	Tube furnace set to 0
11/18/2011	10:38:34 AM	Helium valve closed
11/18/2011	10:38:34 AM	H2 valve closed
11/18/2011	10:38:34 AM	BCl3 valve closed
11/18/2011	10:38:34 AM	PH3 valve closed
11/18/2011	10:38:34 AM	SiCl4 pre valve closed
11/18/2011	10:38:34 AM	SiCl4 post valve closed
11/18/2011	10:38:34 AM	Bypass valve closed
11/18/2011	10:38:34 AM	Bubbler valve closed
11/18/2011	10:38:34 AM	Main Vac valve opened
11/18/2011	10:38:34 AM	Helium MFC set to  0.000000
11/18/2011	10:38:34 AM	H2 MFC set to  0.000000
11/18/2011	10:38:34 AM	BCl3 MFC set to  0.000000
11/18/2011	10:38:34 AM	PHl3 MFC set to  0.000000
11/18/2011	10:38:34 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:38:34 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:38:34 AM	Tube furnace set to 0
11/18/2011	10:38:35 AM	Run finished at 10:38 AM
11/18/2011	10:38:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/18/2011	10:43:49 AM	Recipe started at 10:43 AM
11/18/2011	10:43:49 AM	Helium valve closed
11/18/2011	10:43:49 AM	H2 valve closed
11/18/2011	10:43:49 AM	BCl3 valve closed
11/18/2011	10:43:49 AM	PH3 valve closed
11/18/2011	10:43:49 AM	SiCl4 pre valve closed
11/18/2011	10:43:49 AM	SiCl4 post valve closed
11/18/2011	10:43:49 AM	Main Vac valve closed
11/18/2011	10:43:49 AM	Bubbler valve closed
11/18/2011	10:43:49 AM	Bypass valve opened
11/18/2011	10:43:49 AM	Helium MFC set to  0.000000
11/18/2011	10:43:49 AM	H2 MFC set to  0.000000
11/18/2011	10:43:49 AM	BCl3 MFC set to  0.000000
11/18/2011	10:43:49 AM	PHl3 MFC set to  0.000000
11/18/2011	10:43:49 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:43:49 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:43:49 AM	Tube furnace set to 180
11/18/2011	10:43:49 AM	Helium valve closed
11/18/2011	10:43:49 AM	H2 valve closed
11/18/2011	10:43:49 AM	BCl3 valve closed
11/18/2011	10:43:49 AM	PH3 valve closed
11/18/2011	10:43:49 AM	SiCl4 pre valve closed
11/18/2011	10:43:49 AM	SiCl4 post valve closed
11/18/2011	10:43:49 AM	Main Vac valve closed
11/18/2011	10:43:49 AM	Bubbler valve closed
11/18/2011	10:43:49 AM	Bypass valve opened
11/18/2011	10:43:49 AM	Helium MFC set to  0.000000
11/18/2011	10:43:49 AM	H2 MFC set to  0.000000
11/18/2011	10:43:49 AM	BCl3 MFC set to  0.000000
11/18/2011	10:43:49 AM	PHl3 MFC set to  0.000000
11/18/2011	10:43:49 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:43:49 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:43:49 AM	Tube furnace set to 150
11/18/2011	10:43:51 AM	Helium valve closed
11/18/2011	10:43:51 AM	H2 valve closed
11/18/2011	10:43:51 AM	BCl3 valve closed
11/18/2011	10:43:51 AM	PH3 valve closed
11/18/2011	10:43:51 AM	SiCl4 pre valve closed
11/18/2011	10:43:51 AM	SiCl4 post valve closed
11/18/2011	10:43:51 AM	Bypass valve closed
11/18/2011	10:43:51 AM	Bubbler valve closed
11/18/2011	10:43:51 AM	Main Vac valve opened
11/18/2011	10:43:51 AM	Helium MFC set to  0.000000
11/18/2011	10:43:51 AM	H2 MFC set to  0.000000
11/18/2011	10:43:51 AM	BCl3 MFC set to  0.000000
11/18/2011	10:43:51 AM	PHl3 MFC set to  0.000000
11/18/2011	10:43:51 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:43:51 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:43:51 AM	Tube furnace set to 180
11/18/2011	10:44:21 AM	H2 valve closed
11/18/2011	10:44:21 AM	BCl3 valve closed
11/18/2011	10:44:21 AM	PH3 valve closed
11/18/2011	10:44:21 AM	SiCl4 pre valve closed
11/18/2011	10:44:21 AM	SiCl4 post valve closed
11/18/2011	10:44:21 AM	Bypass valve closed
11/18/2011	10:44:21 AM	Bubbler valve closed
11/18/2011	10:44:21 AM	Helium valve opened
11/18/2011	10:44:21 AM	Main Vac valve opened
11/18/2011	10:44:21 AM	Helium MFC set to  20.000000
11/18/2011	10:44:21 AM	H2 MFC set to  0.000000
11/18/2011	10:44:21 AM	BCl3 MFC set to  0.000000
11/18/2011	10:44:21 AM	PHl3 MFC set to  0.000000
11/18/2011	10:44:21 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:44:21 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:44:22 AM	Tube furnace set to 180
11/18/2011	10:44:52 AM	Helium valve closed
11/18/2011	10:44:52 AM	H2 valve closed
11/18/2011	10:44:52 AM	BCl3 valve closed
11/18/2011	10:44:52 AM	PH3 valve closed
11/18/2011	10:44:52 AM	SiCl4 pre valve closed
11/18/2011	10:44:52 AM	SiCl4 post valve closed
11/18/2011	10:44:52 AM	Bypass valve closed
11/18/2011	10:44:52 AM	Bubbler valve closed
11/18/2011	10:44:52 AM	Main Vac valve opened
11/18/2011	10:44:52 AM	Helium MFC set to  0.000000
11/18/2011	10:44:52 AM	H2 MFC set to  0.000000
11/18/2011	10:44:52 AM	BCl3 MFC set to  0.000000
11/18/2011	10:44:52 AM	PHl3 MFC set to  0.000000
11/18/2011	10:44:52 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:44:52 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:44:52 AM	Tube furnace set to 150
11/18/2011	10:45:22 AM	H2 valve closed
11/18/2011	10:45:22 AM	BCl3 valve closed
11/18/2011	10:45:22 AM	PH3 valve closed
11/18/2011	10:45:22 AM	SiCl4 pre valve closed
11/18/2011	10:45:22 AM	SiCl4 post valve closed
11/18/2011	10:45:22 AM	Bypass valve closed
11/18/2011	10:45:22 AM	Bubbler valve closed
11/18/2011	10:45:22 AM	Helium valve opened
11/18/2011	10:45:22 AM	Main Vac valve opened
11/18/2011	10:45:22 AM	Helium MFC set to  20.000000
11/18/2011	10:45:22 AM	H2 MFC set to  0.000000
11/18/2011	10:45:22 AM	BCl3 MFC set to  0.000000
11/18/2011	10:45:22 AM	PHl3 MFC set to  0.000000
11/18/2011	10:45:22 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:45:22 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:45:22 AM	Tube furnace set to 180
11/18/2011	10:45:52 AM	Helium valve closed
11/18/2011	10:45:52 AM	H2 valve closed
11/18/2011	10:45:52 AM	BCl3 valve closed
11/18/2011	10:45:52 AM	PH3 valve closed
11/18/2011	10:45:52 AM	SiCl4 pre valve closed
11/18/2011	10:45:52 AM	SiCl4 post valve closed
11/18/2011	10:45:52 AM	Bypass valve closed
11/18/2011	10:45:52 AM	Bubbler valve closed
11/18/2011	10:45:52 AM	Main Vac valve opened
11/18/2011	10:45:52 AM	Helium MFC set to  0.000000
11/18/2011	10:45:52 AM	H2 MFC set to  0.000000
11/18/2011	10:45:52 AM	BCl3 MFC set to  0.000000
11/18/2011	10:45:52 AM	PHl3 MFC set to  0.000000
11/18/2011	10:45:52 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:45:52 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:45:52 AM	Tube furnace set to 150
11/18/2011	10:46:22 AM	H2 valve closed
11/18/2011	10:46:22 AM	BCl3 valve closed
11/18/2011	10:46:22 AM	PH3 valve closed
11/18/2011	10:46:22 AM	SiCl4 pre valve closed
11/18/2011	10:46:22 AM	SiCl4 post valve closed
11/18/2011	10:46:22 AM	Bypass valve closed
11/18/2011	10:46:22 AM	Bubbler valve closed
11/18/2011	10:46:22 AM	Helium valve opened
11/18/2011	10:46:22 AM	Main Vac valve opened
11/18/2011	10:46:22 AM	Helium MFC set to  20.000000
11/18/2011	10:46:22 AM	H2 MFC set to  0.000000
11/18/2011	10:46:22 AM	BCl3 MFC set to  0.000000
11/18/2011	10:46:22 AM	PHl3 MFC set to  0.000000
11/18/2011	10:46:22 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:46:22 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:46:22 AM	Tube furnace set to 150
11/18/2011	10:46:52 AM	Helium valve closed
11/18/2011	10:46:52 AM	H2 valve closed
11/18/2011	10:46:52 AM	BCl3 valve closed
11/18/2011	10:46:53 AM	PH3 valve closed
11/18/2011	10:46:53 AM	SiCl4 pre valve closed
11/18/2011	10:46:53 AM	SiCl4 post valve closed
11/18/2011	10:46:53 AM	Bypass valve closed
11/18/2011	10:46:53 AM	Bubbler valve closed
11/18/2011	10:46:53 AM	Main Vac valve opened
11/18/2011	10:46:53 AM	Helium MFC set to  0.000000
11/18/2011	10:46:53 AM	H2 MFC set to  0.000000
11/18/2011	10:46:53 AM	BCl3 MFC set to  0.000000
11/18/2011	10:46:53 AM	PHl3 MFC set to  0.000000
11/18/2011	10:46:53 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:46:53 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:46:53 AM	Tube furnace set to 150
11/18/2011	10:47:23 AM	H2 valve closed
11/18/2011	10:47:23 AM	BCl3 valve closed
11/18/2011	10:47:23 AM	PH3 valve closed
11/18/2011	10:47:23 AM	SiCl4 pre valve closed
11/18/2011	10:47:23 AM	SiCl4 post valve closed
11/18/2011	10:47:23 AM	Bypass valve closed
11/18/2011	10:47:23 AM	Bubbler valve closed
11/18/2011	10:47:23 AM	Helium valve opened
11/18/2011	10:47:23 AM	Main Vac valve opened
11/18/2011	10:47:23 AM	Helium MFC set to  20.000000
11/18/2011	10:47:23 AM	H2 MFC set to  0.000000
11/18/2011	10:47:23 AM	BCl3 MFC set to  0.000000
11/18/2011	10:47:23 AM	PHl3 MFC set to  0.000000
11/18/2011	10:47:23 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:47:23 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:47:23 AM	Tube furnace set to 180
11/18/2011	10:47:53 AM	Helium valve closed
11/18/2011	10:47:53 AM	H2 valve closed
11/18/2011	10:47:53 AM	BCl3 valve closed
11/18/2011	10:47:53 AM	PH3 valve closed
11/18/2011	10:47:53 AM	SiCl4 pre valve closed
11/18/2011	10:47:53 AM	SiCl4 post valve closed
11/18/2011	10:47:53 AM	Bypass valve closed
11/18/2011	10:47:53 AM	Bubbler valve closed
11/18/2011	10:47:53 AM	Main Vac valve opened
11/18/2011	10:47:53 AM	Helium MFC set to  0.000000
11/18/2011	10:47:53 AM	H2 MFC set to  0.000000
11/18/2011	10:47:53 AM	BCl3 MFC set to  0.000000
11/18/2011	10:47:53 AM	PHl3 MFC set to  0.000000
11/18/2011	10:47:53 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:47:53 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:47:53 AM	Tube furnace set to 150
11/18/2011	10:48:23 AM	H2 valve closed
11/18/2011	10:48:23 AM	BCl3 valve closed
11/18/2011	10:48:23 AM	PH3 valve closed
11/18/2011	10:48:23 AM	SiCl4 pre valve closed
11/18/2011	10:48:23 AM	SiCl4 post valve closed
11/18/2011	10:48:23 AM	Bypass valve closed
11/18/2011	10:48:23 AM	Bubbler valve closed
11/18/2011	10:48:23 AM	Helium valve opened
11/18/2011	10:48:23 AM	Main Vac valve opened
11/18/2011	10:48:23 AM	Helium MFC set to  20.000000
11/18/2011	10:48:23 AM	H2 MFC set to  0.000000
11/18/2011	10:48:23 AM	BCl3 MFC set to  0.000000
11/18/2011	10:48:23 AM	PHl3 MFC set to  0.000000
11/18/2011	10:48:23 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:48:23 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:48:23 AM	Tube furnace set to 150
11/18/2011	10:48:53 AM	Helium valve closed
11/18/2011	10:48:53 AM	H2 valve closed
11/18/2011	10:48:53 AM	BCl3 valve closed
11/18/2011	10:48:53 AM	PH3 valve closed
11/18/2011	10:48:53 AM	SiCl4 pre valve closed
11/18/2011	10:48:53 AM	SiCl4 post valve closed
11/18/2011	10:48:53 AM	Bypass valve closed
11/18/2011	10:48:53 AM	Bubbler valve closed
11/18/2011	10:48:53 AM	Main Vac valve opened
11/18/2011	10:48:53 AM	Helium MFC set to  0.000000
11/18/2011	10:48:53 AM	H2 MFC set to  0.000000
11/18/2011	10:48:53 AM	BCl3 MFC set to  0.000000
11/18/2011	10:48:53 AM	PHl3 MFC set to  0.000000
11/18/2011	10:48:53 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:48:53 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:48:53 AM	Tube furnace set to 150
11/18/2011	10:49:24 AM	H2 valve closed
11/18/2011	10:49:24 AM	BCl3 valve closed
11/18/2011	10:49:24 AM	PH3 valve closed
11/18/2011	10:49:24 AM	SiCl4 pre valve closed
11/18/2011	10:49:24 AM	SiCl4 post valve closed
11/18/2011	10:49:24 AM	Bypass valve closed
11/18/2011	10:49:24 AM	Bubbler valve closed
11/18/2011	10:49:24 AM	Helium valve opened
11/18/2011	10:49:24 AM	Main Vac valve opened
11/18/2011	10:49:24 AM	Helium MFC set to  20.000000
11/18/2011	10:49:24 AM	H2 MFC set to  0.000000
11/18/2011	10:49:24 AM	BCl3 MFC set to  0.000000
11/18/2011	10:49:24 AM	PHl3 MFC set to  0.000000
11/18/2011	10:49:24 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:49:24 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:49:24 AM	Tube furnace set to 150
11/18/2011	10:49:54 AM	Helium valve closed
11/18/2011	10:49:54 AM	H2 valve closed
11/18/2011	10:49:54 AM	BCl3 valve closed
11/18/2011	10:49:54 AM	PH3 valve closed
11/18/2011	10:49:54 AM	SiCl4 pre valve closed
11/18/2011	10:49:54 AM	SiCl4 post valve closed
11/18/2011	10:49:54 AM	Bypass valve closed
11/18/2011	10:49:54 AM	Bubbler valve closed
11/18/2011	10:49:54 AM	Main Vac valve opened
11/18/2011	10:49:54 AM	Helium MFC set to  0.000000
11/18/2011	10:49:54 AM	H2 MFC set to  0.000000
11/18/2011	10:49:54 AM	BCl3 MFC set to  0.000000
11/18/2011	10:49:54 AM	PHl3 MFC set to  0.000000
11/18/2011	10:49:54 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:49:54 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:49:54 AM	Tube furnace set to 150
11/18/2011	10:50:24 AM	H2 valve closed
11/18/2011	10:50:24 AM	BCl3 valve closed
11/18/2011	10:50:24 AM	PH3 valve closed
11/18/2011	10:50:24 AM	SiCl4 pre valve closed
11/18/2011	10:50:24 AM	SiCl4 post valve closed
11/18/2011	10:50:24 AM	Bypass valve closed
11/18/2011	10:50:24 AM	Bubbler valve closed
11/18/2011	10:50:24 AM	Helium valve opened
11/18/2011	10:50:24 AM	Main Vac valve opened
11/18/2011	10:50:24 AM	Helium MFC set to  20.000000
11/18/2011	10:50:24 AM	H2 MFC set to  0.000000
11/18/2011	10:50:24 AM	BCl3 MFC set to  0.000000
11/18/2011	10:50:24 AM	PHl3 MFC set to  0.000000
11/18/2011	10:50:24 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:50:24 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:50:24 AM	Tube furnace set to 150
11/18/2011	10:50:54 AM	Helium valve closed
11/18/2011	10:50:54 AM	H2 valve closed
11/18/2011	10:50:54 AM	BCl3 valve closed
11/18/2011	10:50:54 AM	PH3 valve closed
11/18/2011	10:50:54 AM	SiCl4 pre valve closed
11/18/2011	10:50:54 AM	SiCl4 post valve closed
11/18/2011	10:50:54 AM	Bypass valve closed
11/18/2011	10:50:54 AM	Bubbler valve closed
11/18/2011	10:50:54 AM	Main Vac valve opened
11/18/2011	10:50:54 AM	Helium MFC set to  0.000000
11/18/2011	10:50:54 AM	H2 MFC set to  0.000000
11/18/2011	10:50:54 AM	BCl3 MFC set to  0.000000
11/18/2011	10:50:54 AM	PHl3 MFC set to  0.000000
11/18/2011	10:50:54 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:50:54 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:50:54 AM	Tube furnace set to 150
11/18/2011	10:51:24 AM	H2 valve closed
11/18/2011	10:51:24 AM	BCl3 valve closed
11/18/2011	10:51:24 AM	PH3 valve closed
11/18/2011	10:51:24 AM	SiCl4 pre valve closed
11/18/2011	10:51:24 AM	SiCl4 post valve closed
11/18/2011	10:51:24 AM	Bypass valve closed
11/18/2011	10:51:24 AM	Bubbler valve closed
11/18/2011	10:51:24 AM	Helium valve opened
11/18/2011	10:51:24 AM	Main Vac valve opened
11/18/2011	10:51:24 AM	Helium MFC set to  20.000000
11/18/2011	10:51:24 AM	H2 MFC set to  0.000000
11/18/2011	10:51:24 AM	BCl3 MFC set to  0.000000
11/18/2011	10:51:24 AM	PHl3 MFC set to  0.000000
11/18/2011	10:51:24 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:51:24 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:51:25 AM	Tube furnace set to 150
11/18/2011	10:51:55 AM	Helium valve closed
11/18/2011	10:51:55 AM	H2 valve closed
11/18/2011	10:51:55 AM	BCl3 valve closed
11/18/2011	10:51:55 AM	PH3 valve closed
11/18/2011	10:51:55 AM	SiCl4 pre valve closed
11/18/2011	10:51:55 AM	SiCl4 post valve closed
11/18/2011	10:51:55 AM	Bypass valve closed
11/18/2011	10:51:55 AM	Bubbler valve closed
11/18/2011	10:51:55 AM	Main Vac valve opened
11/18/2011	10:51:55 AM	Helium MFC set to  0.000000
11/18/2011	10:51:55 AM	H2 MFC set to  0.000000
11/18/2011	10:51:55 AM	BCl3 MFC set to  0.000000
11/18/2011	10:51:55 AM	PHl3 MFC set to  0.000000
11/18/2011	10:51:55 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:51:55 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:51:55 AM	Tube furnace set to 150
11/18/2011	10:52:25 AM	H2 valve closed
11/18/2011	10:52:25 AM	BCl3 valve closed
11/18/2011	10:52:25 AM	PH3 valve closed
11/18/2011	10:52:25 AM	SiCl4 pre valve closed
11/18/2011	10:52:25 AM	SiCl4 post valve closed
11/18/2011	10:52:25 AM	Bypass valve closed
11/18/2011	10:52:25 AM	Bubbler valve closed
11/18/2011	10:52:25 AM	Helium valve opened
11/18/2011	10:52:25 AM	Main Vac valve opened
11/18/2011	10:52:25 AM	Helium MFC set to  20.000000
11/18/2011	10:52:25 AM	H2 MFC set to  0.000000
11/18/2011	10:52:25 AM	BCl3 MFC set to  0.000000
11/18/2011	10:52:25 AM	PHl3 MFC set to  0.000000
11/18/2011	10:52:25 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:52:25 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:52:25 AM	Tube furnace set to 150
11/18/2011	10:52:55 AM	Helium valve closed
11/18/2011	10:52:55 AM	H2 valve closed
11/18/2011	10:52:55 AM	BCl3 valve closed
11/18/2011	10:52:55 AM	PH3 valve closed
11/18/2011	10:52:55 AM	SiCl4 pre valve closed
11/18/2011	10:52:55 AM	SiCl4 post valve closed
11/18/2011	10:52:55 AM	Bypass valve closed
11/18/2011	10:52:55 AM	Bubbler valve closed
11/18/2011	10:52:55 AM	Main Vac valve opened
11/18/2011	10:52:55 AM	Helium MFC set to  0.000000
11/18/2011	10:52:55 AM	H2 MFC set to  0.000000
11/18/2011	10:52:55 AM	BCl3 MFC set to  0.000000
11/18/2011	10:52:55 AM	PHl3 MFC set to  0.000000
11/18/2011	10:52:55 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:52:55 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:52:55 AM	Tube furnace set to 150
11/18/2011	10:53:25 AM	H2 valve closed
11/18/2011	10:53:25 AM	BCl3 valve closed
11/18/2011	10:53:25 AM	PH3 valve closed
11/18/2011	10:53:25 AM	SiCl4 pre valve closed
11/18/2011	10:53:25 AM	SiCl4 post valve closed
11/18/2011	10:53:25 AM	Bypass valve closed
11/18/2011	10:53:25 AM	Bubbler valve closed
11/18/2011	10:53:25 AM	Helium valve opened
11/18/2011	10:53:25 AM	Main Vac valve opened
11/18/2011	10:53:25 AM	Helium MFC set to  20.000000
11/18/2011	10:53:25 AM	H2 MFC set to  0.000000
11/18/2011	10:53:25 AM	BCl3 MFC set to  0.000000
11/18/2011	10:53:25 AM	PHl3 MFC set to  0.000000
11/18/2011	10:53:25 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:53:25 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:53:25 AM	Tube furnace set to 150
11/18/2011	10:53:56 AM	Helium valve closed
11/18/2011	10:53:56 AM	H2 valve closed
11/18/2011	10:53:56 AM	BCl3 valve closed
11/18/2011	10:53:56 AM	PH3 valve closed
11/18/2011	10:53:56 AM	SiCl4 pre valve closed
11/18/2011	10:53:56 AM	SiCl4 post valve closed
11/18/2011	10:53:56 AM	Bypass valve closed
11/18/2011	10:53:56 AM	Bubbler valve closed
11/18/2011	10:53:56 AM	Main Vac valve opened
11/18/2011	10:53:56 AM	Helium MFC set to  0.000000
11/18/2011	10:53:56 AM	H2 MFC set to  0.000000
11/18/2011	10:53:56 AM	BCl3 MFC set to  0.000000
11/18/2011	10:53:56 AM	PHl3 MFC set to  0.000000
11/18/2011	10:53:56 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:53:56 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:53:56 AM	Tube furnace set to 150
11/18/2011	10:54:26 AM	H2 valve closed
11/18/2011	10:54:26 AM	BCl3 valve closed
11/18/2011	10:54:26 AM	PH3 valve closed
11/18/2011	10:54:26 AM	SiCl4 pre valve closed
11/18/2011	10:54:26 AM	SiCl4 post valve closed
11/18/2011	10:54:26 AM	Bypass valve closed
11/18/2011	10:54:26 AM	Bubbler valve closed
11/18/2011	10:54:26 AM	Helium valve opened
11/18/2011	10:54:26 AM	Main Vac valve opened
11/18/2011	10:54:26 AM	Helium MFC set to  20.000000
11/18/2011	10:54:26 AM	H2 MFC set to  0.000000
11/18/2011	10:54:26 AM	BCl3 MFC set to  0.000000
11/18/2011	10:54:26 AM	PHl3 MFC set to  0.000000
11/18/2011	10:54:26 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:54:26 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:54:26 AM	Tube furnace set to 150
11/18/2011	10:54:56 AM	Helium valve closed
11/18/2011	10:54:56 AM	H2 valve closed
11/18/2011	10:54:56 AM	BCl3 valve closed
11/18/2011	10:54:56 AM	PH3 valve closed
11/18/2011	10:54:56 AM	SiCl4 pre valve closed
11/18/2011	10:54:56 AM	SiCl4 post valve closed
11/18/2011	10:54:56 AM	Bypass valve closed
11/18/2011	10:54:56 AM	Bubbler valve closed
11/18/2011	10:54:56 AM	Main Vac valve opened
11/18/2011	10:54:56 AM	Helium MFC set to  0.000000
11/18/2011	10:54:56 AM	H2 MFC set to  0.000000
11/18/2011	10:54:56 AM	BCl3 MFC set to  0.000000
11/18/2011	10:54:56 AM	PHl3 MFC set to  0.000000
11/18/2011	10:54:56 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:54:56 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:54:57 AM	Tube furnace set to 150
11/18/2011	10:55:27 AM	H2 valve closed
11/18/2011	10:55:27 AM	BCl3 valve closed
11/18/2011	10:55:27 AM	PH3 valve closed
11/18/2011	10:55:27 AM	SiCl4 pre valve closed
11/18/2011	10:55:27 AM	SiCl4 post valve closed
11/18/2011	10:55:27 AM	Bypass valve closed
11/18/2011	10:55:27 AM	Bubbler valve closed
11/18/2011	10:55:27 AM	Helium valve opened
11/18/2011	10:55:27 AM	Main Vac valve opened
11/18/2011	10:55:27 AM	Helium MFC set to  20.000000
11/18/2011	10:55:27 AM	H2 MFC set to  0.000000
11/18/2011	10:55:27 AM	BCl3 MFC set to  0.000000
11/18/2011	10:55:27 AM	PHl3 MFC set to  0.000000
11/18/2011	10:55:27 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:55:27 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:55:27 AM	Tube furnace set to 150
11/18/2011	10:55:57 AM	Helium valve closed
11/18/2011	10:55:57 AM	H2 valve closed
11/18/2011	10:55:57 AM	BCl3 valve closed
11/18/2011	10:55:57 AM	PH3 valve closed
11/18/2011	10:55:57 AM	SiCl4 pre valve closed
11/18/2011	10:55:57 AM	SiCl4 post valve closed
11/18/2011	10:55:57 AM	Bypass valve closed
11/18/2011	10:55:57 AM	Bubbler valve closed
11/18/2011	10:55:57 AM	Main Vac valve opened
11/18/2011	10:55:57 AM	Helium MFC set to  0.000000
11/18/2011	10:55:57 AM	H2 MFC set to  0.000000
11/18/2011	10:55:57 AM	BCl3 MFC set to  0.000000
11/18/2011	10:55:57 AM	PHl3 MFC set to  0.000000
11/18/2011	10:55:57 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:55:57 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:55:57 AM	Tube furnace set to 150
11/18/2011	10:56:27 AM	H2 valve closed
11/18/2011	10:56:27 AM	BCl3 valve closed
11/18/2011	10:56:27 AM	PH3 valve closed
11/18/2011	10:56:27 AM	SiCl4 pre valve closed
11/18/2011	10:56:27 AM	SiCl4 post valve closed
11/18/2011	10:56:27 AM	Bypass valve closed
11/18/2011	10:56:27 AM	Bubbler valve closed
11/18/2011	10:56:27 AM	Helium valve opened
11/18/2011	10:56:27 AM	Main Vac valve opened
11/18/2011	10:56:27 AM	Helium MFC set to  20.000000
11/18/2011	10:56:27 AM	H2 MFC set to  0.000000
11/18/2011	10:56:27 AM	BCl3 MFC set to  0.000000
11/18/2011	10:56:27 AM	PHl3 MFC set to  0.000000
11/18/2011	10:56:27 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:56:27 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:56:27 AM	Tube furnace set to 150
11/18/2011	10:56:57 AM	Helium valve closed
11/18/2011	10:56:57 AM	H2 valve closed
11/18/2011	10:56:57 AM	BCl3 valve closed
11/18/2011	10:56:57 AM	PH3 valve closed
11/18/2011	10:56:57 AM	SiCl4 pre valve closed
11/18/2011	10:56:57 AM	SiCl4 post valve closed
11/18/2011	10:56:57 AM	Bypass valve closed
11/18/2011	10:56:57 AM	Bubbler valve closed
11/18/2011	10:56:57 AM	Main Vac valve opened
11/18/2011	10:56:57 AM	Helium MFC set to  0.000000
11/18/2011	10:56:57 AM	H2 MFC set to  0.000000
11/18/2011	10:56:57 AM	BCl3 MFC set to  0.000000
11/18/2011	10:56:57 AM	PHl3 MFC set to  0.000000
11/18/2011	10:56:57 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:56:57 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:56:57 AM	Tube furnace set to 150
11/18/2011	10:57:27 AM	H2 valve closed
11/18/2011	10:57:27 AM	BCl3 valve closed
11/18/2011	10:57:27 AM	PH3 valve closed
11/18/2011	10:57:27 AM	SiCl4 pre valve closed
11/18/2011	10:57:27 AM	SiCl4 post valve closed
11/18/2011	10:57:27 AM	Bypass valve closed
11/18/2011	10:57:27 AM	Bubbler valve closed
11/18/2011	10:57:27 AM	Helium valve opened
11/18/2011	10:57:27 AM	Main Vac valve opened
11/18/2011	10:57:27 AM	Helium MFC set to  20.000000
11/18/2011	10:57:27 AM	H2 MFC set to  0.000000
11/18/2011	10:57:27 AM	BCl3 MFC set to  0.000000
11/18/2011	10:57:27 AM	PHl3 MFC set to  0.000000
11/18/2011	10:57:27 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:57:27 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:57:28 AM	Tube furnace set to 150
11/18/2011	10:57:58 AM	Helium valve closed
11/18/2011	10:57:58 AM	H2 valve closed
11/18/2011	10:57:58 AM	BCl3 valve closed
11/18/2011	10:57:58 AM	PH3 valve closed
11/18/2011	10:57:58 AM	SiCl4 pre valve closed
11/18/2011	10:57:58 AM	SiCl4 post valve closed
11/18/2011	10:57:58 AM	Bypass valve closed
11/18/2011	10:57:58 AM	Bubbler valve closed
11/18/2011	10:57:58 AM	Main Vac valve opened
11/18/2011	10:57:58 AM	Helium MFC set to  0.000000
11/18/2011	10:57:58 AM	H2 MFC set to  0.000000
11/18/2011	10:57:58 AM	BCl3 MFC set to  0.000000
11/18/2011	10:57:58 AM	PHl3 MFC set to  0.000000
11/18/2011	10:57:58 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:57:58 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:57:58 AM	Tube furnace set to 150
11/18/2011	10:58:28 AM	H2 valve closed
11/18/2011	10:58:28 AM	BCl3 valve closed
11/18/2011	10:58:28 AM	PH3 valve closed
11/18/2011	10:58:28 AM	SiCl4 pre valve closed
11/18/2011	10:58:28 AM	SiCl4 post valve closed
11/18/2011	10:58:28 AM	Bypass valve closed
11/18/2011	10:58:28 AM	Bubbler valve closed
11/18/2011	10:58:28 AM	Helium valve opened
11/18/2011	10:58:28 AM	Main Vac valve opened
11/18/2011	10:58:28 AM	Helium MFC set to  20.000000
11/18/2011	10:58:28 AM	H2 MFC set to  0.000000
11/18/2011	10:58:28 AM	BCl3 MFC set to  0.000000
11/18/2011	10:58:28 AM	PHl3 MFC set to  0.000000
11/18/2011	10:58:28 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:58:28 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:58:28 AM	Tube furnace set to 150
11/18/2011	10:58:58 AM	Helium valve closed
11/18/2011	10:58:58 AM	H2 valve closed
11/18/2011	10:58:58 AM	BCl3 valve closed
11/18/2011	10:58:58 AM	PH3 valve closed
11/18/2011	10:58:58 AM	SiCl4 pre valve closed
11/18/2011	10:58:58 AM	SiCl4 post valve closed
11/18/2011	10:58:58 AM	Bypass valve closed
11/18/2011	10:58:58 AM	Bubbler valve closed
11/18/2011	10:58:58 AM	Main Vac valve opened
11/18/2011	10:58:58 AM	Helium MFC set to  0.000000
11/18/2011	10:58:58 AM	H2 MFC set to  0.000000
11/18/2011	10:58:58 AM	BCl3 MFC set to  0.000000
11/18/2011	10:58:58 AM	PHl3 MFC set to  0.000000
11/18/2011	10:58:58 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:58:58 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:58:58 AM	Tube furnace set to 150
11/18/2011	10:59:28 AM	H2 valve closed
11/18/2011	10:59:28 AM	BCl3 valve closed
11/18/2011	10:59:28 AM	PH3 valve closed
11/18/2011	10:59:28 AM	SiCl4 pre valve closed
11/18/2011	10:59:28 AM	SiCl4 post valve closed
11/18/2011	10:59:28 AM	Bypass valve closed
11/18/2011	10:59:28 AM	Bubbler valve closed
11/18/2011	10:59:28 AM	Helium valve opened
11/18/2011	10:59:28 AM	Main Vac valve opened
11/18/2011	10:59:28 AM	Helium MFC set to  20.000000
11/18/2011	10:59:28 AM	H2 MFC set to  0.000000
11/18/2011	10:59:28 AM	BCl3 MFC set to  0.000000
11/18/2011	10:59:28 AM	PHl3 MFC set to  0.000000
11/18/2011	10:59:28 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:59:28 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:59:28 AM	Tube furnace set to 150
11/18/2011	10:59:58 AM	Helium valve closed
11/18/2011	10:59:58 AM	H2 valve closed
11/18/2011	10:59:58 AM	BCl3 valve closed
11/18/2011	10:59:58 AM	PH3 valve closed
11/18/2011	10:59:58 AM	SiCl4 pre valve closed
11/18/2011	10:59:58 AM	SiCl4 post valve closed
11/18/2011	10:59:58 AM	Bypass valve closed
11/18/2011	10:59:58 AM	Bubbler valve closed
11/18/2011	10:59:58 AM	Main Vac valve opened
11/18/2011	10:59:58 AM	Helium MFC set to  0.000000
11/18/2011	10:59:58 AM	H2 MFC set to  0.000000
11/18/2011	10:59:58 AM	BCl3 MFC set to  0.000000
11/18/2011	10:59:58 AM	PHl3 MFC set to  0.000000
11/18/2011	10:59:58 AM	SiCl4 MFC set to  0.000000
11/18/2011	10:59:58 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:59:59 AM	Tube furnace set to 150
11/18/2011	11:00:29 AM	H2 valve closed
11/18/2011	11:00:29 AM	BCl3 valve closed
11/18/2011	11:00:29 AM	PH3 valve closed
11/18/2011	11:00:29 AM	SiCl4 pre valve closed
11/18/2011	11:00:29 AM	SiCl4 post valve closed
11/18/2011	11:00:29 AM	Bypass valve closed
11/18/2011	11:00:29 AM	Bubbler valve closed
11/18/2011	11:00:29 AM	Helium valve opened
11/18/2011	11:00:29 AM	Main Vac valve opened
11/18/2011	11:00:29 AM	Helium MFC set to  20.000000
11/18/2011	11:00:29 AM	H2 MFC set to  0.000000
11/18/2011	11:00:29 AM	BCl3 MFC set to  0.000000
11/18/2011	11:00:29 AM	PHl3 MFC set to  0.000000
11/18/2011	11:00:29 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:00:29 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:00:29 AM	Tube furnace set to 150
11/18/2011	11:00:59 AM	Helium valve closed
11/18/2011	11:00:59 AM	H2 valve closed
11/18/2011	11:00:59 AM	BCl3 valve closed
11/18/2011	11:00:59 AM	PH3 valve closed
11/18/2011	11:00:59 AM	SiCl4 pre valve closed
11/18/2011	11:00:59 AM	SiCl4 post valve closed
11/18/2011	11:00:59 AM	Bypass valve closed
11/18/2011	11:00:59 AM	Bubbler valve closed
11/18/2011	11:00:59 AM	Main Vac valve opened
11/18/2011	11:00:59 AM	Helium MFC set to  0.000000
11/18/2011	11:00:59 AM	H2 MFC set to  0.000000
11/18/2011	11:00:59 AM	BCl3 MFC set to  0.000000
11/18/2011	11:00:59 AM	PHl3 MFC set to  0.000000
11/18/2011	11:00:59 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:00:59 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:00:59 AM	Tube furnace set to 150
11/18/2011	11:01:29 AM	H2 valve closed
11/18/2011	11:01:29 AM	BCl3 valve closed
11/18/2011	11:01:29 AM	PH3 valve closed
11/18/2011	11:01:29 AM	SiCl4 pre valve closed
11/18/2011	11:01:29 AM	SiCl4 post valve closed
11/18/2011	11:01:29 AM	Bypass valve closed
11/18/2011	11:01:29 AM	Bubbler valve closed
11/18/2011	11:01:29 AM	Helium valve opened
11/18/2011	11:01:29 AM	Main Vac valve opened
11/18/2011	11:01:29 AM	Helium MFC set to  20.000000
11/18/2011	11:01:29 AM	H2 MFC set to  0.000000
11/18/2011	11:01:29 AM	BCl3 MFC set to  0.000000
11/18/2011	11:01:29 AM	PHl3 MFC set to  0.000000
11/18/2011	11:01:29 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:01:29 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:01:29 AM	Tube furnace set to 150
11/18/2011	11:01:59 AM	Helium valve closed
11/18/2011	11:01:59 AM	H2 valve closed
11/18/2011	11:01:59 AM	BCl3 valve closed
11/18/2011	11:01:59 AM	PH3 valve closed
11/18/2011	11:01:59 AM	SiCl4 pre valve closed
11/18/2011	11:01:59 AM	SiCl4 post valve closed
11/18/2011	11:01:59 AM	Bypass valve closed
11/18/2011	11:01:59 AM	Bubbler valve closed
11/18/2011	11:01:59 AM	Main Vac valve opened
11/18/2011	11:01:59 AM	Helium MFC set to  0.000000
11/18/2011	11:01:59 AM	H2 MFC set to  0.000000
11/18/2011	11:01:59 AM	BCl3 MFC set to  0.000000
11/18/2011	11:01:59 AM	PHl3 MFC set to  0.000000
11/18/2011	11:01:59 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:01:59 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:01:59 AM	Tube furnace set to 150
11/18/2011	11:02:29 AM	H2 valve closed
11/18/2011	11:02:29 AM	BCl3 valve closed
11/18/2011	11:02:29 AM	PH3 valve closed
11/18/2011	11:02:29 AM	SiCl4 pre valve closed
11/18/2011	11:02:29 AM	SiCl4 post valve closed
11/18/2011	11:02:29 AM	Bypass valve closed
11/18/2011	11:02:29 AM	Bubbler valve closed
11/18/2011	11:02:30 AM	Helium valve opened
11/18/2011	11:02:30 AM	Main Vac valve opened
11/18/2011	11:02:30 AM	Helium MFC set to  20.000000
11/18/2011	11:02:30 AM	H2 MFC set to  0.000000
11/18/2011	11:02:30 AM	BCl3 MFC set to  0.000000
11/18/2011	11:02:30 AM	PHl3 MFC set to  0.000000
11/18/2011	11:02:30 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:02:30 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:02:30 AM	Tube furnace set to 150
11/18/2011	11:03:00 AM	Helium valve closed
11/18/2011	11:03:00 AM	H2 valve closed
11/18/2011	11:03:00 AM	BCl3 valve closed
11/18/2011	11:03:00 AM	PH3 valve closed
11/18/2011	11:03:00 AM	SiCl4 pre valve closed
11/18/2011	11:03:00 AM	SiCl4 post valve closed
11/18/2011	11:03:00 AM	Bypass valve closed
11/18/2011	11:03:00 AM	Bubbler valve closed
11/18/2011	11:03:00 AM	Main Vac valve opened
11/18/2011	11:03:00 AM	Helium MFC set to  0.000000
11/18/2011	11:03:00 AM	H2 MFC set to  0.000000
11/18/2011	11:03:00 AM	BCl3 MFC set to  0.000000
11/18/2011	11:03:00 AM	PHl3 MFC set to  0.000000
11/18/2011	11:03:00 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:03:00 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:03:00 AM	Tube furnace set to 150
11/18/2011	11:03:30 AM	H2 valve closed
11/18/2011	11:03:30 AM	BCl3 valve closed
11/18/2011	11:03:30 AM	PH3 valve closed
11/18/2011	11:03:30 AM	SiCl4 pre valve closed
11/18/2011	11:03:30 AM	SiCl4 post valve closed
11/18/2011	11:03:30 AM	Bypass valve closed
11/18/2011	11:03:30 AM	Bubbler valve closed
11/18/2011	11:03:30 AM	Helium valve opened
11/18/2011	11:03:30 AM	Main Vac valve opened
11/18/2011	11:03:30 AM	Helium MFC set to  20.000000
11/18/2011	11:03:30 AM	H2 MFC set to  0.000000
11/18/2011	11:03:30 AM	BCl3 MFC set to  0.000000
11/18/2011	11:03:30 AM	PHl3 MFC set to  0.000000
11/18/2011	11:03:30 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:03:30 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:03:30 AM	Tube furnace set to 150
11/18/2011	11:03:30 AM	Helium valve closed
11/18/2011	11:03:30 AM	H2 valve closed
11/18/2011	11:03:30 AM	BCl3 valve closed
11/18/2011	11:03:30 AM	PH3 valve closed
11/18/2011	11:03:30 AM	SiCl4 pre valve closed
11/18/2011	11:03:30 AM	SiCl4 post valve closed
11/18/2011	11:03:30 AM	Bypass valve closed
11/18/2011	11:03:30 AM	Bubbler valve closed
11/18/2011	11:03:30 AM	Main Vac valve opened
11/18/2011	11:03:30 AM	Helium MFC set to  0.000000
11/18/2011	11:03:30 AM	H2 MFC set to  0.000000
11/18/2011	11:03:30 AM	BCl3 MFC set to  0.000000
11/18/2011	11:03:30 AM	PHl3 MFC set to  0.000000
11/18/2011	11:03:30 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:03:30 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:03:31 AM	Tube furnace set to 180
11/18/2011	11:03:33 AM	Run finished at 11:03 AM
11/18/2011	11:03:49 AM	Recipe started at 11:03 AM
11/18/2011	11:03:49 AM	Helium valve closed
11/18/2011	11:03:49 AM	H2 valve closed
11/18/2011	11:03:49 AM	BCl3 valve closed
11/18/2011	11:03:49 AM	PH3 valve closed
11/18/2011	11:03:49 AM	SiCl4 pre valve closed
11/18/2011	11:03:49 AM	SiCl4 post valve closed
11/18/2011	11:03:49 AM	Main Vac valve closed
11/18/2011	11:03:49 AM	Bubbler valve closed
11/18/2011	11:03:49 AM	Bypass valve opened
11/18/2011	11:03:49 AM	Helium MFC set to  0.000000
11/18/2011	11:03:49 AM	H2 MFC set to  0.000000
11/18/2011	11:03:49 AM	BCl3 MFC set to  0.000000
11/18/2011	11:03:49 AM	PHl3 MFC set to  0.000000
11/18/2011	11:03:49 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:03:49 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:03:50 AM	Tube furnace set to 180
11/18/2011	11:03:50 AM	Helium valve closed
11/18/2011	11:03:50 AM	H2 valve closed
11/18/2011	11:03:50 AM	BCl3 valve closed
11/18/2011	11:03:50 AM	PH3 valve closed
11/18/2011	11:03:50 AM	SiCl4 pre valve closed
11/18/2011	11:03:50 AM	SiCl4 post valve closed
11/18/2011	11:03:50 AM	Main Vac valve closed
11/18/2011	11:03:50 AM	Bubbler valve closed
11/18/2011	11:03:50 AM	Bypass valve opened
11/18/2011	11:03:50 AM	Helium MFC set to  0.000000
11/18/2011	11:03:50 AM	H2 MFC set to  0.000000
11/18/2011	11:03:50 AM	BCl3 MFC set to  0.000000
11/18/2011	11:03:50 AM	PHl3 MFC set to  0.000000
11/18/2011	11:03:50 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:03:50 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:03:50 AM	Tube furnace set to 150
11/18/2011	11:04:20 AM	Helium valve closed
11/18/2011	11:04:20 AM	H2 valve closed
11/18/2011	11:04:20 AM	BCl3 valve closed
11/18/2011	11:04:20 AM	PH3 valve closed
11/18/2011	11:04:20 AM	SiCl4 pre valve closed
11/18/2011	11:04:20 AM	SiCl4 post valve closed
11/18/2011	11:04:20 AM	Bypass valve closed
11/18/2011	11:04:20 AM	Bubbler valve closed
11/18/2011	11:04:20 AM	Main Vac valve opened
11/18/2011	11:04:20 AM	Helium MFC set to  0.000000
11/18/2011	11:04:20 AM	H2 MFC set to  0.000000
11/18/2011	11:04:20 AM	BCl3 MFC set to  0.000000
11/18/2011	11:04:20 AM	PHl3 MFC set to  0.000000
11/18/2011	11:04:20 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:04:20 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:04:20 AM	Tube furnace set to 180
11/18/2011	11:04:50 AM	H2 valve closed
11/18/2011	11:04:50 AM	BCl3 valve closed
11/18/2011	11:04:50 AM	PH3 valve closed
11/18/2011	11:04:50 AM	SiCl4 pre valve closed
11/18/2011	11:04:50 AM	SiCl4 post valve closed
11/18/2011	11:04:50 AM	Bypass valve closed
11/18/2011	11:04:50 AM	Bubbler valve closed
11/18/2011	11:04:50 AM	Helium valve opened
11/18/2011	11:04:50 AM	Main Vac valve opened
11/18/2011	11:04:50 AM	Helium MFC set to  20.000000
11/18/2011	11:04:50 AM	H2 MFC set to  0.000000
11/18/2011	11:04:50 AM	BCl3 MFC set to  0.000000
11/18/2011	11:04:50 AM	PHl3 MFC set to  0.000000
11/18/2011	11:04:50 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:04:50 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:04:50 AM	Tube furnace set to 180
11/18/2011	11:05:20 AM	Helium valve closed
11/18/2011	11:05:20 AM	H2 valve closed
11/18/2011	11:05:20 AM	BCl3 valve closed
11/18/2011	11:05:20 AM	PH3 valve closed
11/18/2011	11:05:20 AM	SiCl4 pre valve closed
11/18/2011	11:05:20 AM	SiCl4 post valve closed
11/18/2011	11:05:20 AM	Bypass valve closed
11/18/2011	11:05:20 AM	Bubbler valve closed
11/18/2011	11:05:20 AM	Main Vac valve opened
11/18/2011	11:05:20 AM	Helium MFC set to  0.000000
11/18/2011	11:05:20 AM	H2 MFC set to  0.000000
11/18/2011	11:05:20 AM	BCl3 MFC set to  0.000000
11/18/2011	11:05:20 AM	PHl3 MFC set to  0.000000
11/18/2011	11:05:20 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:05:20 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:05:21 AM	Tube furnace set to 150
11/18/2011	11:05:51 AM	H2 valve closed
11/18/2011	11:05:51 AM	BCl3 valve closed
11/18/2011	11:05:51 AM	PH3 valve closed
11/18/2011	11:05:51 AM	SiCl4 pre valve closed
11/18/2011	11:05:51 AM	SiCl4 post valve closed
11/18/2011	11:05:51 AM	Bypass valve closed
11/18/2011	11:05:51 AM	Bubbler valve closed
11/18/2011	11:05:51 AM	Helium valve opened
11/18/2011	11:05:51 AM	Main Vac valve opened
11/18/2011	11:05:51 AM	Helium MFC set to  20.000000
11/18/2011	11:05:51 AM	H2 MFC set to  0.000000
11/18/2011	11:05:51 AM	BCl3 MFC set to  0.000000
11/18/2011	11:05:51 AM	PHl3 MFC set to  0.000000
11/18/2011	11:05:51 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:05:51 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:05:51 AM	Tube furnace set to 180
11/18/2011	11:06:21 AM	Helium valve closed
11/18/2011	11:06:21 AM	H2 valve closed
11/18/2011	11:06:21 AM	BCl3 valve closed
11/18/2011	11:06:21 AM	PH3 valve closed
11/18/2011	11:06:21 AM	SiCl4 pre valve closed
11/18/2011	11:06:21 AM	SiCl4 post valve closed
11/18/2011	11:06:21 AM	Bypass valve closed
11/18/2011	11:06:21 AM	Bubbler valve closed
11/18/2011	11:06:21 AM	Main Vac valve opened
11/18/2011	11:06:21 AM	Helium MFC set to  0.000000
11/18/2011	11:06:21 AM	H2 MFC set to  0.000000
11/18/2011	11:06:21 AM	BCl3 MFC set to  0.000000
11/18/2011	11:06:21 AM	PHl3 MFC set to  0.000000
11/18/2011	11:06:21 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:06:21 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:06:21 AM	Tube furnace set to 150
11/18/2011	11:06:51 AM	H2 valve closed
11/18/2011	11:06:51 AM	BCl3 valve closed
11/18/2011	11:06:51 AM	PH3 valve closed
11/18/2011	11:06:51 AM	SiCl4 pre valve closed
11/18/2011	11:06:51 AM	SiCl4 post valve closed
11/18/2011	11:06:51 AM	Bypass valve closed
11/18/2011	11:06:51 AM	Bubbler valve closed
11/18/2011	11:06:51 AM	Helium valve opened
11/18/2011	11:06:51 AM	Main Vac valve opened
11/18/2011	11:06:51 AM	Helium MFC set to  20.000000
11/18/2011	11:06:51 AM	H2 MFC set to  0.000000
11/18/2011	11:06:51 AM	BCl3 MFC set to  0.000000
11/18/2011	11:06:51 AM	PHl3 MFC set to  0.000000
11/18/2011	11:06:51 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:06:51 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:06:51 AM	Tube furnace set to 150
11/18/2011	11:07:21 AM	Helium valve closed
11/18/2011	11:07:21 AM	H2 valve closed
11/18/2011	11:07:21 AM	BCl3 valve closed
11/18/2011	11:07:21 AM	PH3 valve closed
11/18/2011	11:07:21 AM	SiCl4 pre valve closed
11/18/2011	11:07:21 AM	SiCl4 post valve closed
11/18/2011	11:07:21 AM	Bypass valve closed
11/18/2011	11:07:21 AM	Bubbler valve closed
11/18/2011	11:07:21 AM	Main Vac valve opened
11/18/2011	11:07:21 AM	Helium MFC set to  0.000000
11/18/2011	11:07:21 AM	H2 MFC set to  0.000000
11/18/2011	11:07:21 AM	BCl3 MFC set to  0.000000
11/18/2011	11:07:21 AM	PHl3 MFC set to  0.000000
11/18/2011	11:07:21 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:07:21 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:07:21 AM	Tube furnace set to 150
11/18/2011	11:07:51 AM	H2 valve closed
11/18/2011	11:07:51 AM	BCl3 valve closed
11/18/2011	11:07:51 AM	PH3 valve closed
11/18/2011	11:07:51 AM	SiCl4 pre valve closed
11/18/2011	11:07:51 AM	SiCl4 post valve closed
11/18/2011	11:07:51 AM	Bypass valve closed
11/18/2011	11:07:51 AM	Bubbler valve closed
11/18/2011	11:07:51 AM	Helium valve opened
11/18/2011	11:07:51 AM	Main Vac valve opened
11/18/2011	11:07:51 AM	Helium MFC set to  20.000000
11/18/2011	11:07:51 AM	H2 MFC set to  0.000000
11/18/2011	11:07:51 AM	BCl3 MFC set to  0.000000
11/18/2011	11:07:51 AM	PHl3 MFC set to  0.000000
11/18/2011	11:07:51 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:07:51 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:07:52 AM	Tube furnace set to 180
11/18/2011	11:08:22 AM	Helium valve closed
11/18/2011	11:08:22 AM	H2 valve closed
11/18/2011	11:08:22 AM	BCl3 valve closed
11/18/2011	11:08:22 AM	PH3 valve closed
11/18/2011	11:08:22 AM	SiCl4 pre valve closed
11/18/2011	11:08:22 AM	SiCl4 post valve closed
11/18/2011	11:08:22 AM	Bypass valve closed
11/18/2011	11:08:22 AM	Bubbler valve closed
11/18/2011	11:08:22 AM	Main Vac valve opened
11/18/2011	11:08:22 AM	Helium MFC set to  0.000000
11/18/2011	11:08:22 AM	H2 MFC set to  0.000000
11/18/2011	11:08:22 AM	BCl3 MFC set to  0.000000
11/18/2011	11:08:22 AM	PHl3 MFC set to  0.000000
11/18/2011	11:08:22 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:08:22 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:08:22 AM	Tube furnace set to 150
11/18/2011	11:08:52 AM	H2 valve closed
11/18/2011	11:08:52 AM	BCl3 valve closed
11/18/2011	11:08:52 AM	PH3 valve closed
11/18/2011	11:08:52 AM	SiCl4 pre valve closed
11/18/2011	11:08:52 AM	SiCl4 post valve closed
11/18/2011	11:08:52 AM	Bypass valve closed
11/18/2011	11:08:52 AM	Bubbler valve closed
11/18/2011	11:08:52 AM	Helium valve opened
11/18/2011	11:08:52 AM	Main Vac valve opened
11/18/2011	11:08:52 AM	Helium MFC set to  20.000000
11/18/2011	11:08:52 AM	H2 MFC set to  0.000000
11/18/2011	11:08:52 AM	BCl3 MFC set to  0.000000
11/18/2011	11:08:52 AM	PHl3 MFC set to  0.000000
11/18/2011	11:08:52 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:08:52 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:08:52 AM	Tube furnace set to 150
11/18/2011	11:09:22 AM	Helium valve closed
11/18/2011	11:09:22 AM	H2 valve closed
11/18/2011	11:09:22 AM	BCl3 valve closed
11/18/2011	11:09:22 AM	PH3 valve closed
11/18/2011	11:09:22 AM	SiCl4 pre valve closed
11/18/2011	11:09:22 AM	SiCl4 post valve closed
11/18/2011	11:09:22 AM	Bypass valve closed
11/18/2011	11:09:22 AM	Bubbler valve closed
11/18/2011	11:09:22 AM	Main Vac valve opened
11/18/2011	11:09:22 AM	Helium MFC set to  0.000000
11/18/2011	11:09:22 AM	H2 MFC set to  0.000000
11/18/2011	11:09:22 AM	BCl3 MFC set to  0.000000
11/18/2011	11:09:22 AM	PHl3 MFC set to  0.000000
11/18/2011	11:09:22 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:09:22 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:09:22 AM	Tube furnace set to 150
11/18/2011	11:09:52 AM	H2 valve closed
11/18/2011	11:09:52 AM	BCl3 valve closed
11/18/2011	11:09:52 AM	PH3 valve closed
11/18/2011	11:09:52 AM	SiCl4 pre valve closed
11/18/2011	11:09:52 AM	SiCl4 post valve closed
11/18/2011	11:09:52 AM	Bypass valve closed
11/18/2011	11:09:52 AM	Bubbler valve closed
11/18/2011	11:09:52 AM	Helium valve opened
11/18/2011	11:09:52 AM	Main Vac valve opened
11/18/2011	11:09:52 AM	Helium MFC set to  20.000000
11/18/2011	11:09:52 AM	H2 MFC set to  0.000000
11/18/2011	11:09:52 AM	BCl3 MFC set to  0.000000
11/18/2011	11:09:52 AM	PHl3 MFC set to  0.000000
11/18/2011	11:09:52 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:09:52 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:09:52 AM	Tube furnace set to 150
11/18/2011	11:10:22 AM	Helium valve closed
11/18/2011	11:10:22 AM	H2 valve closed
11/18/2011	11:10:22 AM	BCl3 valve closed
11/18/2011	11:10:22 AM	PH3 valve closed
11/18/2011	11:10:22 AM	SiCl4 pre valve closed
11/18/2011	11:10:22 AM	SiCl4 post valve closed
11/18/2011	11:10:22 AM	Bypass valve closed
11/18/2011	11:10:22 AM	Bubbler valve closed
11/18/2011	11:10:22 AM	Main Vac valve opened
11/18/2011	11:10:22 AM	Helium MFC set to  0.000000
11/18/2011	11:10:22 AM	H2 MFC set to  0.000000
11/18/2011	11:10:22 AM	BCl3 MFC set to  0.000000
11/18/2011	11:10:22 AM	PHl3 MFC set to  0.000000
11/18/2011	11:10:22 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:10:22 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:10:23 AM	Tube furnace set to 150
11/18/2011	11:10:53 AM	H2 valve closed
11/18/2011	11:10:53 AM	BCl3 valve closed
11/18/2011	11:10:53 AM	PH3 valve closed
11/18/2011	11:10:53 AM	SiCl4 pre valve closed
11/18/2011	11:10:53 AM	SiCl4 post valve closed
11/18/2011	11:10:53 AM	Bypass valve closed
11/18/2011	11:10:53 AM	Bubbler valve closed
11/18/2011	11:10:53 AM	Helium valve opened
11/18/2011	11:10:53 AM	Main Vac valve opened
11/18/2011	11:10:53 AM	Helium MFC set to  20.000000
11/18/2011	11:10:53 AM	H2 MFC set to  0.000000
11/18/2011	11:10:53 AM	BCl3 MFC set to  0.000000
11/18/2011	11:10:53 AM	PHl3 MFC set to  0.000000
11/18/2011	11:10:53 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:10:53 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:10:53 AM	Tube furnace set to 150
11/18/2011	11:11:23 AM	Helium valve closed
11/18/2011	11:11:23 AM	H2 valve closed
11/18/2011	11:11:23 AM	BCl3 valve closed
11/18/2011	11:11:23 AM	PH3 valve closed
11/18/2011	11:11:23 AM	SiCl4 pre valve closed
11/18/2011	11:11:23 AM	SiCl4 post valve closed
11/18/2011	11:11:23 AM	Bypass valve closed
11/18/2011	11:11:23 AM	Bubbler valve closed
11/18/2011	11:11:23 AM	Main Vac valve opened
11/18/2011	11:11:23 AM	Helium MFC set to  0.000000
11/18/2011	11:11:23 AM	H2 MFC set to  0.000000
11/18/2011	11:11:23 AM	BCl3 MFC set to  0.000000
11/18/2011	11:11:23 AM	PHl3 MFC set to  0.000000
11/18/2011	11:11:23 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:11:23 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:11:23 AM	Tube furnace set to 150
11/18/2011	11:11:53 AM	H2 valve closed
11/18/2011	11:11:53 AM	BCl3 valve closed
11/18/2011	11:11:53 AM	PH3 valve closed
11/18/2011	11:11:53 AM	SiCl4 pre valve closed
11/18/2011	11:11:53 AM	SiCl4 post valve closed
11/18/2011	11:11:53 AM	Bypass valve closed
11/18/2011	11:11:53 AM	Bubbler valve closed
11/18/2011	11:11:53 AM	Helium valve opened
11/18/2011	11:11:53 AM	Main Vac valve opened
11/18/2011	11:11:53 AM	Helium MFC set to  20.000000
11/18/2011	11:11:53 AM	H2 MFC set to  0.000000
11/18/2011	11:11:53 AM	BCl3 MFC set to  0.000000
11/18/2011	11:11:53 AM	PHl3 MFC set to  0.000000
11/18/2011	11:11:53 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:11:53 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:11:53 AM	Tube furnace set to 150
11/18/2011	11:12:23 AM	Helium valve closed
11/18/2011	11:12:23 AM	H2 valve closed
11/18/2011	11:12:23 AM	BCl3 valve closed
11/18/2011	11:12:23 AM	PH3 valve closed
11/18/2011	11:12:23 AM	SiCl4 pre valve closed
11/18/2011	11:12:23 AM	SiCl4 post valve closed
11/18/2011	11:12:23 AM	Bypass valve closed
11/18/2011	11:12:23 AM	Bubbler valve closed
11/18/2011	11:12:23 AM	Main Vac valve opened
11/18/2011	11:12:23 AM	Helium MFC set to  0.000000
11/18/2011	11:12:23 AM	H2 MFC set to  0.000000
11/18/2011	11:12:23 AM	BCl3 MFC set to  0.000000
11/18/2011	11:12:23 AM	PHl3 MFC set to  0.000000
11/18/2011	11:12:23 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:12:23 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:12:23 AM	Tube furnace set to 150
11/18/2011	11:12:53 AM	H2 valve closed
11/18/2011	11:12:53 AM	BCl3 valve closed
11/18/2011	11:12:53 AM	PH3 valve closed
11/18/2011	11:12:53 AM	SiCl4 pre valve closed
11/18/2011	11:12:53 AM	SiCl4 post valve closed
11/18/2011	11:12:53 AM	Bypass valve closed
11/18/2011	11:12:53 AM	Bubbler valve closed
11/18/2011	11:12:54 AM	Helium valve opened
11/18/2011	11:12:54 AM	Main Vac valve opened
11/18/2011	11:12:54 AM	Helium MFC set to  20.000000
11/18/2011	11:12:54 AM	H2 MFC set to  0.000000
11/18/2011	11:12:54 AM	BCl3 MFC set to  0.000000
11/18/2011	11:12:54 AM	PHl3 MFC set to  0.000000
11/18/2011	11:12:54 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:12:54 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:12:54 AM	Tube furnace set to 150
11/18/2011	11:13:24 AM	Helium valve closed
11/18/2011	11:13:24 AM	H2 valve closed
11/18/2011	11:13:24 AM	BCl3 valve closed
11/18/2011	11:13:24 AM	PH3 valve closed
11/18/2011	11:13:24 AM	SiCl4 pre valve closed
11/18/2011	11:13:24 AM	SiCl4 post valve closed
11/18/2011	11:13:24 AM	Bypass valve closed
11/18/2011	11:13:24 AM	Bubbler valve closed
11/18/2011	11:13:24 AM	Main Vac valve opened
11/18/2011	11:13:24 AM	Helium MFC set to  0.000000
11/18/2011	11:13:24 AM	H2 MFC set to  0.000000
11/18/2011	11:13:24 AM	BCl3 MFC set to  0.000000
11/18/2011	11:13:24 AM	PHl3 MFC set to  0.000000
11/18/2011	11:13:24 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:13:24 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:13:24 AM	Tube furnace set to 150
11/18/2011	11:13:54 AM	H2 valve closed
11/18/2011	11:13:54 AM	BCl3 valve closed
11/18/2011	11:13:54 AM	PH3 valve closed
11/18/2011	11:13:54 AM	SiCl4 pre valve closed
11/18/2011	11:13:54 AM	SiCl4 post valve closed
11/18/2011	11:13:54 AM	Bypass valve closed
11/18/2011	11:13:54 AM	Bubbler valve closed
11/18/2011	11:13:54 AM	Helium valve opened
11/18/2011	11:13:54 AM	Main Vac valve opened
11/18/2011	11:13:54 AM	Helium MFC set to  20.000000
11/18/2011	11:13:54 AM	H2 MFC set to  0.000000
11/18/2011	11:13:54 AM	BCl3 MFC set to  0.000000
11/18/2011	11:13:54 AM	PHl3 MFC set to  0.000000
11/18/2011	11:13:54 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:13:54 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:13:54 AM	Tube furnace set to 150
11/18/2011	11:14:24 AM	Helium valve closed
11/18/2011	11:14:24 AM	H2 valve closed
11/18/2011	11:14:24 AM	BCl3 valve closed
11/18/2011	11:14:24 AM	PH3 valve closed
11/18/2011	11:14:24 AM	SiCl4 pre valve closed
11/18/2011	11:14:24 AM	SiCl4 post valve closed
11/18/2011	11:14:24 AM	Bypass valve closed
11/18/2011	11:14:24 AM	Bubbler valve closed
11/18/2011	11:14:24 AM	Main Vac valve opened
11/18/2011	11:14:24 AM	Helium MFC set to  0.000000
11/18/2011	11:14:24 AM	H2 MFC set to  0.000000
11/18/2011	11:14:24 AM	BCl3 MFC set to  0.000000
11/18/2011	11:14:24 AM	PHl3 MFC set to  0.000000
11/18/2011	11:14:24 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:14:24 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:14:24 AM	Tube furnace set to 150
11/18/2011	11:14:54 AM	H2 valve closed
11/18/2011	11:14:54 AM	BCl3 valve closed
11/18/2011	11:14:54 AM	PH3 valve closed
11/18/2011	11:14:54 AM	SiCl4 pre valve closed
11/18/2011	11:14:54 AM	SiCl4 post valve closed
11/18/2011	11:14:54 AM	Bypass valve closed
11/18/2011	11:14:54 AM	Bubbler valve closed
11/18/2011	11:14:54 AM	Helium valve opened
11/18/2011	11:14:54 AM	Main Vac valve opened
11/18/2011	11:14:54 AM	Helium MFC set to  20.000000
11/18/2011	11:14:54 AM	H2 MFC set to  0.000000
11/18/2011	11:14:54 AM	BCl3 MFC set to  0.000000
11/18/2011	11:14:54 AM	PHl3 MFC set to  0.000000
11/18/2011	11:14:54 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:14:54 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:14:54 AM	Tube furnace set to 150
11/18/2011	11:15:25 AM	Helium valve closed
11/18/2011	11:15:25 AM	H2 valve closed
11/18/2011	11:15:25 AM	BCl3 valve closed
11/18/2011	11:15:25 AM	PH3 valve closed
11/18/2011	11:15:25 AM	SiCl4 pre valve closed
11/18/2011	11:15:25 AM	SiCl4 post valve closed
11/18/2011	11:15:25 AM	Bypass valve closed
11/18/2011	11:15:25 AM	Bubbler valve closed
11/18/2011	11:15:25 AM	Main Vac valve opened
11/18/2011	11:15:25 AM	Helium MFC set to  0.000000
11/18/2011	11:15:25 AM	H2 MFC set to  0.000000
11/18/2011	11:15:25 AM	BCl3 MFC set to  0.000000
11/18/2011	11:15:25 AM	PHl3 MFC set to  0.000000
11/18/2011	11:15:25 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:15:25 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:15:25 AM	Tube furnace set to 150
11/18/2011	11:15:55 AM	H2 valve closed
11/18/2011	11:15:55 AM	BCl3 valve closed
11/18/2011	11:15:55 AM	PH3 valve closed
11/18/2011	11:15:55 AM	SiCl4 pre valve closed
11/18/2011	11:15:55 AM	SiCl4 post valve closed
11/18/2011	11:15:55 AM	Bypass valve closed
11/18/2011	11:15:55 AM	Bubbler valve closed
11/18/2011	11:15:55 AM	Helium valve opened
11/18/2011	11:15:55 AM	Main Vac valve opened
11/18/2011	11:15:55 AM	Helium MFC set to  20.000000
11/18/2011	11:15:55 AM	H2 MFC set to  0.000000
11/18/2011	11:15:55 AM	BCl3 MFC set to  0.000000
11/18/2011	11:15:55 AM	PHl3 MFC set to  0.000000
11/18/2011	11:15:55 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:15:55 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:15:55 AM	Tube furnace set to 150
11/18/2011	11:16:25 AM	Helium valve closed
11/18/2011	11:16:25 AM	H2 valve closed
11/18/2011	11:16:25 AM	BCl3 valve closed
11/18/2011	11:16:25 AM	PH3 valve closed
11/18/2011	11:16:25 AM	SiCl4 pre valve closed
11/18/2011	11:16:25 AM	SiCl4 post valve closed
11/18/2011	11:16:25 AM	Bypass valve closed
11/18/2011	11:16:25 AM	Bubbler valve closed
11/18/2011	11:16:25 AM	Main Vac valve opened
11/18/2011	11:16:25 AM	Helium MFC set to  0.000000
11/18/2011	11:16:25 AM	H2 MFC set to  0.000000
11/18/2011	11:16:25 AM	BCl3 MFC set to  0.000000
11/18/2011	11:16:25 AM	PHl3 MFC set to  0.000000
11/18/2011	11:16:25 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:16:25 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:16:25 AM	Tube furnace set to 150
11/18/2011	11:16:55 AM	H2 valve closed
11/18/2011	11:16:55 AM	BCl3 valve closed
11/18/2011	11:16:55 AM	PH3 valve closed
11/18/2011	11:16:55 AM	SiCl4 pre valve closed
11/18/2011	11:16:55 AM	SiCl4 post valve closed
11/18/2011	11:16:55 AM	Bypass valve closed
11/18/2011	11:16:55 AM	Bubbler valve closed
11/18/2011	11:16:55 AM	Helium valve opened
11/18/2011	11:16:55 AM	Main Vac valve opened
11/18/2011	11:16:55 AM	Helium MFC set to  20.000000
11/18/2011	11:16:55 AM	H2 MFC set to  0.000000
11/18/2011	11:16:55 AM	BCl3 MFC set to  0.000000
11/18/2011	11:16:55 AM	PHl3 MFC set to  0.000000
11/18/2011	11:16:55 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:16:55 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:16:55 AM	Tube furnace set to 150
11/18/2011	11:17:25 AM	Helium valve closed
11/18/2011	11:17:25 AM	H2 valve closed
11/18/2011	11:17:25 AM	BCl3 valve closed
11/18/2011	11:17:25 AM	PH3 valve closed
11/18/2011	11:17:25 AM	SiCl4 pre valve closed
11/18/2011	11:17:25 AM	SiCl4 post valve closed
11/18/2011	11:17:25 AM	Bypass valve closed
11/18/2011	11:17:25 AM	Bubbler valve closed
11/18/2011	11:17:25 AM	Main Vac valve opened
11/18/2011	11:17:25 AM	Helium MFC set to  0.000000
11/18/2011	11:17:25 AM	H2 MFC set to  0.000000
11/18/2011	11:17:25 AM	BCl3 MFC set to  0.000000
11/18/2011	11:17:25 AM	PHl3 MFC set to  0.000000
11/18/2011	11:17:25 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:17:25 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:17:26 AM	Tube furnace set to 150
11/18/2011	11:17:56 AM	H2 valve closed
11/18/2011	11:17:56 AM	BCl3 valve closed
11/18/2011	11:17:56 AM	PH3 valve closed
11/18/2011	11:17:56 AM	SiCl4 pre valve closed
11/18/2011	11:17:56 AM	SiCl4 post valve closed
11/18/2011	11:17:56 AM	Bypass valve closed
11/18/2011	11:17:56 AM	Bubbler valve closed
11/18/2011	11:17:56 AM	Helium valve opened
11/18/2011	11:17:56 AM	Main Vac valve opened
11/18/2011	11:17:56 AM	Helium MFC set to  20.000000
11/18/2011	11:17:56 AM	H2 MFC set to  0.000000
11/18/2011	11:17:56 AM	BCl3 MFC set to  0.000000
11/18/2011	11:17:56 AM	PHl3 MFC set to  0.000000
11/18/2011	11:17:56 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:17:56 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:17:56 AM	Tube furnace set to 150
11/18/2011	11:18:26 AM	Helium valve closed
11/18/2011	11:18:26 AM	H2 valve closed
11/18/2011	11:18:26 AM	BCl3 valve closed
11/18/2011	11:18:26 AM	PH3 valve closed
11/18/2011	11:18:26 AM	SiCl4 pre valve closed
11/18/2011	11:18:26 AM	SiCl4 post valve closed
11/18/2011	11:18:26 AM	Bypass valve closed
11/18/2011	11:18:26 AM	Bubbler valve closed
11/18/2011	11:18:26 AM	Main Vac valve opened
11/18/2011	11:18:26 AM	Helium MFC set to  0.000000
11/18/2011	11:18:26 AM	H2 MFC set to  0.000000
11/18/2011	11:18:26 AM	BCl3 MFC set to  0.000000
11/18/2011	11:18:26 AM	PHl3 MFC set to  0.000000
11/18/2011	11:18:26 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:18:26 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:18:26 AM	Tube furnace set to 150
11/18/2011	11:18:56 AM	H2 valve closed
11/18/2011	11:18:56 AM	BCl3 valve closed
11/18/2011	11:18:56 AM	PH3 valve closed
11/18/2011	11:18:56 AM	SiCl4 pre valve closed
11/18/2011	11:18:56 AM	SiCl4 post valve closed
11/18/2011	11:18:56 AM	Bypass valve closed
11/18/2011	11:18:56 AM	Bubbler valve closed
11/18/2011	11:18:56 AM	Helium valve opened
11/18/2011	11:18:56 AM	Main Vac valve opened
11/18/2011	11:18:56 AM	Helium MFC set to  20.000000
11/18/2011	11:18:56 AM	H2 MFC set to  0.000000
11/18/2011	11:18:56 AM	BCl3 MFC set to  0.000000
11/18/2011	11:18:56 AM	PHl3 MFC set to  0.000000
11/18/2011	11:18:56 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:18:56 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:18:56 AM	Tube furnace set to 150
11/18/2011	11:19:26 AM	Helium valve closed
11/18/2011	11:19:26 AM	H2 valve closed
11/18/2011	11:19:26 AM	BCl3 valve closed
11/18/2011	11:19:26 AM	PH3 valve closed
11/18/2011	11:19:26 AM	SiCl4 pre valve closed
11/18/2011	11:19:26 AM	SiCl4 post valve closed
11/18/2011	11:19:26 AM	Bypass valve closed
11/18/2011	11:19:26 AM	Bubbler valve closed
11/18/2011	11:19:26 AM	Main Vac valve opened
11/18/2011	11:19:26 AM	Helium MFC set to  0.000000
11/18/2011	11:19:26 AM	H2 MFC set to  0.000000
11/18/2011	11:19:26 AM	BCl3 MFC set to  0.000000
11/18/2011	11:19:26 AM	PHl3 MFC set to  0.000000
11/18/2011	11:19:26 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:19:26 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:19:26 AM	Tube furnace set to 150
11/18/2011	11:19:56 AM	H2 valve closed
11/18/2011	11:19:56 AM	BCl3 valve closed
11/18/2011	11:19:56 AM	PH3 valve closed
11/18/2011	11:19:56 AM	SiCl4 pre valve closed
11/18/2011	11:19:56 AM	SiCl4 post valve closed
11/18/2011	11:19:56 AM	Bypass valve closed
11/18/2011	11:19:56 AM	Bubbler valve closed
11/18/2011	11:19:56 AM	Helium valve opened
11/18/2011	11:19:56 AM	Main Vac valve opened
11/18/2011	11:19:56 AM	Helium MFC set to  20.000000
11/18/2011	11:19:56 AM	H2 MFC set to  0.000000
11/18/2011	11:19:56 AM	BCl3 MFC set to  0.000000
11/18/2011	11:19:56 AM	PHl3 MFC set to  0.000000
11/18/2011	11:19:56 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:19:56 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:19:57 AM	Tube furnace set to 150
11/18/2011	11:20:27 AM	Helium valve closed
11/18/2011	11:20:27 AM	H2 valve closed
11/18/2011	11:20:27 AM	BCl3 valve closed
11/18/2011	11:20:27 AM	PH3 valve closed
11/18/2011	11:20:27 AM	SiCl4 pre valve closed
11/18/2011	11:20:27 AM	SiCl4 post valve closed
11/18/2011	11:20:27 AM	Bypass valve closed
11/18/2011	11:20:27 AM	Bubbler valve closed
11/18/2011	11:20:27 AM	Main Vac valve opened
11/18/2011	11:20:27 AM	Helium MFC set to  0.000000
11/18/2011	11:20:27 AM	H2 MFC set to  0.000000
11/18/2011	11:20:27 AM	BCl3 MFC set to  0.000000
11/18/2011	11:20:27 AM	PHl3 MFC set to  0.000000
11/18/2011	11:20:27 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:20:27 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:20:27 AM	Tube furnace set to 150
11/18/2011	11:20:57 AM	H2 valve closed
11/18/2011	11:20:57 AM	BCl3 valve closed
11/18/2011	11:20:57 AM	PH3 valve closed
11/18/2011	11:20:57 AM	SiCl4 pre valve closed
11/18/2011	11:20:57 AM	SiCl4 post valve closed
11/18/2011	11:20:57 AM	Bypass valve closed
11/18/2011	11:20:57 AM	Bubbler valve closed
11/18/2011	11:20:57 AM	Helium valve opened
11/18/2011	11:20:57 AM	Main Vac valve opened
11/18/2011	11:20:57 AM	Helium MFC set to  20.000000
11/18/2011	11:20:57 AM	H2 MFC set to  0.000000
11/18/2011	11:20:57 AM	BCl3 MFC set to  0.000000
11/18/2011	11:20:57 AM	PHl3 MFC set to  0.000000
11/18/2011	11:20:57 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:20:57 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:20:57 AM	Tube furnace set to 150
11/18/2011	11:21:27 AM	Helium valve closed
11/18/2011	11:21:27 AM	H2 valve closed
11/18/2011	11:21:27 AM	BCl3 valve closed
11/18/2011	11:21:27 AM	PH3 valve closed
11/18/2011	11:21:27 AM	SiCl4 pre valve closed
11/18/2011	11:21:27 AM	SiCl4 post valve closed
11/18/2011	11:21:27 AM	Bypass valve closed
11/18/2011	11:21:27 AM	Bubbler valve closed
11/18/2011	11:21:27 AM	Main Vac valve opened
11/18/2011	11:21:27 AM	Helium MFC set to  0.000000
11/18/2011	11:21:27 AM	H2 MFC set to  0.000000
11/18/2011	11:21:27 AM	BCl3 MFC set to  0.000000
11/18/2011	11:21:27 AM	PHl3 MFC set to  0.000000
11/18/2011	11:21:27 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:21:27 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:21:27 AM	Tube furnace set to 150
11/18/2011	11:21:57 AM	H2 valve closed
11/18/2011	11:21:57 AM	BCl3 valve closed
11/18/2011	11:21:57 AM	PH3 valve closed
11/18/2011	11:21:57 AM	SiCl4 pre valve closed
11/18/2011	11:21:57 AM	SiCl4 post valve closed
11/18/2011	11:21:57 AM	Bypass valve closed
11/18/2011	11:21:57 AM	Bubbler valve closed
11/18/2011	11:21:57 AM	Helium valve opened
11/18/2011	11:21:57 AM	Main Vac valve opened
11/18/2011	11:21:57 AM	Helium MFC set to  20.000000
11/18/2011	11:21:57 AM	H2 MFC set to  0.000000
11/18/2011	11:21:57 AM	BCl3 MFC set to  0.000000
11/18/2011	11:21:57 AM	PHl3 MFC set to  0.000000
11/18/2011	11:21:57 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:21:57 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:21:58 AM	Tube furnace set to 150
11/18/2011	11:22:28 AM	Helium valve closed
11/18/2011	11:22:28 AM	H2 valve closed
11/18/2011	11:22:28 AM	BCl3 valve closed
11/18/2011	11:22:28 AM	PH3 valve closed
11/18/2011	11:22:28 AM	SiCl4 pre valve closed
11/18/2011	11:22:28 AM	SiCl4 post valve closed
11/18/2011	11:22:28 AM	Bypass valve closed
11/18/2011	11:22:28 AM	Bubbler valve closed
11/18/2011	11:22:28 AM	Main Vac valve opened
11/18/2011	11:22:28 AM	Helium MFC set to  0.000000
11/18/2011	11:22:28 AM	H2 MFC set to  0.000000
11/18/2011	11:22:28 AM	BCl3 MFC set to  0.000000
11/18/2011	11:22:28 AM	PHl3 MFC set to  0.000000
11/18/2011	11:22:28 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:22:28 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:22:28 AM	Tube furnace set to 150
11/18/2011	11:22:58 AM	H2 valve closed
11/18/2011	11:22:58 AM	BCl3 valve closed
11/18/2011	11:22:58 AM	PH3 valve closed
11/18/2011	11:22:58 AM	SiCl4 pre valve closed
11/18/2011	11:22:58 AM	SiCl4 post valve closed
11/18/2011	11:22:58 AM	Bypass valve closed
11/18/2011	11:22:58 AM	Bubbler valve closed
11/18/2011	11:22:58 AM	Helium valve opened
11/18/2011	11:22:58 AM	Main Vac valve opened
11/18/2011	11:22:58 AM	Helium MFC set to  20.000000
11/18/2011	11:22:58 AM	H2 MFC set to  0.000000
11/18/2011	11:22:58 AM	BCl3 MFC set to  0.000000
11/18/2011	11:22:58 AM	PHl3 MFC set to  0.000000
11/18/2011	11:22:58 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:22:58 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:22:58 AM	Tube furnace set to 150
11/18/2011	11:23:28 AM	Helium valve closed
11/18/2011	11:23:28 AM	H2 valve closed
11/18/2011	11:23:28 AM	BCl3 valve closed
11/18/2011	11:23:28 AM	PH3 valve closed
11/18/2011	11:23:28 AM	SiCl4 pre valve closed
11/18/2011	11:23:28 AM	SiCl4 post valve closed
11/18/2011	11:23:28 AM	Bypass valve closed
11/18/2011	11:23:28 AM	Bubbler valve closed
11/18/2011	11:23:28 AM	Main Vac valve opened
11/18/2011	11:23:28 AM	Helium MFC set to  0.000000
11/18/2011	11:23:28 AM	H2 MFC set to  0.000000
11/18/2011	11:23:28 AM	BCl3 MFC set to  0.000000
11/18/2011	11:23:28 AM	PHl3 MFC set to  0.000000
11/18/2011	11:23:28 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:23:28 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:23:28 AM	Tube furnace set to 150
11/18/2011	11:23:58 AM	H2 valve closed
11/18/2011	11:23:58 AM	BCl3 valve closed
11/18/2011	11:23:58 AM	PH3 valve closed
11/18/2011	11:23:58 AM	SiCl4 pre valve closed
11/18/2011	11:23:58 AM	SiCl4 post valve closed
11/18/2011	11:23:58 AM	Bypass valve closed
11/18/2011	11:23:58 AM	Bubbler valve closed
11/18/2011	11:23:58 AM	Helium valve opened
11/18/2011	11:23:58 AM	Main Vac valve opened
11/18/2011	11:23:58 AM	Helium MFC set to  20.000000
11/18/2011	11:23:58 AM	H2 MFC set to  0.000000
11/18/2011	11:23:58 AM	BCl3 MFC set to  0.000000
11/18/2011	11:23:58 AM	PHl3 MFC set to  0.000000
11/18/2011	11:23:58 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:23:58 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:23:58 AM	Tube furnace set to 150
11/18/2011	11:24:28 AM	Helium valve closed
11/18/2011	11:24:28 AM	H2 valve closed
11/18/2011	11:24:28 AM	BCl3 valve closed
11/18/2011	11:24:28 AM	PH3 valve closed
11/18/2011	11:24:28 AM	SiCl4 pre valve closed
11/18/2011	11:24:28 AM	SiCl4 post valve closed
11/18/2011	11:24:28 AM	Bypass valve closed
11/18/2011	11:24:28 AM	Bubbler valve closed
11/18/2011	11:24:28 AM	Main Vac valve opened
11/18/2011	11:24:28 AM	Helium MFC set to  0.000000
11/18/2011	11:24:28 AM	H2 MFC set to  0.000000
11/18/2011	11:24:28 AM	BCl3 MFC set to  0.000000
11/18/2011	11:24:28 AM	PHl3 MFC set to  0.000000
11/18/2011	11:24:28 AM	SiCl4 MFC set to  0.000000
11/18/2011	11:24:28 AM	Bypass solenoid MFC set to  0.000000
11/18/2011	11:24:29 AM	Tube furnace set to 180
11/18/2011	11:24:34 AM	Run finished at 11:24 AM
11/18/2011	12:37:43 PM	Main Vac valve closed
11/18/2011	12:37:59 PM	Main Vac valve opened
11/18/2011	12:38:36 PM	Recipe started at 12:38 PM
11/18/2011	12:38:36 PM	H2 valve closed
11/18/2011	12:38:36 PM	BCl3 valve closed
11/18/2011	12:38:36 PM	PH3 valve closed
11/18/2011	12:38:36 PM	SiCl4 pre valve closed
11/18/2011	12:38:36 PM	SiCl4 post valve closed
11/18/2011	12:38:36 PM	Main Vac valve closed
11/18/2011	12:38:36 PM	Bypass valve closed
11/18/2011	12:38:36 PM	Bubbler valve closed
11/18/2011	12:38:36 PM	Helium valve opened
11/18/2011	12:38:36 PM	Helium MFC set to  0.000000
11/18/2011	12:38:36 PM	H2 MFC set to  0.000000
11/18/2011	12:38:36 PM	BCl3 MFC set to  0.000000
11/18/2011	12:38:36 PM	PHl3 MFC set to  0.000000
11/18/2011	12:38:36 PM	SiCl4 MFC set to  0.000000
11/18/2011	12:38:36 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	12:38:36 PM	Tube furnace set to 0
11/18/2011	12:38:39 PM	Helium valve closed
11/18/2011	12:38:39 PM	BCl3 valve closed
11/18/2011	12:38:39 PM	PH3 valve closed
11/18/2011	12:38:39 PM	SiCl4 pre valve closed
11/18/2011	12:38:39 PM	SiCl4 post valve closed
11/18/2011	12:38:39 PM	Main Vac valve closed
11/18/2011	12:38:39 PM	Bypass valve closed
11/18/2011	12:38:39 PM	Bubbler valve closed
11/18/2011	12:38:39 PM	H2 valve opened
11/18/2011	12:38:39 PM	Helium MFC set to  0.000000
11/18/2011	12:38:39 PM	H2 MFC set to  500.000000
11/18/2011	12:38:39 PM	BCl3 MFC set to  0.000000
11/18/2011	12:38:39 PM	PHl3 MFC set to  0.000000
11/18/2011	12:38:39 PM	SiCl4 MFC set to  0.000000
11/18/2011	12:38:39 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	12:38:40 PM	Tube furnace set to 50
11/18/2011	12:39:43 PM	Helium valve closed
11/18/2011	12:39:43 PM	BCl3 valve closed
11/18/2011	12:39:43 PM	PH3 valve closed
11/18/2011	12:39:43 PM	SiCl4 pre valve closed
11/18/2011	12:39:43 PM	SiCl4 post valve closed
11/18/2011	12:39:43 PM	Main Vac valve closed
11/18/2011	12:39:43 PM	Bypass valve closed
11/18/2011	12:39:43 PM	H2 valve opened
11/18/2011	12:39:43 PM	Bubbler valve opened
11/18/2011	12:39:43 PM	Helium MFC set to  0.000000
11/18/2011	12:39:43 PM	H2 MFC set to  500.000000
11/18/2011	12:39:43 PM	BCl3 MFC set to  0.000000
11/18/2011	12:39:43 PM	PHl3 MFC set to  0.000000
11/18/2011	12:39:43 PM	SiCl4 MFC set to  0.000000
11/18/2011	12:39:43 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	12:39:43 PM	Tube furnace set to 50
11/18/2011	12:39:44 PM	Helium valve closed
11/18/2011	12:39:44 PM	BCl3 valve closed
11/18/2011	12:39:44 PM	PH3 valve closed
11/18/2011	12:39:44 PM	SiCl4 pre valve closed
11/18/2011	12:39:44 PM	SiCl4 post valve closed
11/18/2011	12:39:44 PM	Main Vac valve closed
11/18/2011	12:39:44 PM	Bypass valve closed
11/18/2011	12:39:44 PM	H2 valve opened
11/18/2011	12:39:44 PM	Bubbler valve opened
11/18/2011	12:39:44 PM	Helium MFC set to  0.000000
11/18/2011	12:39:44 PM	H2 MFC set to  495.000000
11/18/2011	12:39:44 PM	BCl3 MFC set to  0.000000
11/18/2011	12:39:44 PM	PHl3 MFC set to  0.000000
11/18/2011	12:39:44 PM	SiCl4 MFC set to  0.000000
11/18/2011	12:39:44 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	12:39:44 PM	Tube furnace set to 1000
11/18/2011	1:02:44 PM	Helium valve closed
11/18/2011	1:02:44 PM	BCl3 valve closed
11/18/2011	1:02:44 PM	PH3 valve closed
11/18/2011	1:02:44 PM	Main Vac valve closed
11/18/2011	1:02:44 PM	Bypass valve closed
11/18/2011	1:02:44 PM	H2 valve opened
11/18/2011	1:02:44 PM	SiCl4 pre valve opened
11/18/2011	1:02:44 PM	SiCl4 post valve opened
11/18/2011	1:02:44 PM	Bubbler valve opened
11/18/2011	1:02:44 PM	Helium MFC set to  0.000000
11/18/2011	1:02:44 PM	H2 MFC set to  495.000000
11/18/2011	1:02:44 PM	BCl3 MFC set to  0.000000
11/18/2011	1:02:44 PM	PHl3 MFC set to  0.000000
11/18/2011	1:02:44 PM	SiCl4 MFC set to  25.000000
11/18/2011	1:02:44 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	1:02:44 PM	Tube furnace set to 1000
11/18/2011	1:27:44 PM	Helium valve closed
11/18/2011	1:27:44 PM	BCl3 valve closed
11/18/2011	1:27:44 PM	PH3 valve closed
11/18/2011	1:27:44 PM	SiCl4 pre valve closed
11/18/2011	1:27:44 PM	SiCl4 post valve closed
11/18/2011	1:27:44 PM	Main Vac valve closed
11/18/2011	1:27:44 PM	Bypass valve closed
11/18/2011	1:27:44 PM	H2 valve opened
11/18/2011	1:27:44 PM	Bubbler valve opened
11/18/2011	1:27:44 PM	Helium MFC set to  0.000000
11/18/2011	1:27:44 PM	H2 MFC set to  480.000000
11/18/2011	1:27:44 PM	BCl3 MFC set to  0.000000
11/18/2011	1:27:44 PM	PHl3 MFC set to  0.000000
11/18/2011	1:27:44 PM	SiCl4 MFC set to  0.000000
11/18/2011	1:27:44 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	1:27:44 PM	Tube furnace set to 750
11/18/2011	1:37:44 PM	H2 valve closed
11/18/2011	1:37:44 PM	BCl3 valve closed
11/18/2011	1:37:44 PM	PH3 valve closed
11/18/2011	1:37:44 PM	SiCl4 pre valve closed
11/18/2011	1:37:44 PM	SiCl4 post valve closed
11/18/2011	1:37:44 PM	Main Vac valve closed
11/18/2011	1:37:44 PM	Bypass valve closed
11/18/2011	1:37:44 PM	Helium valve opened
11/18/2011	1:37:44 PM	Bubbler valve opened
11/18/2011	1:37:44 PM	Helium MFC set to  400.000000
11/18/2011	1:37:44 PM	H2 MFC set to  0.000000
11/18/2011	1:37:44 PM	BCl3 MFC set to  0.000000
11/18/2011	1:37:44 PM	PHl3 MFC set to  0.000000
11/18/2011	1:37:44 PM	SiCl4 MFC set to  0.000000
11/18/2011	1:37:44 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	1:37:44 PM	Tube furnace set to 0
11/18/2011	1:58:32 PM	Run aborted at 1:58 PM
11/18/2011	1:58:32 PM	Helium valve closed
11/18/2011	1:58:32 PM	H2 valve closed
11/18/2011	1:58:32 PM	BCl3 valve closed
11/18/2011	1:58:32 PM	PH3 valve closed
11/18/2011	1:58:32 PM	SiCl4 pre valve closed
11/18/2011	1:58:32 PM	SiCl4 post valve closed
11/18/2011	1:58:32 PM	Bypass valve closed
11/18/2011	1:58:32 PM	Main Vac valve closed
11/18/2011	1:58:32 PM	Bubbler valve closed
11/18/2011	1:58:32 PM	Helium MFC set to  0.000000
11/18/2011	1:58:32 PM	H2 MFC set to  0.000000
11/18/2011	1:58:32 PM	BCl3 MFC set to  0.000000
11/18/2011	1:58:32 PM	PHl3 MFC set to  0.000000
11/18/2011	1:58:32 PM	SiCl4 MFC set to  0.000000
11/18/2011	1:58:33 PM	Tube furnace set to 0
11/18/2011	1:58:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/18/2011	1:58:40 PM	Recipe started at 1:58 PM
11/18/2011	1:58:40 PM	Helium valve closed
11/18/2011	1:58:40 PM	H2 valve closed
11/18/2011	1:58:40 PM	BCl3 valve closed
11/18/2011	1:58:40 PM	PH3 valve closed
11/18/2011	1:58:40 PM	SiCl4 pre valve closed
11/18/2011	1:58:40 PM	SiCl4 post valve closed
11/18/2011	1:58:40 PM	Main Vac valve closed
11/18/2011	1:58:40 PM	Bypass valve closed
11/18/2011	1:58:40 PM	Bubbler valve closed
11/18/2011	1:58:40 PM	Helium MFC set to  0.000000
11/18/2011	1:58:40 PM	H2 MFC set to  0.000000
11/18/2011	1:58:40 PM	BCl3 MFC set to  0.000000
11/18/2011	1:58:40 PM	PHl3 MFC set to  0.000000
11/18/2011	1:58:40 PM	SiCl4 MFC set to  0.000000
11/18/2011	1:58:40 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	1:58:40 PM	Tube furnace set to 0
11/18/2011	1:58:43 PM	H2 valve closed
11/18/2011	1:58:43 PM	BCl3 valve closed
11/18/2011	1:58:43 PM	PH3 valve closed
11/18/2011	1:58:43 PM	SiCl4 pre valve closed
11/18/2011	1:58:43 PM	SiCl4 post valve closed
11/18/2011	1:58:43 PM	Main Vac valve closed
11/18/2011	1:58:43 PM	Bypass valve closed
11/18/2011	1:58:43 PM	Bubbler valve closed
11/18/2011	1:58:43 PM	Helium valve opened
11/18/2011	1:58:43 PM	Helium MFC set to  500.000000
11/18/2011	1:58:43 PM	H2 MFC set to  0.000000
11/18/2011	1:58:43 PM	BCl3 MFC set to  0.000000
11/18/2011	1:58:43 PM	PHl3 MFC set to  0.000000
11/18/2011	1:58:43 PM	SiCl4 MFC set to  0.000000
11/18/2011	1:58:43 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	1:58:43 PM	Tube furnace set to 0
11/18/2011	1:58:44 PM	Helium valve closed
11/18/2011	1:58:44 PM	H2 valve closed
11/18/2011	1:58:44 PM	BCl3 valve closed
11/18/2011	1:58:44 PM	PH3 valve closed
11/18/2011	1:58:44 PM	SiCl4 pre valve closed
11/18/2011	1:58:44 PM	SiCl4 post valve closed
11/18/2011	1:58:44 PM	Main Vac valve closed
11/18/2011	1:58:44 PM	Bypass valve closed
11/18/2011	1:58:44 PM	Bubbler valve closed
11/18/2011	1:58:44 PM	Helium MFC set to  0.000000
11/18/2011	1:58:44 PM	H2 MFC set to  0.000000
11/18/2011	1:58:44 PM	BCl3 MFC set to  0.000000
11/18/2011	1:58:44 PM	PHl3 MFC set to  0.000000
11/18/2011	1:58:44 PM	SiCl4 MFC set to  0.000000
11/18/2011	1:58:44 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	1:58:44 PM	Tube furnace set to 0
11/18/2011	1:58:45 PM	Run finished at 1:58 PM
11/18/2011	1:58:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/18/2011	2:03:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/18/2011	2:03:46 PM	Recipe started at 2:03 PM
11/18/2011	2:03:46 PM	Helium valve closed
11/18/2011	2:03:46 PM	H2 valve closed
11/18/2011	2:03:46 PM	BCl3 valve closed
11/18/2011	2:03:46 PM	PH3 valve closed
11/18/2011	2:03:46 PM	SiCl4 pre valve closed
11/18/2011	2:03:46 PM	SiCl4 post valve closed
11/18/2011	2:03:46 PM	Main Vac valve closed
11/18/2011	2:03:46 PM	Bubbler valve closed
11/18/2011	2:03:46 PM	Bypass valve opened
11/18/2011	2:03:46 PM	Helium MFC set to  0.000000
11/18/2011	2:03:46 PM	H2 MFC set to  0.000000
11/18/2011	2:03:46 PM	BCl3 MFC set to  0.000000
11/18/2011	2:03:46 PM	PHl3 MFC set to  0.000000
11/18/2011	2:03:46 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:03:46 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:03:46 PM	Tube furnace set to 0
11/18/2011	2:05:28 PM	Helium valve closed
11/18/2011	2:05:28 PM	H2 valve closed
11/18/2011	2:05:28 PM	BCl3 valve closed
11/18/2011	2:05:28 PM	PH3 valve closed
11/18/2011	2:05:28 PM	SiCl4 pre valve closed
11/18/2011	2:05:28 PM	SiCl4 post valve closed
11/18/2011	2:05:28 PM	Main Vac valve closed
11/18/2011	2:05:28 PM	Bubbler valve closed
11/18/2011	2:05:28 PM	Bypass valve opened
11/18/2011	2:05:28 PM	Helium MFC set to  0.000000
11/18/2011	2:05:28 PM	H2 MFC set to  0.000000
11/18/2011	2:05:28 PM	BCl3 MFC set to  0.000000
11/18/2011	2:05:28 PM	PHl3 MFC set to  0.000000
11/18/2011	2:05:28 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:05:28 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:05:28 PM	Tube furnace set to 0
11/18/2011	2:06:28 PM	Helium valve closed
11/18/2011	2:06:28 PM	H2 valve closed
11/18/2011	2:06:28 PM	BCl3 valve closed
11/18/2011	2:06:28 PM	PH3 valve closed
11/18/2011	2:06:28 PM	SiCl4 pre valve closed
11/18/2011	2:06:28 PM	SiCl4 post valve closed
11/18/2011	2:06:28 PM	Bypass valve closed
11/18/2011	2:06:28 PM	Bubbler valve closed
11/18/2011	2:06:28 PM	Main Vac valve opened
11/18/2011	2:06:28 PM	Helium MFC set to  0.000000
11/18/2011	2:06:28 PM	H2 MFC set to  0.000000
11/18/2011	2:06:28 PM	BCl3 MFC set to  0.000000
11/18/2011	2:06:28 PM	PHl3 MFC set to  0.000000
11/18/2011	2:06:28 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:06:28 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:06:28 PM	Tube furnace set to 0
11/18/2011	2:06:29 PM	Run finished at 2:06 PM
11/18/2011	2:06:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/18/2011	2:13:38 PM	Recipe started at 2:13 PM
11/18/2011	2:13:38 PM	Helium valve closed
11/18/2011	2:13:38 PM	H2 valve closed
11/18/2011	2:13:38 PM	BCl3 valve closed
11/18/2011	2:13:38 PM	PH3 valve closed
11/18/2011	2:13:38 PM	SiCl4 pre valve closed
11/18/2011	2:13:38 PM	SiCl4 post valve closed
11/18/2011	2:13:38 PM	Main Vac valve closed
11/18/2011	2:13:38 PM	Bubbler valve closed
11/18/2011	2:13:38 PM	Bypass valve opened
11/18/2011	2:13:38 PM	Helium MFC set to  0.000000
11/18/2011	2:13:38 PM	H2 MFC set to  0.000000
11/18/2011	2:13:38 PM	BCl3 MFC set to  0.000000
11/18/2011	2:13:38 PM	PHl3 MFC set to  0.000000
11/18/2011	2:13:38 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:13:38 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:13:38 PM	Tube furnace set to 180
11/18/2011	2:13:39 PM	Helium valve closed
11/18/2011	2:13:39 PM	H2 valve closed
11/18/2011	2:13:39 PM	BCl3 valve closed
11/18/2011	2:13:39 PM	PH3 valve closed
11/18/2011	2:13:39 PM	SiCl4 pre valve closed
11/18/2011	2:13:39 PM	SiCl4 post valve closed
11/18/2011	2:13:39 PM	Main Vac valve closed
11/18/2011	2:13:39 PM	Bubbler valve closed
11/18/2011	2:13:39 PM	Bypass valve opened
11/18/2011	2:13:39 PM	Helium MFC set to  0.000000
11/18/2011	2:13:39 PM	H2 MFC set to  0.000000
11/18/2011	2:13:39 PM	BCl3 MFC set to  0.000000
11/18/2011	2:13:39 PM	PHl3 MFC set to  0.000000
11/18/2011	2:13:39 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:13:39 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:13:39 PM	Tube furnace set to 150
11/18/2011	2:14:09 PM	Helium valve closed
11/18/2011	2:14:09 PM	H2 valve closed
11/18/2011	2:14:09 PM	BCl3 valve closed
11/18/2011	2:14:09 PM	PH3 valve closed
11/18/2011	2:14:09 PM	SiCl4 pre valve closed
11/18/2011	2:14:09 PM	SiCl4 post valve closed
11/18/2011	2:14:09 PM	Bypass valve closed
11/18/2011	2:14:09 PM	Bubbler valve closed
11/18/2011	2:14:09 PM	Main Vac valve opened
11/18/2011	2:14:09 PM	Helium MFC set to  0.000000
11/18/2011	2:14:09 PM	H2 MFC set to  0.000000
11/18/2011	2:14:09 PM	BCl3 MFC set to  0.000000
11/18/2011	2:14:09 PM	PHl3 MFC set to  0.000000
11/18/2011	2:14:09 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:14:09 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:14:09 PM	Tube furnace set to 180
11/18/2011	2:14:39 PM	H2 valve closed
11/18/2011	2:14:39 PM	BCl3 valve closed
11/18/2011	2:14:39 PM	PH3 valve closed
11/18/2011	2:14:39 PM	SiCl4 pre valve closed
11/18/2011	2:14:39 PM	SiCl4 post valve closed
11/18/2011	2:14:39 PM	Bypass valve closed
11/18/2011	2:14:39 PM	Bubbler valve closed
11/18/2011	2:14:39 PM	Helium valve opened
11/18/2011	2:14:39 PM	Main Vac valve opened
11/18/2011	2:14:39 PM	Helium MFC set to  20.000000
11/18/2011	2:14:39 PM	H2 MFC set to  0.000000
11/18/2011	2:14:39 PM	BCl3 MFC set to  0.000000
11/18/2011	2:14:39 PM	PHl3 MFC set to  0.000000
11/18/2011	2:14:39 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:14:39 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:14:39 PM	Tube furnace set to 180
11/18/2011	2:15:09 PM	Helium valve closed
11/18/2011	2:15:09 PM	H2 valve closed
11/18/2011	2:15:09 PM	BCl3 valve closed
11/18/2011	2:15:09 PM	PH3 valve closed
11/18/2011	2:15:09 PM	SiCl4 pre valve closed
11/18/2011	2:15:09 PM	SiCl4 post valve closed
11/18/2011	2:15:09 PM	Bypass valve closed
11/18/2011	2:15:09 PM	Bubbler valve closed
11/18/2011	2:15:09 PM	Main Vac valve opened
11/18/2011	2:15:09 PM	Helium MFC set to  0.000000
11/18/2011	2:15:09 PM	H2 MFC set to  0.000000
11/18/2011	2:15:09 PM	BCl3 MFC set to  0.000000
11/18/2011	2:15:09 PM	PHl3 MFC set to  0.000000
11/18/2011	2:15:09 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:15:09 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:15:09 PM	Tube furnace set to 150
11/18/2011	2:15:39 PM	H2 valve closed
11/18/2011	2:15:39 PM	BCl3 valve closed
11/18/2011	2:15:39 PM	PH3 valve closed
11/18/2011	2:15:39 PM	SiCl4 pre valve closed
11/18/2011	2:15:39 PM	SiCl4 post valve closed
11/18/2011	2:15:39 PM	Bypass valve closed
11/18/2011	2:15:39 PM	Bubbler valve closed
11/18/2011	2:15:39 PM	Helium valve opened
11/18/2011	2:15:39 PM	Main Vac valve opened
11/18/2011	2:15:39 PM	Helium MFC set to  20.000000
11/18/2011	2:15:39 PM	H2 MFC set to  0.000000
11/18/2011	2:15:39 PM	BCl3 MFC set to  0.000000
11/18/2011	2:15:39 PM	PHl3 MFC set to  0.000000
11/18/2011	2:15:39 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:15:39 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:15:40 PM	Tube furnace set to 180
11/18/2011	2:16:10 PM	Helium valve closed
11/18/2011	2:16:10 PM	H2 valve closed
11/18/2011	2:16:10 PM	BCl3 valve closed
11/18/2011	2:16:10 PM	PH3 valve closed
11/18/2011	2:16:10 PM	SiCl4 pre valve closed
11/18/2011	2:16:10 PM	SiCl4 post valve closed
11/18/2011	2:16:10 PM	Bypass valve closed
11/18/2011	2:16:10 PM	Bubbler valve closed
11/18/2011	2:16:10 PM	Main Vac valve opened
11/18/2011	2:16:10 PM	Helium MFC set to  0.000000
11/18/2011	2:16:10 PM	H2 MFC set to  0.000000
11/18/2011	2:16:10 PM	BCl3 MFC set to  0.000000
11/18/2011	2:16:10 PM	PHl3 MFC set to  0.000000
11/18/2011	2:16:10 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:16:10 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:16:10 PM	Tube furnace set to 150
11/18/2011	2:16:40 PM	H2 valve closed
11/18/2011	2:16:40 PM	BCl3 valve closed
11/18/2011	2:16:40 PM	PH3 valve closed
11/18/2011	2:16:40 PM	SiCl4 pre valve closed
11/18/2011	2:16:40 PM	SiCl4 post valve closed
11/18/2011	2:16:40 PM	Bypass valve closed
11/18/2011	2:16:40 PM	Bubbler valve closed
11/18/2011	2:16:40 PM	Helium valve opened
11/18/2011	2:16:40 PM	Main Vac valve opened
11/18/2011	2:16:40 PM	Helium MFC set to  20.000000
11/18/2011	2:16:40 PM	H2 MFC set to  0.000000
11/18/2011	2:16:40 PM	BCl3 MFC set to  0.000000
11/18/2011	2:16:40 PM	PHl3 MFC set to  0.000000
11/18/2011	2:16:40 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:16:40 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:16:40 PM	Tube furnace set to 150
11/18/2011	2:17:10 PM	Helium valve closed
11/18/2011	2:17:10 PM	H2 valve closed
11/18/2011	2:17:10 PM	BCl3 valve closed
11/18/2011	2:17:10 PM	PH3 valve closed
11/18/2011	2:17:10 PM	SiCl4 pre valve closed
11/18/2011	2:17:10 PM	SiCl4 post valve closed
11/18/2011	2:17:10 PM	Bypass valve closed
11/18/2011	2:17:10 PM	Bubbler valve closed
11/18/2011	2:17:10 PM	Main Vac valve opened
11/18/2011	2:17:10 PM	Helium MFC set to  0.000000
11/18/2011	2:17:10 PM	H2 MFC set to  0.000000
11/18/2011	2:17:10 PM	BCl3 MFC set to  0.000000
11/18/2011	2:17:10 PM	PHl3 MFC set to  0.000000
11/18/2011	2:17:10 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:17:10 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:17:10 PM	Tube furnace set to 150
11/18/2011	2:17:40 PM	H2 valve closed
11/18/2011	2:17:40 PM	BCl3 valve closed
11/18/2011	2:17:40 PM	PH3 valve closed
11/18/2011	2:17:40 PM	SiCl4 pre valve closed
11/18/2011	2:17:40 PM	SiCl4 post valve closed
11/18/2011	2:17:40 PM	Bypass valve closed
11/18/2011	2:17:40 PM	Bubbler valve closed
11/18/2011	2:17:40 PM	Helium valve opened
11/18/2011	2:17:40 PM	Main Vac valve opened
11/18/2011	2:17:40 PM	Helium MFC set to  20.000000
11/18/2011	2:17:40 PM	H2 MFC set to  0.000000
11/18/2011	2:17:40 PM	BCl3 MFC set to  0.000000
11/18/2011	2:17:40 PM	PHl3 MFC set to  0.000000
11/18/2011	2:17:40 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:17:40 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:17:40 PM	Tube furnace set to 180
11/18/2011	2:18:11 PM	Helium valve closed
11/18/2011	2:18:11 PM	H2 valve closed
11/18/2011	2:18:11 PM	BCl3 valve closed
11/18/2011	2:18:11 PM	PH3 valve closed
11/18/2011	2:18:11 PM	SiCl4 pre valve closed
11/18/2011	2:18:11 PM	SiCl4 post valve closed
11/18/2011	2:18:11 PM	Bypass valve closed
11/18/2011	2:18:11 PM	Bubbler valve closed
11/18/2011	2:18:11 PM	Main Vac valve opened
11/18/2011	2:18:11 PM	Helium MFC set to  0.000000
11/18/2011	2:18:11 PM	H2 MFC set to  0.000000
11/18/2011	2:18:11 PM	BCl3 MFC set to  0.000000
11/18/2011	2:18:11 PM	PHl3 MFC set to  0.000000
11/18/2011	2:18:11 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:18:11 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:18:11 PM	Tube furnace set to 150
11/18/2011	2:18:41 PM	H2 valve closed
11/18/2011	2:18:41 PM	BCl3 valve closed
11/18/2011	2:18:41 PM	PH3 valve closed
11/18/2011	2:18:41 PM	SiCl4 pre valve closed
11/18/2011	2:18:41 PM	SiCl4 post valve closed
11/18/2011	2:18:41 PM	Bypass valve closed
11/18/2011	2:18:41 PM	Bubbler valve closed
11/18/2011	2:18:41 PM	Helium valve opened
11/18/2011	2:18:41 PM	Main Vac valve opened
11/18/2011	2:18:41 PM	Helium MFC set to  20.000000
11/18/2011	2:18:41 PM	H2 MFC set to  0.000000
11/18/2011	2:18:41 PM	BCl3 MFC set to  0.000000
11/18/2011	2:18:41 PM	PHl3 MFC set to  0.000000
11/18/2011	2:18:41 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:18:41 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:18:41 PM	Tube furnace set to 150
11/18/2011	2:19:11 PM	Helium valve closed
11/18/2011	2:19:11 PM	H2 valve closed
11/18/2011	2:19:11 PM	BCl3 valve closed
11/18/2011	2:19:11 PM	PH3 valve closed
11/18/2011	2:19:11 PM	SiCl4 pre valve closed
11/18/2011	2:19:11 PM	SiCl4 post valve closed
11/18/2011	2:19:11 PM	Bypass valve closed
11/18/2011	2:19:11 PM	Bubbler valve closed
11/18/2011	2:19:11 PM	Main Vac valve opened
11/18/2011	2:19:11 PM	Helium MFC set to  0.000000
11/18/2011	2:19:11 PM	H2 MFC set to  0.000000
11/18/2011	2:19:11 PM	BCl3 MFC set to  0.000000
11/18/2011	2:19:11 PM	PHl3 MFC set to  0.000000
11/18/2011	2:19:11 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:19:11 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:19:11 PM	Tube furnace set to 150
11/18/2011	2:19:41 PM	H2 valve closed
11/18/2011	2:19:41 PM	BCl3 valve closed
11/18/2011	2:19:41 PM	PH3 valve closed
11/18/2011	2:19:41 PM	SiCl4 pre valve closed
11/18/2011	2:19:41 PM	SiCl4 post valve closed
11/18/2011	2:19:41 PM	Bypass valve closed
11/18/2011	2:19:41 PM	Bubbler valve closed
11/18/2011	2:19:41 PM	Helium valve opened
11/18/2011	2:19:41 PM	Main Vac valve opened
11/18/2011	2:19:41 PM	Helium MFC set to  20.000000
11/18/2011	2:19:41 PM	H2 MFC set to  0.000000
11/18/2011	2:19:41 PM	BCl3 MFC set to  0.000000
11/18/2011	2:19:41 PM	PHl3 MFC set to  0.000000
11/18/2011	2:19:41 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:19:41 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:19:41 PM	Tube furnace set to 150
11/18/2011	2:20:11 PM	Helium valve closed
11/18/2011	2:20:11 PM	H2 valve closed
11/18/2011	2:20:11 PM	BCl3 valve closed
11/18/2011	2:20:11 PM	PH3 valve closed
11/18/2011	2:20:11 PM	SiCl4 pre valve closed
11/18/2011	2:20:11 PM	SiCl4 post valve closed
11/18/2011	2:20:11 PM	Bypass valve closed
11/18/2011	2:20:11 PM	Bubbler valve closed
11/18/2011	2:20:11 PM	Main Vac valve opened
11/18/2011	2:20:11 PM	Helium MFC set to  0.000000
11/18/2011	2:20:11 PM	H2 MFC set to  0.000000
11/18/2011	2:20:11 PM	BCl3 MFC set to  0.000000
11/18/2011	2:20:11 PM	PHl3 MFC set to  0.000000
11/18/2011	2:20:11 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:20:11 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:20:11 PM	Tube furnace set to 150
11/18/2011	2:20:42 PM	H2 valve closed
11/18/2011	2:20:42 PM	BCl3 valve closed
11/18/2011	2:20:42 PM	PH3 valve closed
11/18/2011	2:20:42 PM	SiCl4 pre valve closed
11/18/2011	2:20:42 PM	SiCl4 post valve closed
11/18/2011	2:20:42 PM	Bypass valve closed
11/18/2011	2:20:42 PM	Bubbler valve closed
11/18/2011	2:20:42 PM	Helium valve opened
11/18/2011	2:20:42 PM	Main Vac valve opened
11/18/2011	2:20:42 PM	Helium MFC set to  20.000000
11/18/2011	2:20:42 PM	H2 MFC set to  0.000000
11/18/2011	2:20:42 PM	BCl3 MFC set to  0.000000
11/18/2011	2:20:42 PM	PHl3 MFC set to  0.000000
11/18/2011	2:20:42 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:20:42 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:20:42 PM	Tube furnace set to 150
11/18/2011	2:21:12 PM	Helium valve closed
11/18/2011	2:21:12 PM	H2 valve closed
11/18/2011	2:21:12 PM	BCl3 valve closed
11/18/2011	2:21:12 PM	PH3 valve closed
11/18/2011	2:21:12 PM	SiCl4 pre valve closed
11/18/2011	2:21:12 PM	SiCl4 post valve closed
11/18/2011	2:21:12 PM	Bypass valve closed
11/18/2011	2:21:12 PM	Bubbler valve closed
11/18/2011	2:21:12 PM	Main Vac valve opened
11/18/2011	2:21:12 PM	Helium MFC set to  0.000000
11/18/2011	2:21:12 PM	H2 MFC set to  0.000000
11/18/2011	2:21:12 PM	BCl3 MFC set to  0.000000
11/18/2011	2:21:12 PM	PHl3 MFC set to  0.000000
11/18/2011	2:21:12 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:21:12 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:21:12 PM	Tube furnace set to 150
11/18/2011	2:21:42 PM	H2 valve closed
11/18/2011	2:21:42 PM	BCl3 valve closed
11/18/2011	2:21:42 PM	PH3 valve closed
11/18/2011	2:21:42 PM	SiCl4 pre valve closed
11/18/2011	2:21:42 PM	SiCl4 post valve closed
11/18/2011	2:21:42 PM	Bypass valve closed
11/18/2011	2:21:42 PM	Bubbler valve closed
11/18/2011	2:21:42 PM	Helium valve opened
11/18/2011	2:21:42 PM	Main Vac valve opened
11/18/2011	2:21:42 PM	Helium MFC set to  20.000000
11/18/2011	2:21:42 PM	H2 MFC set to  0.000000
11/18/2011	2:21:42 PM	BCl3 MFC set to  0.000000
11/18/2011	2:21:42 PM	PHl3 MFC set to  0.000000
11/18/2011	2:21:42 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:21:42 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:21:42 PM	Tube furnace set to 150
11/18/2011	2:22:12 PM	Helium valve closed
11/18/2011	2:22:12 PM	H2 valve closed
11/18/2011	2:22:12 PM	BCl3 valve closed
11/18/2011	2:22:12 PM	PH3 valve closed
11/18/2011	2:22:12 PM	SiCl4 pre valve closed
11/18/2011	2:22:12 PM	SiCl4 post valve closed
11/18/2011	2:22:12 PM	Bypass valve closed
11/18/2011	2:22:12 PM	Bubbler valve closed
11/18/2011	2:22:12 PM	Main Vac valve opened
11/18/2011	2:22:12 PM	Helium MFC set to  0.000000
11/18/2011	2:22:12 PM	H2 MFC set to  0.000000
11/18/2011	2:22:12 PM	BCl3 MFC set to  0.000000
11/18/2011	2:22:12 PM	PHl3 MFC set to  0.000000
11/18/2011	2:22:12 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:22:12 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:22:12 PM	Tube furnace set to 150
11/18/2011	2:22:42 PM	H2 valve closed
11/18/2011	2:22:42 PM	BCl3 valve closed
11/18/2011	2:22:42 PM	PH3 valve closed
11/18/2011	2:22:42 PM	SiCl4 pre valve closed
11/18/2011	2:22:42 PM	SiCl4 post valve closed
11/18/2011	2:22:42 PM	Bypass valve closed
11/18/2011	2:22:42 PM	Bubbler valve closed
11/18/2011	2:22:42 PM	Helium valve opened
11/18/2011	2:22:42 PM	Main Vac valve opened
11/18/2011	2:22:42 PM	Helium MFC set to  20.000000
11/18/2011	2:22:42 PM	H2 MFC set to  0.000000
11/18/2011	2:22:42 PM	BCl3 MFC set to  0.000000
11/18/2011	2:22:42 PM	PHl3 MFC set to  0.000000
11/18/2011	2:22:42 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:22:42 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:22:43 PM	Tube furnace set to 150
11/18/2011	2:23:13 PM	Helium valve closed
11/18/2011	2:23:13 PM	H2 valve closed
11/18/2011	2:23:13 PM	BCl3 valve closed
11/18/2011	2:23:13 PM	PH3 valve closed
11/18/2011	2:23:13 PM	SiCl4 pre valve closed
11/18/2011	2:23:13 PM	SiCl4 post valve closed
11/18/2011	2:23:13 PM	Bypass valve closed
11/18/2011	2:23:13 PM	Bubbler valve closed
11/18/2011	2:23:13 PM	Main Vac valve opened
11/18/2011	2:23:13 PM	Helium MFC set to  0.000000
11/18/2011	2:23:13 PM	H2 MFC set to  0.000000
11/18/2011	2:23:13 PM	BCl3 MFC set to  0.000000
11/18/2011	2:23:13 PM	PHl3 MFC set to  0.000000
11/18/2011	2:23:13 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:23:13 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:23:13 PM	Tube furnace set to 150
11/18/2011	2:23:43 PM	H2 valve closed
11/18/2011	2:23:43 PM	BCl3 valve closed
11/18/2011	2:23:43 PM	PH3 valve closed
11/18/2011	2:23:43 PM	SiCl4 pre valve closed
11/18/2011	2:23:43 PM	SiCl4 post valve closed
11/18/2011	2:23:43 PM	Bypass valve closed
11/18/2011	2:23:43 PM	Bubbler valve closed
11/18/2011	2:23:43 PM	Helium valve opened
11/18/2011	2:23:43 PM	Main Vac valve opened
11/18/2011	2:23:43 PM	Helium MFC set to  20.000000
11/18/2011	2:23:43 PM	H2 MFC set to  0.000000
11/18/2011	2:23:43 PM	BCl3 MFC set to  0.000000
11/18/2011	2:23:43 PM	PHl3 MFC set to  0.000000
11/18/2011	2:23:43 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:23:43 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:23:43 PM	Tube furnace set to 150
11/18/2011	2:24:13 PM	Helium valve closed
11/18/2011	2:24:13 PM	H2 valve closed
11/18/2011	2:24:13 PM	BCl3 valve closed
11/18/2011	2:24:13 PM	PH3 valve closed
11/18/2011	2:24:13 PM	SiCl4 pre valve closed
11/18/2011	2:24:13 PM	SiCl4 post valve closed
11/18/2011	2:24:13 PM	Bypass valve closed
11/18/2011	2:24:13 PM	Bubbler valve closed
11/18/2011	2:24:13 PM	Main Vac valve opened
11/18/2011	2:24:13 PM	Helium MFC set to  0.000000
11/18/2011	2:24:13 PM	H2 MFC set to  0.000000
11/18/2011	2:24:13 PM	BCl3 MFC set to  0.000000
11/18/2011	2:24:13 PM	PHl3 MFC set to  0.000000
11/18/2011	2:24:13 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:24:13 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:24:13 PM	Tube furnace set to 150
11/18/2011	2:24:43 PM	H2 valve closed
11/18/2011	2:24:43 PM	BCl3 valve closed
11/18/2011	2:24:43 PM	PH3 valve closed
11/18/2011	2:24:43 PM	SiCl4 pre valve closed
11/18/2011	2:24:43 PM	SiCl4 post valve closed
11/18/2011	2:24:43 PM	Bypass valve closed
11/18/2011	2:24:43 PM	Bubbler valve closed
11/18/2011	2:24:43 PM	Helium valve opened
11/18/2011	2:24:43 PM	Main Vac valve opened
11/18/2011	2:24:43 PM	Helium MFC set to  20.000000
11/18/2011	2:24:43 PM	H2 MFC set to  0.000000
11/18/2011	2:24:43 PM	BCl3 MFC set to  0.000000
11/18/2011	2:24:43 PM	PHl3 MFC set to  0.000000
11/18/2011	2:24:43 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:24:43 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:24:43 PM	Tube furnace set to 150
11/18/2011	2:25:13 PM	Helium valve closed
11/18/2011	2:25:13 PM	H2 valve closed
11/18/2011	2:25:13 PM	BCl3 valve closed
11/18/2011	2:25:13 PM	PH3 valve closed
11/18/2011	2:25:13 PM	SiCl4 pre valve closed
11/18/2011	2:25:13 PM	SiCl4 post valve closed
11/18/2011	2:25:13 PM	Bypass valve closed
11/18/2011	2:25:13 PM	Bubbler valve closed
11/18/2011	2:25:13 PM	Main Vac valve opened
11/18/2011	2:25:13 PM	Helium MFC set to  0.000000
11/18/2011	2:25:13 PM	H2 MFC set to  0.000000
11/18/2011	2:25:13 PM	BCl3 MFC set to  0.000000
11/18/2011	2:25:13 PM	PHl3 MFC set to  0.000000
11/18/2011	2:25:13 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:25:13 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:25:14 PM	Tube furnace set to 150
11/18/2011	2:25:44 PM	H2 valve closed
11/18/2011	2:25:44 PM	BCl3 valve closed
11/18/2011	2:25:44 PM	PH3 valve closed
11/18/2011	2:25:44 PM	SiCl4 pre valve closed
11/18/2011	2:25:44 PM	SiCl4 post valve closed
11/18/2011	2:25:44 PM	Bypass valve closed
11/18/2011	2:25:44 PM	Bubbler valve closed
11/18/2011	2:25:44 PM	Helium valve opened
11/18/2011	2:25:44 PM	Main Vac valve opened
11/18/2011	2:25:44 PM	Helium MFC set to  20.000000
11/18/2011	2:25:44 PM	H2 MFC set to  0.000000
11/18/2011	2:25:44 PM	BCl3 MFC set to  0.000000
11/18/2011	2:25:44 PM	PHl3 MFC set to  0.000000
11/18/2011	2:25:44 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:25:44 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:25:44 PM	Tube furnace set to 150
11/18/2011	2:26:14 PM	Helium valve closed
11/18/2011	2:26:14 PM	H2 valve closed
11/18/2011	2:26:14 PM	BCl3 valve closed
11/18/2011	2:26:14 PM	PH3 valve closed
11/18/2011	2:26:14 PM	SiCl4 pre valve closed
11/18/2011	2:26:14 PM	SiCl4 post valve closed
11/18/2011	2:26:14 PM	Bypass valve closed
11/18/2011	2:26:14 PM	Bubbler valve closed
11/18/2011	2:26:14 PM	Main Vac valve opened
11/18/2011	2:26:14 PM	Helium MFC set to  0.000000
11/18/2011	2:26:14 PM	H2 MFC set to  0.000000
11/18/2011	2:26:14 PM	BCl3 MFC set to  0.000000
11/18/2011	2:26:14 PM	PHl3 MFC set to  0.000000
11/18/2011	2:26:14 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:26:14 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:26:14 PM	Tube furnace set to 150
11/18/2011	2:26:44 PM	H2 valve closed
11/18/2011	2:26:44 PM	BCl3 valve closed
11/18/2011	2:26:44 PM	PH3 valve closed
11/18/2011	2:26:44 PM	SiCl4 pre valve closed
11/18/2011	2:26:44 PM	SiCl4 post valve closed
11/18/2011	2:26:44 PM	Bypass valve closed
11/18/2011	2:26:44 PM	Bubbler valve closed
11/18/2011	2:26:44 PM	Helium valve opened
11/18/2011	2:26:44 PM	Main Vac valve opened
11/18/2011	2:26:44 PM	Helium MFC set to  20.000000
11/18/2011	2:26:44 PM	H2 MFC set to  0.000000
11/18/2011	2:26:44 PM	BCl3 MFC set to  0.000000
11/18/2011	2:26:44 PM	PHl3 MFC set to  0.000000
11/18/2011	2:26:44 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:26:44 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:26:44 PM	Tube furnace set to 150
11/18/2011	2:27:14 PM	Helium valve closed
11/18/2011	2:27:14 PM	H2 valve closed
11/18/2011	2:27:14 PM	BCl3 valve closed
11/18/2011	2:27:14 PM	PH3 valve closed
11/18/2011	2:27:14 PM	SiCl4 pre valve closed
11/18/2011	2:27:14 PM	SiCl4 post valve closed
11/18/2011	2:27:14 PM	Bypass valve closed
11/18/2011	2:27:14 PM	Bubbler valve closed
11/18/2011	2:27:14 PM	Main Vac valve opened
11/18/2011	2:27:14 PM	Helium MFC set to  0.000000
11/18/2011	2:27:14 PM	H2 MFC set to  0.000000
11/18/2011	2:27:14 PM	BCl3 MFC set to  0.000000
11/18/2011	2:27:14 PM	PHl3 MFC set to  0.000000
11/18/2011	2:27:14 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:27:14 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:27:14 PM	Tube furnace set to 150
11/18/2011	2:27:44 PM	H2 valve closed
11/18/2011	2:27:44 PM	BCl3 valve closed
11/18/2011	2:27:44 PM	PH3 valve closed
11/18/2011	2:27:44 PM	SiCl4 pre valve closed
11/18/2011	2:27:44 PM	SiCl4 post valve closed
11/18/2011	2:27:44 PM	Bypass valve closed
11/18/2011	2:27:44 PM	Bubbler valve closed
11/18/2011	2:27:44 PM	Helium valve opened
11/18/2011	2:27:44 PM	Main Vac valve opened
11/18/2011	2:27:44 PM	Helium MFC set to  20.000000
11/18/2011	2:27:44 PM	H2 MFC set to  0.000000
11/18/2011	2:27:44 PM	BCl3 MFC set to  0.000000
11/18/2011	2:27:44 PM	PHl3 MFC set to  0.000000
11/18/2011	2:27:44 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:27:44 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:27:45 PM	Tube furnace set to 150
11/18/2011	2:28:15 PM	Helium valve closed
11/18/2011	2:28:15 PM	H2 valve closed
11/18/2011	2:28:15 PM	BCl3 valve closed
11/18/2011	2:28:15 PM	PH3 valve closed
11/18/2011	2:28:15 PM	SiCl4 pre valve closed
11/18/2011	2:28:15 PM	SiCl4 post valve closed
11/18/2011	2:28:15 PM	Bypass valve closed
11/18/2011	2:28:15 PM	Bubbler valve closed
11/18/2011	2:28:15 PM	Main Vac valve opened
11/18/2011	2:28:15 PM	Helium MFC set to  0.000000
11/18/2011	2:28:15 PM	H2 MFC set to  0.000000
11/18/2011	2:28:15 PM	BCl3 MFC set to  0.000000
11/18/2011	2:28:15 PM	PHl3 MFC set to  0.000000
11/18/2011	2:28:15 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:28:15 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:28:15 PM	Tube furnace set to 150
11/18/2011	2:28:45 PM	H2 valve closed
11/18/2011	2:28:45 PM	BCl3 valve closed
11/18/2011	2:28:45 PM	PH3 valve closed
11/18/2011	2:28:45 PM	SiCl4 pre valve closed
11/18/2011	2:28:45 PM	SiCl4 post valve closed
11/18/2011	2:28:45 PM	Bypass valve closed
11/18/2011	2:28:45 PM	Bubbler valve closed
11/18/2011	2:28:45 PM	Helium valve opened
11/18/2011	2:28:45 PM	Main Vac valve opened
11/18/2011	2:28:45 PM	Helium MFC set to  20.000000
11/18/2011	2:28:45 PM	H2 MFC set to  0.000000
11/18/2011	2:28:45 PM	BCl3 MFC set to  0.000000
11/18/2011	2:28:45 PM	PHl3 MFC set to  0.000000
11/18/2011	2:28:45 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:28:45 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:28:45 PM	Tube furnace set to 150
11/18/2011	2:29:15 PM	Helium valve closed
11/18/2011	2:29:15 PM	H2 valve closed
11/18/2011	2:29:15 PM	BCl3 valve closed
11/18/2011	2:29:15 PM	PH3 valve closed
11/18/2011	2:29:15 PM	SiCl4 pre valve closed
11/18/2011	2:29:15 PM	SiCl4 post valve closed
11/18/2011	2:29:15 PM	Bypass valve closed
11/18/2011	2:29:15 PM	Bubbler valve closed
11/18/2011	2:29:15 PM	Main Vac valve opened
11/18/2011	2:29:15 PM	Helium MFC set to  0.000000
11/18/2011	2:29:15 PM	H2 MFC set to  0.000000
11/18/2011	2:29:15 PM	BCl3 MFC set to  0.000000
11/18/2011	2:29:15 PM	PHl3 MFC set to  0.000000
11/18/2011	2:29:15 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:29:15 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:29:15 PM	Tube furnace set to 150
11/18/2011	2:29:45 PM	H2 valve closed
11/18/2011	2:29:45 PM	BCl3 valve closed
11/18/2011	2:29:45 PM	PH3 valve closed
11/18/2011	2:29:45 PM	SiCl4 pre valve closed
11/18/2011	2:29:45 PM	SiCl4 post valve closed
11/18/2011	2:29:45 PM	Bypass valve closed
11/18/2011	2:29:45 PM	Bubbler valve closed
11/18/2011	2:29:45 PM	Helium valve opened
11/18/2011	2:29:45 PM	Main Vac valve opened
11/18/2011	2:29:45 PM	Helium MFC set to  20.000000
11/18/2011	2:29:45 PM	H2 MFC set to  0.000000
11/18/2011	2:29:45 PM	BCl3 MFC set to  0.000000
11/18/2011	2:29:45 PM	PHl3 MFC set to  0.000000
11/18/2011	2:29:45 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:29:45 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:29:45 PM	Tube furnace set to 150
11/18/2011	2:30:15 PM	Helium valve closed
11/18/2011	2:30:15 PM	H2 valve closed
11/18/2011	2:30:15 PM	BCl3 valve closed
11/18/2011	2:30:15 PM	PH3 valve closed
11/18/2011	2:30:15 PM	SiCl4 pre valve closed
11/18/2011	2:30:15 PM	SiCl4 post valve closed
11/18/2011	2:30:15 PM	Bypass valve closed
11/18/2011	2:30:15 PM	Bubbler valve closed
11/18/2011	2:30:15 PM	Main Vac valve opened
11/18/2011	2:30:15 PM	Helium MFC set to  0.000000
11/18/2011	2:30:15 PM	H2 MFC set to  0.000000
11/18/2011	2:30:15 PM	BCl3 MFC set to  0.000000
11/18/2011	2:30:15 PM	PHl3 MFC set to  0.000000
11/18/2011	2:30:15 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:30:15 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:30:16 PM	Tube furnace set to 150
11/18/2011	2:30:46 PM	H2 valve closed
11/18/2011	2:30:46 PM	BCl3 valve closed
11/18/2011	2:30:46 PM	PH3 valve closed
11/18/2011	2:30:46 PM	SiCl4 pre valve closed
11/18/2011	2:30:46 PM	SiCl4 post valve closed
11/18/2011	2:30:46 PM	Bypass valve closed
11/18/2011	2:30:46 PM	Bubbler valve closed
11/18/2011	2:30:46 PM	Helium valve opened
11/18/2011	2:30:46 PM	Main Vac valve opened
11/18/2011	2:30:46 PM	Helium MFC set to  20.000000
11/18/2011	2:30:46 PM	H2 MFC set to  0.000000
11/18/2011	2:30:46 PM	BCl3 MFC set to  0.000000
11/18/2011	2:30:46 PM	PHl3 MFC set to  0.000000
11/18/2011	2:30:46 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:30:46 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:30:46 PM	Tube furnace set to 150
11/18/2011	2:31:16 PM	Helium valve closed
11/18/2011	2:31:16 PM	H2 valve closed
11/18/2011	2:31:16 PM	BCl3 valve closed
11/18/2011	2:31:16 PM	PH3 valve closed
11/18/2011	2:31:16 PM	SiCl4 pre valve closed
11/18/2011	2:31:16 PM	SiCl4 post valve closed
11/18/2011	2:31:16 PM	Bypass valve closed
11/18/2011	2:31:16 PM	Bubbler valve closed
11/18/2011	2:31:16 PM	Main Vac valve opened
11/18/2011	2:31:16 PM	Helium MFC set to  0.000000
11/18/2011	2:31:16 PM	H2 MFC set to  0.000000
11/18/2011	2:31:16 PM	BCl3 MFC set to  0.000000
11/18/2011	2:31:16 PM	PHl3 MFC set to  0.000000
11/18/2011	2:31:16 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:31:16 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:31:16 PM	Tube furnace set to 150
11/18/2011	2:31:46 PM	H2 valve closed
11/18/2011	2:31:46 PM	BCl3 valve closed
11/18/2011	2:31:46 PM	PH3 valve closed
11/18/2011	2:31:46 PM	SiCl4 pre valve closed
11/18/2011	2:31:46 PM	SiCl4 post valve closed
11/18/2011	2:31:46 PM	Bypass valve closed
11/18/2011	2:31:46 PM	Bubbler valve closed
11/18/2011	2:31:46 PM	Helium valve opened
11/18/2011	2:31:46 PM	Main Vac valve opened
11/18/2011	2:31:46 PM	Helium MFC set to  20.000000
11/18/2011	2:31:46 PM	H2 MFC set to  0.000000
11/18/2011	2:31:46 PM	BCl3 MFC set to  0.000000
11/18/2011	2:31:46 PM	PHl3 MFC set to  0.000000
11/18/2011	2:31:46 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:31:46 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:31:46 PM	Tube furnace set to 150
11/18/2011	2:32:16 PM	Helium valve closed
11/18/2011	2:32:16 PM	H2 valve closed
11/18/2011	2:32:16 PM	BCl3 valve closed
11/18/2011	2:32:16 PM	PH3 valve closed
11/18/2011	2:32:16 PM	SiCl4 pre valve closed
11/18/2011	2:32:16 PM	SiCl4 post valve closed
11/18/2011	2:32:16 PM	Bypass valve closed
11/18/2011	2:32:16 PM	Bubbler valve closed
11/18/2011	2:32:16 PM	Main Vac valve opened
11/18/2011	2:32:16 PM	Helium MFC set to  0.000000
11/18/2011	2:32:16 PM	H2 MFC set to  0.000000
11/18/2011	2:32:16 PM	BCl3 MFC set to  0.000000
11/18/2011	2:32:16 PM	PHl3 MFC set to  0.000000
11/18/2011	2:32:16 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:32:16 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:32:16 PM	Tube furnace set to 150
11/18/2011	2:32:46 PM	H2 valve closed
11/18/2011	2:32:47 PM	BCl3 valve closed
11/18/2011	2:32:47 PM	PH3 valve closed
11/18/2011	2:32:47 PM	SiCl4 pre valve closed
11/18/2011	2:32:47 PM	SiCl4 post valve closed
11/18/2011	2:32:47 PM	Bypass valve closed
11/18/2011	2:32:47 PM	Bubbler valve closed
11/18/2011	2:32:47 PM	Helium valve opened
11/18/2011	2:32:47 PM	Main Vac valve opened
11/18/2011	2:32:47 PM	Helium MFC set to  20.000000
11/18/2011	2:32:47 PM	H2 MFC set to  0.000000
11/18/2011	2:32:47 PM	BCl3 MFC set to  0.000000
11/18/2011	2:32:47 PM	PHl3 MFC set to  0.000000
11/18/2011	2:32:47 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:32:47 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:32:47 PM	Tube furnace set to 150
11/18/2011	2:33:17 PM	Helium valve closed
11/18/2011	2:33:17 PM	H2 valve closed
11/18/2011	2:33:17 PM	BCl3 valve closed
11/18/2011	2:33:17 PM	PH3 valve closed
11/18/2011	2:33:17 PM	SiCl4 pre valve closed
11/18/2011	2:33:17 PM	SiCl4 post valve closed
11/18/2011	2:33:17 PM	Bypass valve closed
11/18/2011	2:33:17 PM	Bubbler valve closed
11/18/2011	2:33:17 PM	Main Vac valve opened
11/18/2011	2:33:17 PM	Helium MFC set to  0.000000
11/18/2011	2:33:17 PM	H2 MFC set to  0.000000
11/18/2011	2:33:17 PM	BCl3 MFC set to  0.000000
11/18/2011	2:33:17 PM	PHl3 MFC set to  0.000000
11/18/2011	2:33:17 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:33:17 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:33:17 PM	Tube furnace set to 150
11/18/2011	2:33:47 PM	H2 valve closed
11/18/2011	2:33:47 PM	BCl3 valve closed
11/18/2011	2:33:47 PM	PH3 valve closed
11/18/2011	2:33:47 PM	SiCl4 pre valve closed
11/18/2011	2:33:47 PM	SiCl4 post valve closed
11/18/2011	2:33:47 PM	Bypass valve closed
11/18/2011	2:33:47 PM	Bubbler valve closed
11/18/2011	2:33:47 PM	Helium valve opened
11/18/2011	2:33:47 PM	Main Vac valve opened
11/18/2011	2:33:47 PM	Helium MFC set to  20.000000
11/18/2011	2:33:47 PM	H2 MFC set to  0.000000
11/18/2011	2:33:47 PM	BCl3 MFC set to  0.000000
11/18/2011	2:33:47 PM	PHl3 MFC set to  0.000000
11/18/2011	2:33:47 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:33:47 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:33:47 PM	Tube furnace set to 150
11/18/2011	2:34:17 PM	Helium valve closed
11/18/2011	2:34:17 PM	H2 valve closed
11/18/2011	2:34:17 PM	BCl3 valve closed
11/18/2011	2:34:17 PM	PH3 valve closed
11/18/2011	2:34:17 PM	SiCl4 pre valve closed
11/18/2011	2:34:17 PM	SiCl4 post valve closed
11/18/2011	2:34:17 PM	Bypass valve closed
11/18/2011	2:34:17 PM	Bubbler valve closed
11/18/2011	2:34:17 PM	Main Vac valve opened
11/18/2011	2:34:17 PM	Helium MFC set to  0.000000
11/18/2011	2:34:17 PM	H2 MFC set to  0.000000
11/18/2011	2:34:17 PM	BCl3 MFC set to  0.000000
11/18/2011	2:34:17 PM	PHl3 MFC set to  0.000000
11/18/2011	2:34:17 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:34:17 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:34:17 PM	Tube furnace set to 180
11/18/2011	2:34:22 PM	Run finished at 2:34 PM
11/18/2011	2:43:31 PM	Recipe started at 2:43 PM
11/18/2011	2:43:31 PM	Helium valve closed
11/18/2011	2:43:31 PM	H2 valve closed
11/18/2011	2:43:31 PM	BCl3 valve closed
11/18/2011	2:43:31 PM	PH3 valve closed
11/18/2011	2:43:31 PM	SiCl4 pre valve closed
11/18/2011	2:43:31 PM	SiCl4 post valve closed
11/18/2011	2:43:31 PM	Main Vac valve closed
11/18/2011	2:43:31 PM	Bubbler valve closed
11/18/2011	2:43:31 PM	Bypass valve opened
11/18/2011	2:43:31 PM	Helium MFC set to  0.000000
11/18/2011	2:43:31 PM	H2 MFC set to  0.000000
11/18/2011	2:43:31 PM	BCl3 MFC set to  0.000000
11/18/2011	2:43:31 PM	PHl3 MFC set to  0.000000
11/18/2011	2:43:31 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:43:31 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:43:31 PM	Tube furnace set to 180
11/18/2011	2:43:33 PM	Helium valve closed
11/18/2011	2:43:33 PM	H2 valve closed
11/18/2011	2:43:33 PM	BCl3 valve closed
11/18/2011	2:43:33 PM	PH3 valve closed
11/18/2011	2:43:33 PM	SiCl4 pre valve closed
11/18/2011	2:43:33 PM	SiCl4 post valve closed
11/18/2011	2:43:33 PM	Main Vac valve closed
11/18/2011	2:43:33 PM	Bubbler valve closed
11/18/2011	2:43:33 PM	Bypass valve opened
11/18/2011	2:43:33 PM	Helium MFC set to  0.000000
11/18/2011	2:43:33 PM	H2 MFC set to  0.000000
11/18/2011	2:43:33 PM	BCl3 MFC set to  0.000000
11/18/2011	2:43:33 PM	PHl3 MFC set to  0.000000
11/18/2011	2:43:33 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:43:33 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:43:33 PM	Tube furnace set to 150
11/18/2011	2:44:03 PM	Helium valve closed
11/18/2011	2:44:03 PM	H2 valve closed
11/18/2011	2:44:03 PM	BCl3 valve closed
11/18/2011	2:44:03 PM	PH3 valve closed
11/18/2011	2:44:03 PM	SiCl4 pre valve closed
11/18/2011	2:44:03 PM	SiCl4 post valve closed
11/18/2011	2:44:03 PM	Bypass valve closed
11/18/2011	2:44:03 PM	Bubbler valve closed
11/18/2011	2:44:03 PM	Main Vac valve opened
11/18/2011	2:44:03 PM	Helium MFC set to  0.000000
11/18/2011	2:44:03 PM	H2 MFC set to  0.000000
11/18/2011	2:44:03 PM	BCl3 MFC set to  0.000000
11/18/2011	2:44:03 PM	PHl3 MFC set to  0.000000
11/18/2011	2:44:03 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:44:03 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:44:03 PM	Tube furnace set to 180
11/18/2011	2:44:33 PM	H2 valve closed
11/18/2011	2:44:33 PM	BCl3 valve closed
11/18/2011	2:44:33 PM	PH3 valve closed
11/18/2011	2:44:33 PM	SiCl4 pre valve closed
11/18/2011	2:44:33 PM	SiCl4 post valve closed
11/18/2011	2:44:33 PM	Bypass valve closed
11/18/2011	2:44:33 PM	Bubbler valve closed
11/18/2011	2:44:33 PM	Helium valve opened
11/18/2011	2:44:33 PM	Main Vac valve opened
11/18/2011	2:44:33 PM	Helium MFC set to  20.000000
11/18/2011	2:44:33 PM	H2 MFC set to  0.000000
11/18/2011	2:44:33 PM	BCl3 MFC set to  0.000000
11/18/2011	2:44:33 PM	PHl3 MFC set to  0.000000
11/18/2011	2:44:33 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:44:33 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:44:33 PM	Tube furnace set to 180
11/18/2011	2:45:03 PM	Helium valve closed
11/18/2011	2:45:03 PM	H2 valve closed
11/18/2011	2:45:03 PM	BCl3 valve closed
11/18/2011	2:45:03 PM	PH3 valve closed
11/18/2011	2:45:03 PM	SiCl4 pre valve closed
11/18/2011	2:45:03 PM	SiCl4 post valve closed
11/18/2011	2:45:03 PM	Bypass valve closed
11/18/2011	2:45:03 PM	Bubbler valve closed
11/18/2011	2:45:03 PM	Main Vac valve opened
11/18/2011	2:45:03 PM	Helium MFC set to  0.000000
11/18/2011	2:45:03 PM	H2 MFC set to  0.000000
11/18/2011	2:45:03 PM	BCl3 MFC set to  0.000000
11/18/2011	2:45:03 PM	PHl3 MFC set to  0.000000
11/18/2011	2:45:03 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:45:03 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:45:03 PM	Tube furnace set to 150
11/18/2011	2:45:33 PM	H2 valve closed
11/18/2011	2:45:33 PM	BCl3 valve closed
11/18/2011	2:45:33 PM	PH3 valve closed
11/18/2011	2:45:33 PM	SiCl4 pre valve closed
11/18/2011	2:45:33 PM	SiCl4 post valve closed
11/18/2011	2:45:33 PM	Bypass valve closed
11/18/2011	2:45:33 PM	Bubbler valve closed
11/18/2011	2:45:33 PM	Helium valve opened
11/18/2011	2:45:33 PM	Main Vac valve opened
11/18/2011	2:45:33 PM	Helium MFC set to  20.000000
11/18/2011	2:45:33 PM	H2 MFC set to  0.000000
11/18/2011	2:45:33 PM	BCl3 MFC set to  0.000000
11/18/2011	2:45:33 PM	PHl3 MFC set to  0.000000
11/18/2011	2:45:33 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:45:33 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:45:34 PM	Tube furnace set to 180
11/18/2011	2:46:04 PM	Helium valve closed
11/18/2011	2:46:04 PM	H2 valve closed
11/18/2011	2:46:04 PM	BCl3 valve closed
11/18/2011	2:46:04 PM	PH3 valve closed
11/18/2011	2:46:04 PM	SiCl4 pre valve closed
11/18/2011	2:46:04 PM	SiCl4 post valve closed
11/18/2011	2:46:04 PM	Bypass valve closed
11/18/2011	2:46:04 PM	Bubbler valve closed
11/18/2011	2:46:04 PM	Main Vac valve opened
11/18/2011	2:46:04 PM	Helium MFC set to  0.000000
11/18/2011	2:46:04 PM	H2 MFC set to  0.000000
11/18/2011	2:46:04 PM	BCl3 MFC set to  0.000000
11/18/2011	2:46:04 PM	PHl3 MFC set to  0.000000
11/18/2011	2:46:04 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:46:04 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:46:04 PM	Tube furnace set to 150
11/18/2011	2:46:34 PM	H2 valve closed
11/18/2011	2:46:34 PM	BCl3 valve closed
11/18/2011	2:46:34 PM	PH3 valve closed
11/18/2011	2:46:34 PM	SiCl4 pre valve closed
11/18/2011	2:46:34 PM	SiCl4 post valve closed
11/18/2011	2:46:34 PM	Bypass valve closed
11/18/2011	2:46:34 PM	Bubbler valve closed
11/18/2011	2:46:34 PM	Helium valve opened
11/18/2011	2:46:34 PM	Main Vac valve opened
11/18/2011	2:46:34 PM	Helium MFC set to  20.000000
11/18/2011	2:46:34 PM	H2 MFC set to  0.000000
11/18/2011	2:46:34 PM	BCl3 MFC set to  0.000000
11/18/2011	2:46:34 PM	PHl3 MFC set to  0.000000
11/18/2011	2:46:34 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:46:34 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:46:34 PM	Tube furnace set to 150
11/18/2011	2:47:04 PM	Helium valve closed
11/18/2011	2:47:04 PM	H2 valve closed
11/18/2011	2:47:04 PM	BCl3 valve closed
11/18/2011	2:47:04 PM	PH3 valve closed
11/18/2011	2:47:04 PM	SiCl4 pre valve closed
11/18/2011	2:47:04 PM	SiCl4 post valve closed
11/18/2011	2:47:04 PM	Bypass valve closed
11/18/2011	2:47:04 PM	Bubbler valve closed
11/18/2011	2:47:04 PM	Main Vac valve opened
11/18/2011	2:47:04 PM	Helium MFC set to  0.000000
11/18/2011	2:47:04 PM	H2 MFC set to  0.000000
11/18/2011	2:47:04 PM	BCl3 MFC set to  0.000000
11/18/2011	2:47:04 PM	PHl3 MFC set to  0.000000
11/18/2011	2:47:04 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:47:04 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:47:04 PM	Tube furnace set to 150
11/18/2011	2:47:34 PM	H2 valve closed
11/18/2011	2:47:34 PM	BCl3 valve closed
11/18/2011	2:47:34 PM	PH3 valve closed
11/18/2011	2:47:34 PM	SiCl4 pre valve closed
11/18/2011	2:47:34 PM	SiCl4 post valve closed
11/18/2011	2:47:34 PM	Bypass valve closed
11/18/2011	2:47:34 PM	Bubbler valve closed
11/18/2011	2:47:34 PM	Helium valve opened
11/18/2011	2:47:34 PM	Main Vac valve opened
11/18/2011	2:47:34 PM	Helium MFC set to  20.000000
11/18/2011	2:47:34 PM	H2 MFC set to  0.000000
11/18/2011	2:47:34 PM	BCl3 MFC set to  0.000000
11/18/2011	2:47:34 PM	PHl3 MFC set to  0.000000
11/18/2011	2:47:34 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:47:34 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:47:34 PM	Tube furnace set to 180
11/18/2011	2:48:04 PM	Helium valve closed
11/18/2011	2:48:04 PM	H2 valve closed
11/18/2011	2:48:04 PM	BCl3 valve closed
11/18/2011	2:48:04 PM	PH3 valve closed
11/18/2011	2:48:04 PM	SiCl4 pre valve closed
11/18/2011	2:48:04 PM	SiCl4 post valve closed
11/18/2011	2:48:05 PM	Bypass valve closed
11/18/2011	2:48:05 PM	Bubbler valve closed
11/18/2011	2:48:05 PM	Main Vac valve opened
11/18/2011	2:48:05 PM	Helium MFC set to  0.000000
11/18/2011	2:48:05 PM	H2 MFC set to  0.000000
11/18/2011	2:48:05 PM	BCl3 MFC set to  0.000000
11/18/2011	2:48:05 PM	PHl3 MFC set to  0.000000
11/18/2011	2:48:05 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:48:05 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:48:05 PM	Tube furnace set to 150
11/18/2011	2:48:35 PM	H2 valve closed
11/18/2011	2:48:35 PM	BCl3 valve closed
11/18/2011	2:48:35 PM	PH3 valve closed
11/18/2011	2:48:35 PM	SiCl4 pre valve closed
11/18/2011	2:48:35 PM	SiCl4 post valve closed
11/18/2011	2:48:35 PM	Bypass valve closed
11/18/2011	2:48:35 PM	Bubbler valve closed
11/18/2011	2:48:35 PM	Helium valve opened
11/18/2011	2:48:35 PM	Main Vac valve opened
11/18/2011	2:48:35 PM	Helium MFC set to  20.000000
11/18/2011	2:48:35 PM	H2 MFC set to  0.000000
11/18/2011	2:48:35 PM	BCl3 MFC set to  0.000000
11/18/2011	2:48:35 PM	PHl3 MFC set to  0.000000
11/18/2011	2:48:35 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:48:35 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:48:35 PM	Tube furnace set to 150
11/18/2011	2:49:05 PM	Helium valve closed
11/18/2011	2:49:05 PM	H2 valve closed
11/18/2011	2:49:05 PM	BCl3 valve closed
11/18/2011	2:49:05 PM	PH3 valve closed
11/18/2011	2:49:05 PM	SiCl4 pre valve closed
11/18/2011	2:49:05 PM	SiCl4 post valve closed
11/18/2011	2:49:05 PM	Bypass valve closed
11/18/2011	2:49:05 PM	Bubbler valve closed
11/18/2011	2:49:05 PM	Main Vac valve opened
11/18/2011	2:49:05 PM	Helium MFC set to  0.000000
11/18/2011	2:49:05 PM	H2 MFC set to  0.000000
11/18/2011	2:49:05 PM	BCl3 MFC set to  0.000000
11/18/2011	2:49:05 PM	PHl3 MFC set to  0.000000
11/18/2011	2:49:05 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:49:05 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:49:05 PM	Tube furnace set to 150
11/18/2011	2:49:35 PM	H2 valve closed
11/18/2011	2:49:35 PM	BCl3 valve closed
11/18/2011	2:49:35 PM	PH3 valve closed
11/18/2011	2:49:35 PM	SiCl4 pre valve closed
11/18/2011	2:49:35 PM	SiCl4 post valve closed
11/18/2011	2:49:35 PM	Bypass valve closed
11/18/2011	2:49:35 PM	Bubbler valve closed
11/18/2011	2:49:35 PM	Helium valve opened
11/18/2011	2:49:35 PM	Main Vac valve opened
11/18/2011	2:49:35 PM	Helium MFC set to  20.000000
11/18/2011	2:49:35 PM	H2 MFC set to  0.000000
11/18/2011	2:49:35 PM	BCl3 MFC set to  0.000000
11/18/2011	2:49:35 PM	PHl3 MFC set to  0.000000
11/18/2011	2:49:35 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:49:35 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:49:35 PM	Tube furnace set to 150
11/18/2011	2:50:05 PM	Helium valve closed
11/18/2011	2:50:05 PM	H2 valve closed
11/18/2011	2:50:05 PM	BCl3 valve closed
11/18/2011	2:50:05 PM	PH3 valve closed
11/18/2011	2:50:05 PM	SiCl4 pre valve closed
11/18/2011	2:50:05 PM	SiCl4 post valve closed
11/18/2011	2:50:05 PM	Bypass valve closed
11/18/2011	2:50:05 PM	Bubbler valve closed
11/18/2011	2:50:05 PM	Main Vac valve opened
11/18/2011	2:50:05 PM	Helium MFC set to  0.000000
11/18/2011	2:50:05 PM	H2 MFC set to  0.000000
11/18/2011	2:50:05 PM	BCl3 MFC set to  0.000000
11/18/2011	2:50:05 PM	PHl3 MFC set to  0.000000
11/18/2011	2:50:05 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:50:05 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:50:05 PM	Tube furnace set to 150
11/18/2011	2:50:36 PM	H2 valve closed
11/18/2011	2:50:36 PM	BCl3 valve closed
11/18/2011	2:50:36 PM	PH3 valve closed
11/18/2011	2:50:36 PM	SiCl4 pre valve closed
11/18/2011	2:50:36 PM	SiCl4 post valve closed
11/18/2011	2:50:36 PM	Bypass valve closed
11/18/2011	2:50:36 PM	Bubbler valve closed
11/18/2011	2:50:36 PM	Helium valve opened
11/18/2011	2:50:36 PM	Main Vac valve opened
11/18/2011	2:50:36 PM	Helium MFC set to  20.000000
11/18/2011	2:50:36 PM	H2 MFC set to  0.000000
11/18/2011	2:50:36 PM	BCl3 MFC set to  0.000000
11/18/2011	2:50:36 PM	PHl3 MFC set to  0.000000
11/18/2011	2:50:36 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:50:36 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:50:36 PM	Tube furnace set to 150
11/18/2011	2:51:06 PM	Helium valve closed
11/18/2011	2:51:06 PM	H2 valve closed
11/18/2011	2:51:06 PM	BCl3 valve closed
11/18/2011	2:51:06 PM	PH3 valve closed
11/18/2011	2:51:06 PM	SiCl4 pre valve closed
11/18/2011	2:51:06 PM	SiCl4 post valve closed
11/18/2011	2:51:06 PM	Bypass valve closed
11/18/2011	2:51:06 PM	Bubbler valve closed
11/18/2011	2:51:06 PM	Main Vac valve opened
11/18/2011	2:51:06 PM	Helium MFC set to  0.000000
11/18/2011	2:51:06 PM	H2 MFC set to  0.000000
11/18/2011	2:51:06 PM	BCl3 MFC set to  0.000000
11/18/2011	2:51:06 PM	PHl3 MFC set to  0.000000
11/18/2011	2:51:06 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:51:06 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:51:06 PM	Tube furnace set to 150
11/18/2011	2:51:36 PM	H2 valve closed
11/18/2011	2:51:36 PM	BCl3 valve closed
11/18/2011	2:51:36 PM	PH3 valve closed
11/18/2011	2:51:36 PM	SiCl4 pre valve closed
11/18/2011	2:51:36 PM	SiCl4 post valve closed
11/18/2011	2:51:36 PM	Bypass valve closed
11/18/2011	2:51:36 PM	Bubbler valve closed
11/18/2011	2:51:36 PM	Helium valve opened
11/18/2011	2:51:36 PM	Main Vac valve opened
11/18/2011	2:51:36 PM	Helium MFC set to  20.000000
11/18/2011	2:51:36 PM	H2 MFC set to  0.000000
11/18/2011	2:51:36 PM	BCl3 MFC set to  0.000000
11/18/2011	2:51:36 PM	PHl3 MFC set to  0.000000
11/18/2011	2:51:36 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:51:36 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:51:36 PM	Tube furnace set to 150
11/18/2011	2:52:06 PM	Helium valve closed
11/18/2011	2:52:06 PM	H2 valve closed
11/18/2011	2:52:06 PM	BCl3 valve closed
11/18/2011	2:52:06 PM	PH3 valve closed
11/18/2011	2:52:06 PM	SiCl4 pre valve closed
11/18/2011	2:52:06 PM	SiCl4 post valve closed
11/18/2011	2:52:06 PM	Bypass valve closed
11/18/2011	2:52:06 PM	Bubbler valve closed
11/18/2011	2:52:06 PM	Main Vac valve opened
11/18/2011	2:52:06 PM	Helium MFC set to  0.000000
11/18/2011	2:52:06 PM	H2 MFC set to  0.000000
11/18/2011	2:52:06 PM	BCl3 MFC set to  0.000000
11/18/2011	2:52:06 PM	PHl3 MFC set to  0.000000
11/18/2011	2:52:06 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:52:06 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:52:06 PM	Tube furnace set to 150
11/18/2011	2:52:36 PM	H2 valve closed
11/18/2011	2:52:36 PM	BCl3 valve closed
11/18/2011	2:52:36 PM	PH3 valve closed
11/18/2011	2:52:36 PM	SiCl4 pre valve closed
11/18/2011	2:52:36 PM	SiCl4 post valve closed
11/18/2011	2:52:36 PM	Bypass valve closed
11/18/2011	2:52:36 PM	Bubbler valve closed
11/18/2011	2:52:36 PM	Helium valve opened
11/18/2011	2:52:36 PM	Main Vac valve opened
11/18/2011	2:52:36 PM	Helium MFC set to  20.000000
11/18/2011	2:52:36 PM	H2 MFC set to  0.000000
11/18/2011	2:52:36 PM	BCl3 MFC set to  0.000000
11/18/2011	2:52:36 PM	PHl3 MFC set to  0.000000
11/18/2011	2:52:36 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:52:36 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:52:37 PM	Tube furnace set to 150
11/18/2011	2:53:07 PM	Helium valve closed
11/18/2011	2:53:07 PM	H2 valve closed
11/18/2011	2:53:07 PM	BCl3 valve closed
11/18/2011	2:53:07 PM	PH3 valve closed
11/18/2011	2:53:07 PM	SiCl4 pre valve closed
11/18/2011	2:53:07 PM	SiCl4 post valve closed
11/18/2011	2:53:07 PM	Bypass valve closed
11/18/2011	2:53:07 PM	Bubbler valve closed
11/18/2011	2:53:07 PM	Main Vac valve opened
11/18/2011	2:53:07 PM	Helium MFC set to  0.000000
11/18/2011	2:53:07 PM	H2 MFC set to  0.000000
11/18/2011	2:53:07 PM	BCl3 MFC set to  0.000000
11/18/2011	2:53:07 PM	PHl3 MFC set to  0.000000
11/18/2011	2:53:07 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:53:07 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:53:07 PM	Tube furnace set to 150
11/18/2011	2:53:37 PM	H2 valve closed
11/18/2011	2:53:37 PM	BCl3 valve closed
11/18/2011	2:53:37 PM	PH3 valve closed
11/18/2011	2:53:37 PM	SiCl4 pre valve closed
11/18/2011	2:53:37 PM	SiCl4 post valve closed
11/18/2011	2:53:37 PM	Bypass valve closed
11/18/2011	2:53:37 PM	Bubbler valve closed
11/18/2011	2:53:37 PM	Helium valve opened
11/18/2011	2:53:37 PM	Main Vac valve opened
11/18/2011	2:53:37 PM	Helium MFC set to  20.000000
11/18/2011	2:53:37 PM	H2 MFC set to  0.000000
11/18/2011	2:53:37 PM	BCl3 MFC set to  0.000000
11/18/2011	2:53:37 PM	PHl3 MFC set to  0.000000
11/18/2011	2:53:37 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:53:37 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:53:37 PM	Tube furnace set to 150
11/18/2011	2:54:07 PM	Helium valve closed
11/18/2011	2:54:07 PM	H2 valve closed
11/18/2011	2:54:07 PM	BCl3 valve closed
11/18/2011	2:54:07 PM	PH3 valve closed
11/18/2011	2:54:07 PM	SiCl4 pre valve closed
11/18/2011	2:54:07 PM	SiCl4 post valve closed
11/18/2011	2:54:07 PM	Bypass valve closed
11/18/2011	2:54:07 PM	Bubbler valve closed
11/18/2011	2:54:07 PM	Main Vac valve opened
11/18/2011	2:54:07 PM	Helium MFC set to  0.000000
11/18/2011	2:54:07 PM	H2 MFC set to  0.000000
11/18/2011	2:54:07 PM	BCl3 MFC set to  0.000000
11/18/2011	2:54:07 PM	PHl3 MFC set to  0.000000
11/18/2011	2:54:07 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:54:07 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:54:07 PM	Tube furnace set to 150
11/18/2011	2:54:37 PM	H2 valve closed
11/18/2011	2:54:37 PM	BCl3 valve closed
11/18/2011	2:54:37 PM	PH3 valve closed
11/18/2011	2:54:37 PM	SiCl4 pre valve closed
11/18/2011	2:54:37 PM	SiCl4 post valve closed
11/18/2011	2:54:37 PM	Bypass valve closed
11/18/2011	2:54:37 PM	Bubbler valve closed
11/18/2011	2:54:37 PM	Helium valve opened
11/18/2011	2:54:37 PM	Main Vac valve opened
11/18/2011	2:54:37 PM	Helium MFC set to  20.000000
11/18/2011	2:54:37 PM	H2 MFC set to  0.000000
11/18/2011	2:54:37 PM	BCl3 MFC set to  0.000000
11/18/2011	2:54:37 PM	PHl3 MFC set to  0.000000
11/18/2011	2:54:37 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:54:37 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:54:37 PM	Tube furnace set to 150
11/18/2011	2:55:07 PM	Helium valve closed
11/18/2011	2:55:07 PM	H2 valve closed
11/18/2011	2:55:07 PM	BCl3 valve closed
11/18/2011	2:55:07 PM	PH3 valve closed
11/18/2011	2:55:07 PM	SiCl4 pre valve closed
11/18/2011	2:55:07 PM	SiCl4 post valve closed
11/18/2011	2:55:07 PM	Bypass valve closed
11/18/2011	2:55:07 PM	Bubbler valve closed
11/18/2011	2:55:07 PM	Main Vac valve opened
11/18/2011	2:55:07 PM	Helium MFC set to  0.000000
11/18/2011	2:55:07 PM	H2 MFC set to  0.000000
11/18/2011	2:55:07 PM	BCl3 MFC set to  0.000000
11/18/2011	2:55:07 PM	PHl3 MFC set to  0.000000
11/18/2011	2:55:07 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:55:07 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:55:08 PM	Tube furnace set to 150
11/18/2011	2:55:38 PM	H2 valve closed
11/18/2011	2:55:38 PM	BCl3 valve closed
11/18/2011	2:55:38 PM	PH3 valve closed
11/18/2011	2:55:38 PM	SiCl4 pre valve closed
11/18/2011	2:55:38 PM	SiCl4 post valve closed
11/18/2011	2:55:38 PM	Bypass valve closed
11/18/2011	2:55:38 PM	Bubbler valve closed
11/18/2011	2:55:38 PM	Helium valve opened
11/18/2011	2:55:38 PM	Main Vac valve opened
11/18/2011	2:55:38 PM	Helium MFC set to  20.000000
11/18/2011	2:55:38 PM	H2 MFC set to  0.000000
11/18/2011	2:55:38 PM	BCl3 MFC set to  0.000000
11/18/2011	2:55:38 PM	PHl3 MFC set to  0.000000
11/18/2011	2:55:38 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:55:38 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:55:38 PM	Tube furnace set to 150
11/18/2011	2:56:08 PM	Helium valve closed
11/18/2011	2:56:08 PM	H2 valve closed
11/18/2011	2:56:08 PM	BCl3 valve closed
11/18/2011	2:56:08 PM	PH3 valve closed
11/18/2011	2:56:08 PM	SiCl4 pre valve closed
11/18/2011	2:56:08 PM	SiCl4 post valve closed
11/18/2011	2:56:08 PM	Bypass valve closed
11/18/2011	2:56:08 PM	Bubbler valve closed
11/18/2011	2:56:08 PM	Main Vac valve opened
11/18/2011	2:56:08 PM	Helium MFC set to  0.000000
11/18/2011	2:56:08 PM	H2 MFC set to  0.000000
11/18/2011	2:56:08 PM	BCl3 MFC set to  0.000000
11/18/2011	2:56:08 PM	PHl3 MFC set to  0.000000
11/18/2011	2:56:08 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:56:08 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:56:08 PM	Tube furnace set to 150
11/18/2011	2:56:38 PM	H2 valve closed
11/18/2011	2:56:38 PM	BCl3 valve closed
11/18/2011	2:56:38 PM	PH3 valve closed
11/18/2011	2:56:38 PM	SiCl4 pre valve closed
11/18/2011	2:56:38 PM	SiCl4 post valve closed
11/18/2011	2:56:38 PM	Bypass valve closed
11/18/2011	2:56:38 PM	Bubbler valve closed
11/18/2011	2:56:38 PM	Helium valve opened
11/18/2011	2:56:38 PM	Main Vac valve opened
11/18/2011	2:56:38 PM	Helium MFC set to  20.000000
11/18/2011	2:56:38 PM	H2 MFC set to  0.000000
11/18/2011	2:56:38 PM	BCl3 MFC set to  0.000000
11/18/2011	2:56:38 PM	PHl3 MFC set to  0.000000
11/18/2011	2:56:38 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:56:38 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:56:38 PM	Tube furnace set to 150
11/18/2011	2:57:08 PM	Helium valve closed
11/18/2011	2:57:08 PM	H2 valve closed
11/18/2011	2:57:08 PM	BCl3 valve closed
11/18/2011	2:57:08 PM	PH3 valve closed
11/18/2011	2:57:08 PM	SiCl4 pre valve closed
11/18/2011	2:57:08 PM	SiCl4 post valve closed
11/18/2011	2:57:08 PM	Bypass valve closed
11/18/2011	2:57:08 PM	Bubbler valve closed
11/18/2011	2:57:08 PM	Main Vac valve opened
11/18/2011	2:57:08 PM	Helium MFC set to  0.000000
11/18/2011	2:57:08 PM	H2 MFC set to  0.000000
11/18/2011	2:57:08 PM	BCl3 MFC set to  0.000000
11/18/2011	2:57:08 PM	PHl3 MFC set to  0.000000
11/18/2011	2:57:08 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:57:08 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:57:08 PM	Tube furnace set to 150
11/18/2011	2:57:38 PM	H2 valve closed
11/18/2011	2:57:38 PM	BCl3 valve closed
11/18/2011	2:57:38 PM	PH3 valve closed
11/18/2011	2:57:38 PM	SiCl4 pre valve closed
11/18/2011	2:57:38 PM	SiCl4 post valve closed
11/18/2011	2:57:38 PM	Bypass valve closed
11/18/2011	2:57:38 PM	Bubbler valve closed
11/18/2011	2:57:38 PM	Helium valve opened
11/18/2011	2:57:38 PM	Main Vac valve opened
11/18/2011	2:57:38 PM	Helium MFC set to  20.000000
11/18/2011	2:57:38 PM	H2 MFC set to  0.000000
11/18/2011	2:57:38 PM	BCl3 MFC set to  0.000000
11/18/2011	2:57:38 PM	PHl3 MFC set to  0.000000
11/18/2011	2:57:38 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:57:38 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:57:39 PM	Tube furnace set to 150
11/18/2011	2:58:09 PM	Helium valve closed
11/18/2011	2:58:09 PM	H2 valve closed
11/18/2011	2:58:09 PM	BCl3 valve closed
11/18/2011	2:58:09 PM	PH3 valve closed
11/18/2011	2:58:09 PM	SiCl4 pre valve closed
11/18/2011	2:58:09 PM	SiCl4 post valve closed
11/18/2011	2:58:09 PM	Bypass valve closed
11/18/2011	2:58:09 PM	Bubbler valve closed
11/18/2011	2:58:09 PM	Main Vac valve opened
11/18/2011	2:58:09 PM	Helium MFC set to  0.000000
11/18/2011	2:58:09 PM	H2 MFC set to  0.000000
11/18/2011	2:58:09 PM	BCl3 MFC set to  0.000000
11/18/2011	2:58:09 PM	PHl3 MFC set to  0.000000
11/18/2011	2:58:09 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:58:09 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:58:09 PM	Tube furnace set to 150
11/18/2011	2:58:39 PM	H2 valve closed
11/18/2011	2:58:39 PM	BCl3 valve closed
11/18/2011	2:58:39 PM	PH3 valve closed
11/18/2011	2:58:39 PM	SiCl4 pre valve closed
11/18/2011	2:58:39 PM	SiCl4 post valve closed
11/18/2011	2:58:39 PM	Bypass valve closed
11/18/2011	2:58:39 PM	Bubbler valve closed
11/18/2011	2:58:39 PM	Helium valve opened
11/18/2011	2:58:39 PM	Main Vac valve opened
11/18/2011	2:58:39 PM	Helium MFC set to  20.000000
11/18/2011	2:58:39 PM	H2 MFC set to  0.000000
11/18/2011	2:58:39 PM	BCl3 MFC set to  0.000000
11/18/2011	2:58:39 PM	PHl3 MFC set to  0.000000
11/18/2011	2:58:39 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:58:39 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:58:39 PM	Tube furnace set to 150
11/18/2011	2:59:09 PM	Helium valve closed
11/18/2011	2:59:09 PM	H2 valve closed
11/18/2011	2:59:09 PM	BCl3 valve closed
11/18/2011	2:59:09 PM	PH3 valve closed
11/18/2011	2:59:09 PM	SiCl4 pre valve closed
11/18/2011	2:59:09 PM	SiCl4 post valve closed
11/18/2011	2:59:09 PM	Bypass valve closed
11/18/2011	2:59:09 PM	Bubbler valve closed
11/18/2011	2:59:09 PM	Main Vac valve opened
11/18/2011	2:59:09 PM	Helium MFC set to  0.000000
11/18/2011	2:59:09 PM	H2 MFC set to  0.000000
11/18/2011	2:59:09 PM	BCl3 MFC set to  0.000000
11/18/2011	2:59:09 PM	PHl3 MFC set to  0.000000
11/18/2011	2:59:09 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:59:09 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	2:59:09 PM	Tube furnace set to 150
11/18/2011	2:59:16 PM	Run aborted at 2:59 PM
11/18/2011	2:59:16 PM	Helium valve closed
11/18/2011	2:59:16 PM	H2 valve closed
11/18/2011	2:59:16 PM	BCl3 valve closed
11/18/2011	2:59:16 PM	PH3 valve closed
11/18/2011	2:59:16 PM	SiCl4 pre valve closed
11/18/2011	2:59:16 PM	SiCl4 post valve closed
11/18/2011	2:59:16 PM	Bypass valve closed
11/18/2011	2:59:16 PM	Main Vac valve closed
11/18/2011	2:59:16 PM	Bubbler valve closed
11/18/2011	2:59:16 PM	Helium MFC set to  0.000000
11/18/2011	2:59:16 PM	H2 MFC set to  0.000000
11/18/2011	2:59:16 PM	BCl3 MFC set to  0.000000
11/18/2011	2:59:16 PM	PHl3 MFC set to  0.000000
11/18/2011	2:59:16 PM	SiCl4 MFC set to  0.000000
11/18/2011	2:59:16 PM	Tube furnace set to 0
11/18/2011	2:59:18 PM	Main Vac valve opened
11/18/2011	3:00:37 PM	Main Vac valve closed
11/18/2011	3:00:50 PM	Main Vac valve opened
11/18/2011	3:01:23 PM	Recipe started at 3:01 PM
11/18/2011	3:01:23 PM	H2 valve closed
11/18/2011	3:01:23 PM	BCl3 valve closed
11/18/2011	3:01:23 PM	PH3 valve closed
11/18/2011	3:01:23 PM	SiCl4 pre valve closed
11/18/2011	3:01:23 PM	SiCl4 post valve closed
11/18/2011	3:01:23 PM	Main Vac valve closed
11/18/2011	3:01:23 PM	Bypass valve closed
11/18/2011	3:01:23 PM	Bubbler valve closed
11/18/2011	3:01:23 PM	Helium valve opened
11/18/2011	3:01:23 PM	Helium MFC set to  0.000000
11/18/2011	3:01:23 PM	H2 MFC set to  0.000000
11/18/2011	3:01:23 PM	BCl3 MFC set to  0.000000
11/18/2011	3:01:23 PM	PHl3 MFC set to  0.000000
11/18/2011	3:01:23 PM	SiCl4 MFC set to  0.000000
11/18/2011	3:01:23 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	3:01:24 PM	Tube furnace set to 0
11/18/2011	3:01:27 PM	Helium valve closed
11/18/2011	3:01:27 PM	BCl3 valve closed
11/18/2011	3:01:27 PM	PH3 valve closed
11/18/2011	3:01:27 PM	SiCl4 pre valve closed
11/18/2011	3:01:27 PM	SiCl4 post valve closed
11/18/2011	3:01:27 PM	Main Vac valve closed
11/18/2011	3:01:27 PM	Bypass valve closed
11/18/2011	3:01:27 PM	Bubbler valve closed
11/18/2011	3:01:27 PM	H2 valve opened
11/18/2011	3:01:27 PM	Helium MFC set to  0.000000
11/18/2011	3:01:27 PM	H2 MFC set to  500.000000
11/18/2011	3:01:27 PM	BCl3 MFC set to  0.000000
11/18/2011	3:01:27 PM	PHl3 MFC set to  0.000000
11/18/2011	3:01:27 PM	SiCl4 MFC set to  0.000000
11/18/2011	3:01:27 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	3:01:27 PM	Tube furnace set to 50
11/18/2011	3:02:29 PM	Helium valve closed
11/18/2011	3:02:29 PM	BCl3 valve closed
11/18/2011	3:02:29 PM	PH3 valve closed
11/18/2011	3:02:29 PM	SiCl4 pre valve closed
11/18/2011	3:02:29 PM	SiCl4 post valve closed
11/18/2011	3:02:29 PM	Main Vac valve closed
11/18/2011	3:02:29 PM	Bypass valve closed
11/18/2011	3:02:29 PM	H2 valve opened
11/18/2011	3:02:29 PM	Bubbler valve opened
11/18/2011	3:02:29 PM	Helium MFC set to  0.000000
11/18/2011	3:02:29 PM	H2 MFC set to  500.000000
11/18/2011	3:02:29 PM	BCl3 MFC set to  0.000000
11/18/2011	3:02:29 PM	PHl3 MFC set to  0.000000
11/18/2011	3:02:29 PM	SiCl4 MFC set to  0.000000
11/18/2011	3:02:29 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	3:02:29 PM	Tube furnace set to 50
11/18/2011	3:02:30 PM	Helium valve closed
11/18/2011	3:02:30 PM	BCl3 valve closed
11/18/2011	3:02:30 PM	PH3 valve closed
11/18/2011	3:02:30 PM	SiCl4 pre valve closed
11/18/2011	3:02:30 PM	SiCl4 post valve closed
11/18/2011	3:02:30 PM	Main Vac valve closed
11/18/2011	3:02:30 PM	Bypass valve closed
11/18/2011	3:02:30 PM	H2 valve opened
11/18/2011	3:02:30 PM	Bubbler valve opened
11/18/2011	3:02:30 PM	Helium MFC set to  0.000000
11/18/2011	3:02:30 PM	H2 MFC set to  495.000000
11/18/2011	3:02:30 PM	BCl3 MFC set to  0.000000
11/18/2011	3:02:30 PM	PHl3 MFC set to  0.000000
11/18/2011	3:02:30 PM	SiCl4 MFC set to  0.000000
11/18/2011	3:02:30 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	3:02:30 PM	Tube furnace set to 1000
11/18/2011	3:25:30 PM	Helium valve closed
11/18/2011	3:25:30 PM	BCl3 valve closed
11/18/2011	3:25:30 PM	PH3 valve closed
11/18/2011	3:25:30 PM	Main Vac valve closed
11/18/2011	3:25:30 PM	Bypass valve closed
11/18/2011	3:25:30 PM	H2 valve opened
11/18/2011	3:25:30 PM	SiCl4 pre valve opened
11/18/2011	3:25:30 PM	SiCl4 post valve opened
11/18/2011	3:25:30 PM	Bubbler valve opened
11/18/2011	3:25:30 PM	Helium MFC set to  0.000000
11/18/2011	3:25:30 PM	H2 MFC set to  495.000000
11/18/2011	3:25:30 PM	BCl3 MFC set to  0.000000
11/18/2011	3:25:30 PM	PHl3 MFC set to  0.000000
11/18/2011	3:25:30 PM	SiCl4 MFC set to  25.000000
11/18/2011	3:25:30 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	3:25:31 PM	Tube furnace set to 1000
11/18/2011	3:50:31 PM	Helium valve closed
11/18/2011	3:50:31 PM	BCl3 valve closed
11/18/2011	3:50:31 PM	PH3 valve closed
11/18/2011	3:50:31 PM	SiCl4 pre valve closed
11/18/2011	3:50:31 PM	SiCl4 post valve closed
11/18/2011	3:50:31 PM	Main Vac valve closed
11/18/2011	3:50:31 PM	Bypass valve closed
11/18/2011	3:50:31 PM	H2 valve opened
11/18/2011	3:50:31 PM	Bubbler valve opened
11/18/2011	3:50:31 PM	Helium MFC set to  0.000000
11/18/2011	3:50:31 PM	H2 MFC set to  480.000000
11/18/2011	3:50:31 PM	BCl3 MFC set to  0.000000
11/18/2011	3:50:31 PM	PHl3 MFC set to  0.000000
11/18/2011	3:50:31 PM	SiCl4 MFC set to  0.000000
11/18/2011	3:50:31 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	3:50:31 PM	Tube furnace set to 750
11/18/2011	4:00:31 PM	H2 valve closed
11/18/2011	4:00:31 PM	BCl3 valve closed
11/18/2011	4:00:31 PM	PH3 valve closed
11/18/2011	4:00:31 PM	SiCl4 pre valve closed
11/18/2011	4:00:31 PM	SiCl4 post valve closed
11/18/2011	4:00:31 PM	Main Vac valve closed
11/18/2011	4:00:31 PM	Bypass valve closed
11/18/2011	4:00:31 PM	Helium valve opened
11/18/2011	4:00:31 PM	Bubbler valve opened
11/18/2011	4:00:31 PM	Helium MFC set to  400.000000
11/18/2011	4:00:31 PM	H2 MFC set to  0.000000
11/18/2011	4:00:31 PM	BCl3 MFC set to  0.000000
11/18/2011	4:00:31 PM	PHl3 MFC set to  0.000000
11/18/2011	4:00:31 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:00:31 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:00:31 PM	Tube furnace set to 0
11/18/2011	4:05:17 PM	Run aborted at 4:05 PM
11/18/2011	4:05:17 PM	Helium valve closed
11/18/2011	4:05:17 PM	H2 valve closed
11/18/2011	4:05:17 PM	BCl3 valve closed
11/18/2011	4:05:17 PM	PH3 valve closed
11/18/2011	4:05:17 PM	SiCl4 pre valve closed
11/18/2011	4:05:17 PM	SiCl4 post valve closed
11/18/2011	4:05:17 PM	Bypass valve closed
11/18/2011	4:05:17 PM	Main Vac valve closed
11/18/2011	4:05:17 PM	Bubbler valve closed
11/18/2011	4:05:17 PM	Helium MFC set to  0.000000
11/18/2011	4:05:17 PM	H2 MFC set to  0.000000
11/18/2011	4:05:17 PM	BCl3 MFC set to  0.000000
11/18/2011	4:05:17 PM	PHl3 MFC set to  0.000000
11/18/2011	4:05:17 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:05:17 PM	Tube furnace set to 0
11/18/2011	4:06:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/18/2011	4:06:05 PM	Recipe started at 4:06 PM
11/18/2011	4:06:05 PM	Helium valve closed
11/18/2011	4:06:05 PM	H2 valve closed
11/18/2011	4:06:05 PM	BCl3 valve closed
11/18/2011	4:06:05 PM	PH3 valve closed
11/18/2011	4:06:05 PM	SiCl4 pre valve closed
11/18/2011	4:06:05 PM	SiCl4 post valve closed
11/18/2011	4:06:05 PM	Main Vac valve closed
11/18/2011	4:06:05 PM	Bypass valve closed
11/18/2011	4:06:05 PM	Bubbler valve closed
11/18/2011	4:06:05 PM	Helium MFC set to  0.000000
11/18/2011	4:06:05 PM	H2 MFC set to  0.000000
11/18/2011	4:06:05 PM	BCl3 MFC set to  0.000000
11/18/2011	4:06:05 PM	PHl3 MFC set to  0.000000
11/18/2011	4:06:05 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:06:05 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:06:05 PM	Tube furnace set to 0
11/18/2011	4:06:08 PM	H2 valve closed
11/18/2011	4:06:08 PM	BCl3 valve closed
11/18/2011	4:06:08 PM	PH3 valve closed
11/18/2011	4:06:08 PM	SiCl4 pre valve closed
11/18/2011	4:06:08 PM	SiCl4 post valve closed
11/18/2011	4:06:08 PM	Main Vac valve closed
11/18/2011	4:06:08 PM	Bypass valve closed
11/18/2011	4:06:08 PM	Bubbler valve closed
11/18/2011	4:06:08 PM	Helium valve opened
11/18/2011	4:06:08 PM	Helium MFC set to  500.000000
11/18/2011	4:06:08 PM	H2 MFC set to  0.000000
11/18/2011	4:06:08 PM	BCl3 MFC set to  0.000000
11/18/2011	4:06:08 PM	PHl3 MFC set to  0.000000
11/18/2011	4:06:08 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:06:08 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:06:08 PM	Tube furnace set to 0
11/18/2011	4:06:08 PM	Helium valve closed
11/18/2011	4:06:08 PM	H2 valve closed
11/18/2011	4:06:08 PM	BCl3 valve closed
11/18/2011	4:06:08 PM	PH3 valve closed
11/18/2011	4:06:08 PM	SiCl4 pre valve closed
11/18/2011	4:06:08 PM	SiCl4 post valve closed
11/18/2011	4:06:08 PM	Main Vac valve closed
11/18/2011	4:06:08 PM	Bypass valve closed
11/18/2011	4:06:08 PM	Bubbler valve closed
11/18/2011	4:06:08 PM	Helium MFC set to  0.000000
11/18/2011	4:06:08 PM	H2 MFC set to  0.000000
11/18/2011	4:06:08 PM	BCl3 MFC set to  0.000000
11/18/2011	4:06:08 PM	PHl3 MFC set to  0.000000
11/18/2011	4:06:08 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:06:08 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:06:08 PM	Tube furnace set to 0
11/18/2011	4:06:09 PM	Run finished at 4:06 PM
11/18/2011	4:06:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/18/2011	4:11:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/18/2011	4:11:27 PM	Recipe started at 4:11 PM
11/18/2011	4:11:27 PM	Helium valve closed
11/18/2011	4:11:27 PM	H2 valve closed
11/18/2011	4:11:27 PM	BCl3 valve closed
11/18/2011	4:11:27 PM	PH3 valve closed
11/18/2011	4:11:27 PM	SiCl4 pre valve closed
11/18/2011	4:11:27 PM	SiCl4 post valve closed
11/18/2011	4:11:27 PM	Main Vac valve closed
11/18/2011	4:11:27 PM	Bubbler valve closed
11/18/2011	4:11:27 PM	Bypass valve opened
11/18/2011	4:11:27 PM	Helium MFC set to  0.000000
11/18/2011	4:11:27 PM	H2 MFC set to  0.000000
11/18/2011	4:11:27 PM	BCl3 MFC set to  0.000000
11/18/2011	4:11:27 PM	PHl3 MFC set to  0.000000
11/18/2011	4:11:27 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:11:27 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:11:28 PM	Tube furnace set to 0
11/18/2011	4:12:30 PM	Helium valve closed
11/18/2011	4:12:30 PM	H2 valve closed
11/18/2011	4:12:30 PM	BCl3 valve closed
11/18/2011	4:12:30 PM	PH3 valve closed
11/18/2011	4:12:30 PM	SiCl4 pre valve closed
11/18/2011	4:12:30 PM	SiCl4 post valve closed
11/18/2011	4:12:30 PM	Main Vac valve closed
11/18/2011	4:12:30 PM	Bubbler valve closed
11/18/2011	4:12:30 PM	Bypass valve opened
11/18/2011	4:12:30 PM	Helium MFC set to  0.000000
11/18/2011	4:12:30 PM	H2 MFC set to  0.000000
11/18/2011	4:12:30 PM	BCl3 MFC set to  0.000000
11/18/2011	4:12:30 PM	PHl3 MFC set to  0.000000
11/18/2011	4:12:30 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:12:30 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:12:30 PM	Tube furnace set to 0
11/18/2011	4:13:30 PM	Helium valve closed
11/18/2011	4:13:30 PM	H2 valve closed
11/18/2011	4:13:30 PM	BCl3 valve closed
11/18/2011	4:13:30 PM	PH3 valve closed
11/18/2011	4:13:30 PM	SiCl4 pre valve closed
11/18/2011	4:13:30 PM	SiCl4 post valve closed
11/18/2011	4:13:30 PM	Bypass valve closed
11/18/2011	4:13:30 PM	Bubbler valve closed
11/18/2011	4:13:30 PM	Main Vac valve opened
11/18/2011	4:13:30 PM	Helium MFC set to  0.000000
11/18/2011	4:13:30 PM	H2 MFC set to  0.000000
11/18/2011	4:13:30 PM	BCl3 MFC set to  0.000000
11/18/2011	4:13:30 PM	PHl3 MFC set to  0.000000
11/18/2011	4:13:30 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:13:30 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:13:30 PM	Tube furnace set to 0
11/18/2011	4:13:31 PM	Run finished at 4:13 PM
11/18/2011	4:13:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/18/2011	4:40:11 PM	Recipe started at 4:39 PM
11/18/2011	4:40:11 PM	Helium valve closed
11/18/2011	4:40:11 PM	H2 valve closed
11/18/2011	4:40:11 PM	BCl3 valve closed
11/18/2011	4:40:11 PM	PH3 valve closed
11/18/2011	4:40:11 PM	SiCl4 pre valve closed
11/18/2011	4:40:11 PM	SiCl4 post valve closed
11/18/2011	4:40:11 PM	Main Vac valve closed
11/18/2011	4:40:11 PM	Bubbler valve closed
11/18/2011	4:40:11 PM	Bypass valve opened
11/18/2011	4:40:11 PM	Helium MFC set to  0.000000
11/18/2011	4:40:11 PM	H2 MFC set to  0.000000
11/18/2011	4:40:11 PM	BCl3 MFC set to  0.000000
11/18/2011	4:40:11 PM	PHl3 MFC set to  0.000000
11/18/2011	4:40:11 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:40:11 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:40:11 PM	Tube furnace set to 180
11/18/2011	4:40:13 PM	Helium valve closed
11/18/2011	4:40:13 PM	H2 valve closed
11/18/2011	4:40:13 PM	BCl3 valve closed
11/18/2011	4:40:13 PM	PH3 valve closed
11/18/2011	4:40:13 PM	SiCl4 pre valve closed
11/18/2011	4:40:13 PM	SiCl4 post valve closed
11/18/2011	4:40:13 PM	Main Vac valve closed
11/18/2011	4:40:13 PM	Bubbler valve closed
11/18/2011	4:40:13 PM	Bypass valve opened
11/18/2011	4:40:13 PM	Helium MFC set to  0.000000
11/18/2011	4:40:13 PM	H2 MFC set to  0.000000
11/18/2011	4:40:13 PM	BCl3 MFC set to  0.000000
11/18/2011	4:40:13 PM	PHl3 MFC set to  0.000000
11/18/2011	4:40:13 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:40:13 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:40:13 PM	Tube furnace set to 150
11/18/2011	4:40:43 PM	Helium valve closed
11/18/2011	4:40:43 PM	H2 valve closed
11/18/2011	4:40:43 PM	BCl3 valve closed
11/18/2011	4:40:43 PM	PH3 valve closed
11/18/2011	4:40:43 PM	SiCl4 pre valve closed
11/18/2011	4:40:43 PM	SiCl4 post valve closed
11/18/2011	4:40:43 PM	Bypass valve closed
11/18/2011	4:40:43 PM	Bubbler valve closed
11/18/2011	4:40:43 PM	Main Vac valve opened
11/18/2011	4:40:43 PM	Helium MFC set to  0.000000
11/18/2011	4:40:43 PM	H2 MFC set to  0.000000
11/18/2011	4:40:43 PM	BCl3 MFC set to  0.000000
11/18/2011	4:40:43 PM	PHl3 MFC set to  0.000000
11/18/2011	4:40:43 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:40:43 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:40:43 PM	Tube furnace set to 180
11/18/2011	4:41:13 PM	H2 valve closed
11/18/2011	4:41:13 PM	BCl3 valve closed
11/18/2011	4:41:13 PM	PH3 valve closed
11/18/2011	4:41:13 PM	SiCl4 pre valve closed
11/18/2011	4:41:13 PM	SiCl4 post valve closed
11/18/2011	4:41:13 PM	Bypass valve closed
11/18/2011	4:41:13 PM	Bubbler valve closed
11/18/2011	4:41:13 PM	Helium valve opened
11/18/2011	4:41:13 PM	Main Vac valve opened
11/18/2011	4:41:13 PM	Helium MFC set to  20.000000
11/18/2011	4:41:13 PM	H2 MFC set to  0.000000
11/18/2011	4:41:13 PM	BCl3 MFC set to  0.000000
11/18/2011	4:41:13 PM	PHl3 MFC set to  0.000000
11/18/2011	4:41:13 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:41:13 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:41:13 PM	Tube furnace set to 180
11/18/2011	4:41:43 PM	Helium valve closed
11/18/2011	4:41:43 PM	H2 valve closed
11/18/2011	4:41:43 PM	BCl3 valve closed
11/18/2011	4:41:43 PM	PH3 valve closed
11/18/2011	4:41:43 PM	SiCl4 pre valve closed
11/18/2011	4:41:43 PM	SiCl4 post valve closed
11/18/2011	4:41:43 PM	Bypass valve closed
11/18/2011	4:41:43 PM	Bubbler valve closed
11/18/2011	4:41:43 PM	Main Vac valve opened
11/18/2011	4:41:43 PM	Helium MFC set to  0.000000
11/18/2011	4:41:43 PM	H2 MFC set to  0.000000
11/18/2011	4:41:43 PM	BCl3 MFC set to  0.000000
11/18/2011	4:41:43 PM	PHl3 MFC set to  0.000000
11/18/2011	4:41:43 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:41:43 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:41:43 PM	Tube furnace set to 150
11/18/2011	4:42:13 PM	H2 valve closed
11/18/2011	4:42:13 PM	BCl3 valve closed
11/18/2011	4:42:13 PM	PH3 valve closed
11/18/2011	4:42:13 PM	SiCl4 pre valve closed
11/18/2011	4:42:13 PM	SiCl4 post valve closed
11/18/2011	4:42:13 PM	Bypass valve closed
11/18/2011	4:42:13 PM	Bubbler valve closed
11/18/2011	4:42:13 PM	Helium valve opened
11/18/2011	4:42:13 PM	Main Vac valve opened
11/18/2011	4:42:13 PM	Helium MFC set to  20.000000
11/18/2011	4:42:13 PM	H2 MFC set to  0.000000
11/18/2011	4:42:13 PM	BCl3 MFC set to  0.000000
11/18/2011	4:42:13 PM	PHl3 MFC set to  0.000000
11/18/2011	4:42:13 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:42:13 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:42:14 PM	Tube furnace set to 180
11/18/2011	4:42:44 PM	Helium valve closed
11/18/2011	4:42:44 PM	H2 valve closed
11/18/2011	4:42:44 PM	BCl3 valve closed
11/18/2011	4:42:44 PM	PH3 valve closed
11/18/2011	4:42:44 PM	SiCl4 pre valve closed
11/18/2011	4:42:44 PM	SiCl4 post valve closed
11/18/2011	4:42:44 PM	Bypass valve closed
11/18/2011	4:42:44 PM	Bubbler valve closed
11/18/2011	4:42:44 PM	Main Vac valve opened
11/18/2011	4:42:44 PM	Helium MFC set to  0.000000
11/18/2011	4:42:44 PM	H2 MFC set to  0.000000
11/18/2011	4:42:44 PM	BCl3 MFC set to  0.000000
11/18/2011	4:42:44 PM	PHl3 MFC set to  0.000000
11/18/2011	4:42:44 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:42:44 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:42:44 PM	Tube furnace set to 150
11/18/2011	4:43:14 PM	H2 valve closed
11/18/2011	4:43:14 PM	BCl3 valve closed
11/18/2011	4:43:14 PM	PH3 valve closed
11/18/2011	4:43:14 PM	SiCl4 pre valve closed
11/18/2011	4:43:14 PM	SiCl4 post valve closed
11/18/2011	4:43:14 PM	Bypass valve closed
11/18/2011	4:43:14 PM	Bubbler valve closed
11/18/2011	4:43:14 PM	Helium valve opened
11/18/2011	4:43:14 PM	Main Vac valve opened
11/18/2011	4:43:14 PM	Helium MFC set to  20.000000
11/18/2011	4:43:14 PM	H2 MFC set to  0.000000
11/18/2011	4:43:14 PM	BCl3 MFC set to  0.000000
11/18/2011	4:43:14 PM	PHl3 MFC set to  0.000000
11/18/2011	4:43:14 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:43:14 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:43:14 PM	Tube furnace set to 150
11/18/2011	4:43:44 PM	Helium valve closed
11/18/2011	4:43:44 PM	H2 valve closed
11/18/2011	4:43:44 PM	BCl3 valve closed
11/18/2011	4:43:44 PM	PH3 valve closed
11/18/2011	4:43:44 PM	SiCl4 pre valve closed
11/18/2011	4:43:44 PM	SiCl4 post valve closed
11/18/2011	4:43:44 PM	Bypass valve closed
11/18/2011	4:43:44 PM	Bubbler valve closed
11/18/2011	4:43:44 PM	Main Vac valve opened
11/18/2011	4:43:44 PM	Helium MFC set to  0.000000
11/18/2011	4:43:44 PM	H2 MFC set to  0.000000
11/18/2011	4:43:44 PM	BCl3 MFC set to  0.000000
11/18/2011	4:43:44 PM	PHl3 MFC set to  0.000000
11/18/2011	4:43:44 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:43:44 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:43:44 PM	Tube furnace set to 150
11/18/2011	4:44:14 PM	H2 valve closed
11/18/2011	4:44:14 PM	BCl3 valve closed
11/18/2011	4:44:14 PM	PH3 valve closed
11/18/2011	4:44:14 PM	SiCl4 pre valve closed
11/18/2011	4:44:14 PM	SiCl4 post valve closed
11/18/2011	4:44:14 PM	Bypass valve closed
11/18/2011	4:44:14 PM	Bubbler valve closed
11/18/2011	4:44:14 PM	Helium valve opened
11/18/2011	4:44:14 PM	Main Vac valve opened
11/18/2011	4:44:14 PM	Helium MFC set to  20.000000
11/18/2011	4:44:14 PM	H2 MFC set to  0.000000
11/18/2011	4:44:14 PM	BCl3 MFC set to  0.000000
11/18/2011	4:44:14 PM	PHl3 MFC set to  0.000000
11/18/2011	4:44:14 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:44:14 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:44:14 PM	Tube furnace set to 180
11/18/2011	4:44:44 PM	Helium valve closed
11/18/2011	4:44:44 PM	H2 valve closed
11/18/2011	4:44:44 PM	BCl3 valve closed
11/18/2011	4:44:44 PM	PH3 valve closed
11/18/2011	4:44:44 PM	SiCl4 pre valve closed
11/18/2011	4:44:44 PM	SiCl4 post valve closed
11/18/2011	4:44:44 PM	Bypass valve closed
11/18/2011	4:44:44 PM	Bubbler valve closed
11/18/2011	4:44:44 PM	Main Vac valve opened
11/18/2011	4:44:44 PM	Helium MFC set to  0.000000
11/18/2011	4:44:44 PM	H2 MFC set to  0.000000
11/18/2011	4:44:44 PM	BCl3 MFC set to  0.000000
11/18/2011	4:44:44 PM	PHl3 MFC set to  0.000000
11/18/2011	4:44:44 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:44:44 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:44:45 PM	Tube furnace set to 150
11/18/2011	4:45:15 PM	H2 valve closed
11/18/2011	4:45:15 PM	BCl3 valve closed
11/18/2011	4:45:15 PM	PH3 valve closed
11/18/2011	4:45:15 PM	SiCl4 pre valve closed
11/18/2011	4:45:15 PM	SiCl4 post valve closed
11/18/2011	4:45:15 PM	Bypass valve closed
11/18/2011	4:45:15 PM	Bubbler valve closed
11/18/2011	4:45:15 PM	Helium valve opened
11/18/2011	4:45:15 PM	Main Vac valve opened
11/18/2011	4:45:15 PM	Helium MFC set to  20.000000
11/18/2011	4:45:15 PM	H2 MFC set to  0.000000
11/18/2011	4:45:15 PM	BCl3 MFC set to  0.000000
11/18/2011	4:45:15 PM	PHl3 MFC set to  0.000000
11/18/2011	4:45:15 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:45:15 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:45:15 PM	Tube furnace set to 150
11/18/2011	4:45:45 PM	Helium valve closed
11/18/2011	4:45:45 PM	H2 valve closed
11/18/2011	4:45:45 PM	BCl3 valve closed
11/18/2011	4:45:45 PM	PH3 valve closed
11/18/2011	4:45:45 PM	SiCl4 pre valve closed
11/18/2011	4:45:45 PM	SiCl4 post valve closed
11/18/2011	4:45:45 PM	Bypass valve closed
11/18/2011	4:45:45 PM	Bubbler valve closed
11/18/2011	4:45:45 PM	Main Vac valve opened
11/18/2011	4:45:45 PM	Helium MFC set to  0.000000
11/18/2011	4:45:45 PM	H2 MFC set to  0.000000
11/18/2011	4:45:45 PM	BCl3 MFC set to  0.000000
11/18/2011	4:45:45 PM	PHl3 MFC set to  0.000000
11/18/2011	4:45:45 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:45:45 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:45:45 PM	Tube furnace set to 150
11/18/2011	4:46:15 PM	H2 valve closed
11/18/2011	4:46:15 PM	BCl3 valve closed
11/18/2011	4:46:15 PM	PH3 valve closed
11/18/2011	4:46:15 PM	SiCl4 pre valve closed
11/18/2011	4:46:15 PM	SiCl4 post valve closed
11/18/2011	4:46:15 PM	Bypass valve closed
11/18/2011	4:46:15 PM	Bubbler valve closed
11/18/2011	4:46:15 PM	Helium valve opened
11/18/2011	4:46:15 PM	Main Vac valve opened
11/18/2011	4:46:15 PM	Helium MFC set to  20.000000
11/18/2011	4:46:15 PM	H2 MFC set to  0.000000
11/18/2011	4:46:15 PM	BCl3 MFC set to  0.000000
11/18/2011	4:46:15 PM	PHl3 MFC set to  0.000000
11/18/2011	4:46:15 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:46:15 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:46:15 PM	Tube furnace set to 150
11/18/2011	4:46:45 PM	Helium valve closed
11/18/2011	4:46:45 PM	H2 valve closed
11/18/2011	4:46:45 PM	BCl3 valve closed
11/18/2011	4:46:45 PM	PH3 valve closed
11/18/2011	4:46:45 PM	SiCl4 pre valve closed
11/18/2011	4:46:45 PM	SiCl4 post valve closed
11/18/2011	4:46:45 PM	Bypass valve closed
11/18/2011	4:46:45 PM	Bubbler valve closed
11/18/2011	4:46:45 PM	Main Vac valve opened
11/18/2011	4:46:45 PM	Helium MFC set to  0.000000
11/18/2011	4:46:45 PM	H2 MFC set to  0.000000
11/18/2011	4:46:45 PM	BCl3 MFC set to  0.000000
11/18/2011	4:46:45 PM	PHl3 MFC set to  0.000000
11/18/2011	4:46:45 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:46:45 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:46:45 PM	Tube furnace set to 150
11/18/2011	4:47:15 PM	H2 valve closed
11/18/2011	4:47:16 PM	BCl3 valve closed
11/18/2011	4:47:16 PM	PH3 valve closed
11/18/2011	4:47:16 PM	SiCl4 pre valve closed
11/18/2011	4:47:16 PM	SiCl4 post valve closed
11/18/2011	4:47:16 PM	Bypass valve closed
11/18/2011	4:47:16 PM	Bubbler valve closed
11/18/2011	4:47:16 PM	Helium valve opened
11/18/2011	4:47:16 PM	Main Vac valve opened
11/18/2011	4:47:16 PM	Helium MFC set to  20.000000
11/18/2011	4:47:16 PM	H2 MFC set to  0.000000
11/18/2011	4:47:16 PM	BCl3 MFC set to  0.000000
11/18/2011	4:47:16 PM	PHl3 MFC set to  0.000000
11/18/2011	4:47:16 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:47:16 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:47:16 PM	Tube furnace set to 150
11/18/2011	4:47:46 PM	Helium valve closed
11/18/2011	4:47:46 PM	H2 valve closed
11/18/2011	4:47:46 PM	BCl3 valve closed
11/18/2011	4:47:46 PM	PH3 valve closed
11/18/2011	4:47:46 PM	SiCl4 pre valve closed
11/18/2011	4:47:46 PM	SiCl4 post valve closed
11/18/2011	4:47:46 PM	Bypass valve closed
11/18/2011	4:47:46 PM	Bubbler valve closed
11/18/2011	4:47:46 PM	Main Vac valve opened
11/18/2011	4:47:46 PM	Helium MFC set to  0.000000
11/18/2011	4:47:46 PM	H2 MFC set to  0.000000
11/18/2011	4:47:46 PM	BCl3 MFC set to  0.000000
11/18/2011	4:47:46 PM	PHl3 MFC set to  0.000000
11/18/2011	4:47:46 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:47:46 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:47:46 PM	Tube furnace set to 150
11/18/2011	4:48:16 PM	H2 valve closed
11/18/2011	4:48:16 PM	BCl3 valve closed
11/18/2011	4:48:16 PM	PH3 valve closed
11/18/2011	4:48:16 PM	SiCl4 pre valve closed
11/18/2011	4:48:16 PM	SiCl4 post valve closed
11/18/2011	4:48:16 PM	Bypass valve closed
11/18/2011	4:48:16 PM	Bubbler valve closed
11/18/2011	4:48:16 PM	Helium valve opened
11/18/2011	4:48:16 PM	Main Vac valve opened
11/18/2011	4:48:16 PM	Helium MFC set to  20.000000
11/18/2011	4:48:16 PM	H2 MFC set to  0.000000
11/18/2011	4:48:16 PM	BCl3 MFC set to  0.000000
11/18/2011	4:48:16 PM	PHl3 MFC set to  0.000000
11/18/2011	4:48:16 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:48:16 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:48:16 PM	Tube furnace set to 150
11/18/2011	4:48:46 PM	Helium valve closed
11/18/2011	4:48:46 PM	H2 valve closed
11/18/2011	4:48:46 PM	BCl3 valve closed
11/18/2011	4:48:46 PM	PH3 valve closed
11/18/2011	4:48:46 PM	SiCl4 pre valve closed
11/18/2011	4:48:46 PM	SiCl4 post valve closed
11/18/2011	4:48:46 PM	Bypass valve closed
11/18/2011	4:48:46 PM	Bubbler valve closed
11/18/2011	4:48:46 PM	Main Vac valve opened
11/18/2011	4:48:46 PM	Helium MFC set to  0.000000
11/18/2011	4:48:46 PM	H2 MFC set to  0.000000
11/18/2011	4:48:46 PM	BCl3 MFC set to  0.000000
11/18/2011	4:48:46 PM	PHl3 MFC set to  0.000000
11/18/2011	4:48:46 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:48:46 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:48:46 PM	Tube furnace set to 150
11/18/2011	4:49:16 PM	H2 valve closed
11/18/2011	4:49:16 PM	BCl3 valve closed
11/18/2011	4:49:16 PM	PH3 valve closed
11/18/2011	4:49:16 PM	SiCl4 pre valve closed
11/18/2011	4:49:16 PM	SiCl4 post valve closed
11/18/2011	4:49:16 PM	Bypass valve closed
11/18/2011	4:49:16 PM	Bubbler valve closed
11/18/2011	4:49:16 PM	Helium valve opened
11/18/2011	4:49:16 PM	Main Vac valve opened
11/18/2011	4:49:16 PM	Helium MFC set to  20.000000
11/18/2011	4:49:16 PM	H2 MFC set to  0.000000
11/18/2011	4:49:16 PM	BCl3 MFC set to  0.000000
11/18/2011	4:49:16 PM	PHl3 MFC set to  0.000000
11/18/2011	4:49:16 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:49:16 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:49:17 PM	Tube furnace set to 150
11/18/2011	4:49:47 PM	Helium valve closed
11/18/2011	4:49:47 PM	H2 valve closed
11/18/2011	4:49:47 PM	BCl3 valve closed
11/18/2011	4:49:47 PM	PH3 valve closed
11/18/2011	4:49:47 PM	SiCl4 pre valve closed
11/18/2011	4:49:47 PM	SiCl4 post valve closed
11/18/2011	4:49:47 PM	Bypass valve closed
11/18/2011	4:49:47 PM	Bubbler valve closed
11/18/2011	4:49:47 PM	Main Vac valve opened
11/18/2011	4:49:47 PM	Helium MFC set to  0.000000
11/18/2011	4:49:47 PM	H2 MFC set to  0.000000
11/18/2011	4:49:47 PM	BCl3 MFC set to  0.000000
11/18/2011	4:49:47 PM	PHl3 MFC set to  0.000000
11/18/2011	4:49:47 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:49:47 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:49:47 PM	Tube furnace set to 150
11/18/2011	4:50:17 PM	H2 valve closed
11/18/2011	4:50:17 PM	BCl3 valve closed
11/18/2011	4:50:17 PM	PH3 valve closed
11/18/2011	4:50:17 PM	SiCl4 pre valve closed
11/18/2011	4:50:17 PM	SiCl4 post valve closed
11/18/2011	4:50:17 PM	Bypass valve closed
11/18/2011	4:50:17 PM	Bubbler valve closed
11/18/2011	4:50:17 PM	Helium valve opened
11/18/2011	4:50:17 PM	Main Vac valve opened
11/18/2011	4:50:17 PM	Helium MFC set to  20.000000
11/18/2011	4:50:17 PM	H2 MFC set to  0.000000
11/18/2011	4:50:17 PM	BCl3 MFC set to  0.000000
11/18/2011	4:50:17 PM	PHl3 MFC set to  0.000000
11/18/2011	4:50:17 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:50:17 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:50:17 PM	Tube furnace set to 150
11/18/2011	4:50:47 PM	Helium valve closed
11/18/2011	4:50:47 PM	H2 valve closed
11/18/2011	4:50:47 PM	BCl3 valve closed
11/18/2011	4:50:47 PM	PH3 valve closed
11/18/2011	4:50:47 PM	SiCl4 pre valve closed
11/18/2011	4:50:47 PM	SiCl4 post valve closed
11/18/2011	4:50:47 PM	Bypass valve closed
11/18/2011	4:50:47 PM	Bubbler valve closed
11/18/2011	4:50:47 PM	Main Vac valve opened
11/18/2011	4:50:47 PM	Helium MFC set to  0.000000
11/18/2011	4:50:47 PM	H2 MFC set to  0.000000
11/18/2011	4:50:47 PM	BCl3 MFC set to  0.000000
11/18/2011	4:50:47 PM	PHl3 MFC set to  0.000000
11/18/2011	4:50:47 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:50:47 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:50:47 PM	Tube furnace set to 150
11/18/2011	4:51:17 PM	H2 valve closed
11/18/2011	4:51:17 PM	BCl3 valve closed
11/18/2011	4:51:17 PM	PH3 valve closed
11/18/2011	4:51:17 PM	SiCl4 pre valve closed
11/18/2011	4:51:17 PM	SiCl4 post valve closed
11/18/2011	4:51:17 PM	Bypass valve closed
11/18/2011	4:51:17 PM	Bubbler valve closed
11/18/2011	4:51:17 PM	Helium valve opened
11/18/2011	4:51:17 PM	Main Vac valve opened
11/18/2011	4:51:17 PM	Helium MFC set to  20.000000
11/18/2011	4:51:17 PM	H2 MFC set to  0.000000
11/18/2011	4:51:17 PM	BCl3 MFC set to  0.000000
11/18/2011	4:51:17 PM	PHl3 MFC set to  0.000000
11/18/2011	4:51:17 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:51:17 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:51:17 PM	Tube furnace set to 150
11/18/2011	4:51:47 PM	Helium valve closed
11/18/2011	4:51:47 PM	H2 valve closed
11/18/2011	4:51:47 PM	BCl3 valve closed
11/18/2011	4:51:47 PM	PH3 valve closed
11/18/2011	4:51:47 PM	SiCl4 pre valve closed
11/18/2011	4:51:47 PM	SiCl4 post valve closed
11/18/2011	4:51:47 PM	Bypass valve closed
11/18/2011	4:51:47 PM	Bubbler valve closed
11/18/2011	4:51:47 PM	Main Vac valve opened
11/18/2011	4:51:47 PM	Helium MFC set to  0.000000
11/18/2011	4:51:47 PM	H2 MFC set to  0.000000
11/18/2011	4:51:47 PM	BCl3 MFC set to  0.000000
11/18/2011	4:51:47 PM	PHl3 MFC set to  0.000000
11/18/2011	4:51:47 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:51:47 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:51:48 PM	Tube furnace set to 150
11/18/2011	4:52:18 PM	H2 valve closed
11/18/2011	4:52:18 PM	BCl3 valve closed
11/18/2011	4:52:18 PM	PH3 valve closed
11/18/2011	4:52:18 PM	SiCl4 pre valve closed
11/18/2011	4:52:18 PM	SiCl4 post valve closed
11/18/2011	4:52:18 PM	Bypass valve closed
11/18/2011	4:52:18 PM	Bubbler valve closed
11/18/2011	4:52:18 PM	Helium valve opened
11/18/2011	4:52:18 PM	Main Vac valve opened
11/18/2011	4:52:18 PM	Helium MFC set to  20.000000
11/18/2011	4:52:18 PM	H2 MFC set to  0.000000
11/18/2011	4:52:18 PM	BCl3 MFC set to  0.000000
11/18/2011	4:52:18 PM	PHl3 MFC set to  0.000000
11/18/2011	4:52:18 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:52:18 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:52:18 PM	Tube furnace set to 150
11/18/2011	4:52:48 PM	Helium valve closed
11/18/2011	4:52:48 PM	H2 valve closed
11/18/2011	4:52:48 PM	BCl3 valve closed
11/18/2011	4:52:48 PM	PH3 valve closed
11/18/2011	4:52:48 PM	SiCl4 pre valve closed
11/18/2011	4:52:48 PM	SiCl4 post valve closed
11/18/2011	4:52:48 PM	Bypass valve closed
11/18/2011	4:52:48 PM	Bubbler valve closed
11/18/2011	4:52:48 PM	Main Vac valve opened
11/18/2011	4:52:48 PM	Helium MFC set to  0.000000
11/18/2011	4:52:48 PM	H2 MFC set to  0.000000
11/18/2011	4:52:48 PM	BCl3 MFC set to  0.000000
11/18/2011	4:52:48 PM	PHl3 MFC set to  0.000000
11/18/2011	4:52:48 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:52:48 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:52:48 PM	Tube furnace set to 150
11/18/2011	4:53:18 PM	H2 valve closed
11/18/2011	4:53:18 PM	BCl3 valve closed
11/18/2011	4:53:18 PM	PH3 valve closed
11/18/2011	4:53:18 PM	SiCl4 pre valve closed
11/18/2011	4:53:18 PM	SiCl4 post valve closed
11/18/2011	4:53:18 PM	Bypass valve closed
11/18/2011	4:53:18 PM	Bubbler valve closed
11/18/2011	4:53:18 PM	Helium valve opened
11/18/2011	4:53:18 PM	Main Vac valve opened
11/18/2011	4:53:18 PM	Helium MFC set to  20.000000
11/18/2011	4:53:18 PM	H2 MFC set to  0.000000
11/18/2011	4:53:18 PM	BCl3 MFC set to  0.000000
11/18/2011	4:53:18 PM	PHl3 MFC set to  0.000000
11/18/2011	4:53:18 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:53:18 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:53:18 PM	Tube furnace set to 150
11/18/2011	4:53:48 PM	Helium valve closed
11/18/2011	4:53:48 PM	H2 valve closed
11/18/2011	4:53:48 PM	BCl3 valve closed
11/18/2011	4:53:48 PM	PH3 valve closed
11/18/2011	4:53:48 PM	SiCl4 pre valve closed
11/18/2011	4:53:48 PM	SiCl4 post valve closed
11/18/2011	4:53:48 PM	Bypass valve closed
11/18/2011	4:53:48 PM	Bubbler valve closed
11/18/2011	4:53:48 PM	Main Vac valve opened
11/18/2011	4:53:48 PM	Helium MFC set to  0.000000
11/18/2011	4:53:48 PM	H2 MFC set to  0.000000
11/18/2011	4:53:48 PM	BCl3 MFC set to  0.000000
11/18/2011	4:53:48 PM	PHl3 MFC set to  0.000000
11/18/2011	4:53:48 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:53:48 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:53:48 PM	Tube furnace set to 150
11/18/2011	4:54:19 PM	H2 valve closed
11/18/2011	4:54:19 PM	BCl3 valve closed
11/18/2011	4:54:19 PM	PH3 valve closed
11/18/2011	4:54:19 PM	SiCl4 pre valve closed
11/18/2011	4:54:19 PM	SiCl4 post valve closed
11/18/2011	4:54:19 PM	Bypass valve closed
11/18/2011	4:54:19 PM	Bubbler valve closed
11/18/2011	4:54:19 PM	Helium valve opened
11/18/2011	4:54:19 PM	Main Vac valve opened
11/18/2011	4:54:19 PM	Helium MFC set to  20.000000
11/18/2011	4:54:19 PM	H2 MFC set to  0.000000
11/18/2011	4:54:19 PM	BCl3 MFC set to  0.000000
11/18/2011	4:54:19 PM	PHl3 MFC set to  0.000000
11/18/2011	4:54:19 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:54:19 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:54:19 PM	Tube furnace set to 150
11/18/2011	4:54:49 PM	Helium valve closed
11/18/2011	4:54:49 PM	H2 valve closed
11/18/2011	4:54:49 PM	BCl3 valve closed
11/18/2011	4:54:49 PM	PH3 valve closed
11/18/2011	4:54:49 PM	SiCl4 pre valve closed
11/18/2011	4:54:49 PM	SiCl4 post valve closed
11/18/2011	4:54:49 PM	Bypass valve closed
11/18/2011	4:54:49 PM	Bubbler valve closed
11/18/2011	4:54:49 PM	Main Vac valve opened
11/18/2011	4:54:49 PM	Helium MFC set to  0.000000
11/18/2011	4:54:49 PM	H2 MFC set to  0.000000
11/18/2011	4:54:49 PM	BCl3 MFC set to  0.000000
11/18/2011	4:54:49 PM	PHl3 MFC set to  0.000000
11/18/2011	4:54:49 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:54:49 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:54:49 PM	Tube furnace set to 150
11/18/2011	4:55:19 PM	H2 valve closed
11/18/2011	4:55:19 PM	BCl3 valve closed
11/18/2011	4:55:19 PM	PH3 valve closed
11/18/2011	4:55:19 PM	SiCl4 pre valve closed
11/18/2011	4:55:19 PM	SiCl4 post valve closed
11/18/2011	4:55:19 PM	Bypass valve closed
11/18/2011	4:55:19 PM	Bubbler valve closed
11/18/2011	4:55:19 PM	Helium valve opened
11/18/2011	4:55:19 PM	Main Vac valve opened
11/18/2011	4:55:19 PM	Helium MFC set to  20.000000
11/18/2011	4:55:19 PM	H2 MFC set to  0.000000
11/18/2011	4:55:19 PM	BCl3 MFC set to  0.000000
11/18/2011	4:55:19 PM	PHl3 MFC set to  0.000000
11/18/2011	4:55:19 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:55:19 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:55:19 PM	Tube furnace set to 150
11/18/2011	4:55:49 PM	Helium valve closed
11/18/2011	4:55:49 PM	H2 valve closed
11/18/2011	4:55:49 PM	BCl3 valve closed
11/18/2011	4:55:49 PM	PH3 valve closed
11/18/2011	4:55:49 PM	SiCl4 pre valve closed
11/18/2011	4:55:49 PM	SiCl4 post valve closed
11/18/2011	4:55:49 PM	Bypass valve closed
11/18/2011	4:55:49 PM	Bubbler valve closed
11/18/2011	4:55:49 PM	Main Vac valve opened
11/18/2011	4:55:49 PM	Helium MFC set to  0.000000
11/18/2011	4:55:49 PM	H2 MFC set to  0.000000
11/18/2011	4:55:49 PM	BCl3 MFC set to  0.000000
11/18/2011	4:55:49 PM	PHl3 MFC set to  0.000000
11/18/2011	4:55:49 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:55:49 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:55:49 PM	Tube furnace set to 150
11/18/2011	4:56:19 PM	H2 valve closed
11/18/2011	4:56:19 PM	BCl3 valve closed
11/18/2011	4:56:19 PM	PH3 valve closed
11/18/2011	4:56:19 PM	SiCl4 pre valve closed
11/18/2011	4:56:19 PM	SiCl4 post valve closed
11/18/2011	4:56:19 PM	Bypass valve closed
11/18/2011	4:56:19 PM	Bubbler valve closed
11/18/2011	4:56:19 PM	Helium valve opened
11/18/2011	4:56:19 PM	Main Vac valve opened
11/18/2011	4:56:19 PM	Helium MFC set to  20.000000
11/18/2011	4:56:19 PM	H2 MFC set to  0.000000
11/18/2011	4:56:19 PM	BCl3 MFC set to  0.000000
11/18/2011	4:56:19 PM	PHl3 MFC set to  0.000000
11/18/2011	4:56:19 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:56:19 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:56:20 PM	Tube furnace set to 150
11/18/2011	4:56:50 PM	Helium valve closed
11/18/2011	4:56:50 PM	H2 valve closed
11/18/2011	4:56:50 PM	BCl3 valve closed
11/18/2011	4:56:50 PM	PH3 valve closed
11/18/2011	4:56:50 PM	SiCl4 pre valve closed
11/18/2011	4:56:50 PM	SiCl4 post valve closed
11/18/2011	4:56:50 PM	Bypass valve closed
11/18/2011	4:56:50 PM	Bubbler valve closed
11/18/2011	4:56:50 PM	Main Vac valve opened
11/18/2011	4:56:50 PM	Helium MFC set to  0.000000
11/18/2011	4:56:50 PM	H2 MFC set to  0.000000
11/18/2011	4:56:50 PM	BCl3 MFC set to  0.000000
11/18/2011	4:56:50 PM	PHl3 MFC set to  0.000000
11/18/2011	4:56:50 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:56:50 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:56:50 PM	Tube furnace set to 150
11/18/2011	4:57:20 PM	H2 valve closed
11/18/2011	4:57:20 PM	BCl3 valve closed
11/18/2011	4:57:20 PM	PH3 valve closed
11/18/2011	4:57:20 PM	SiCl4 pre valve closed
11/18/2011	4:57:20 PM	SiCl4 post valve closed
11/18/2011	4:57:20 PM	Bypass valve closed
11/18/2011	4:57:20 PM	Bubbler valve closed
11/18/2011	4:57:20 PM	Helium valve opened
11/18/2011	4:57:20 PM	Main Vac valve opened
11/18/2011	4:57:20 PM	Helium MFC set to  20.000000
11/18/2011	4:57:20 PM	H2 MFC set to  0.000000
11/18/2011	4:57:20 PM	BCl3 MFC set to  0.000000
11/18/2011	4:57:20 PM	PHl3 MFC set to  0.000000
11/18/2011	4:57:20 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:57:20 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:57:20 PM	Tube furnace set to 150
11/18/2011	4:57:50 PM	Helium valve closed
11/18/2011	4:57:50 PM	H2 valve closed
11/18/2011	4:57:50 PM	BCl3 valve closed
11/18/2011	4:57:50 PM	PH3 valve closed
11/18/2011	4:57:50 PM	SiCl4 pre valve closed
11/18/2011	4:57:50 PM	SiCl4 post valve closed
11/18/2011	4:57:50 PM	Bypass valve closed
11/18/2011	4:57:50 PM	Bubbler valve closed
11/18/2011	4:57:50 PM	Main Vac valve opened
11/18/2011	4:57:50 PM	Helium MFC set to  0.000000
11/18/2011	4:57:50 PM	H2 MFC set to  0.000000
11/18/2011	4:57:50 PM	BCl3 MFC set to  0.000000
11/18/2011	4:57:50 PM	PHl3 MFC set to  0.000000
11/18/2011	4:57:50 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:57:50 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:57:50 PM	Tube furnace set to 150
11/18/2011	4:58:20 PM	H2 valve closed
11/18/2011	4:58:20 PM	BCl3 valve closed
11/18/2011	4:58:20 PM	PH3 valve closed
11/18/2011	4:58:20 PM	SiCl4 pre valve closed
11/18/2011	4:58:20 PM	SiCl4 post valve closed
11/18/2011	4:58:20 PM	Bypass valve closed
11/18/2011	4:58:20 PM	Bubbler valve closed
11/18/2011	4:58:20 PM	Helium valve opened
11/18/2011	4:58:20 PM	Main Vac valve opened
11/18/2011	4:58:20 PM	Helium MFC set to  20.000000
11/18/2011	4:58:20 PM	H2 MFC set to  0.000000
11/18/2011	4:58:20 PM	BCl3 MFC set to  0.000000
11/18/2011	4:58:20 PM	PHl3 MFC set to  0.000000
11/18/2011	4:58:20 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:58:20 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:58:20 PM	Tube furnace set to 150
11/18/2011	4:58:50 PM	Helium valve closed
11/18/2011	4:58:50 PM	H2 valve closed
11/18/2011	4:58:50 PM	BCl3 valve closed
11/18/2011	4:58:50 PM	PH3 valve closed
11/18/2011	4:58:50 PM	SiCl4 pre valve closed
11/18/2011	4:58:50 PM	SiCl4 post valve closed
11/18/2011	4:58:50 PM	Bypass valve closed
11/18/2011	4:58:50 PM	Bubbler valve closed
11/18/2011	4:58:50 PM	Main Vac valve opened
11/18/2011	4:58:50 PM	Helium MFC set to  0.000000
11/18/2011	4:58:50 PM	H2 MFC set to  0.000000
11/18/2011	4:58:50 PM	BCl3 MFC set to  0.000000
11/18/2011	4:58:50 PM	PHl3 MFC set to  0.000000
11/18/2011	4:58:50 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:58:50 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:58:51 PM	Tube furnace set to 150
11/18/2011	4:59:21 PM	H2 valve closed
11/18/2011	4:59:21 PM	BCl3 valve closed
11/18/2011	4:59:21 PM	PH3 valve closed
11/18/2011	4:59:21 PM	SiCl4 pre valve closed
11/18/2011	4:59:21 PM	SiCl4 post valve closed
11/18/2011	4:59:21 PM	Bypass valve closed
11/18/2011	4:59:21 PM	Bubbler valve closed
11/18/2011	4:59:21 PM	Helium valve opened
11/18/2011	4:59:21 PM	Main Vac valve opened
11/18/2011	4:59:21 PM	Helium MFC set to  20.000000
11/18/2011	4:59:21 PM	H2 MFC set to  0.000000
11/18/2011	4:59:21 PM	BCl3 MFC set to  0.000000
11/18/2011	4:59:21 PM	PHl3 MFC set to  0.000000
11/18/2011	4:59:21 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:59:21 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	4:59:21 PM	Tube furnace set to 150
11/18/2011	4:59:31 PM	Run aborted at 4:59 PM
11/18/2011	4:59:31 PM	Helium valve closed
11/18/2011	4:59:31 PM	H2 valve closed
11/18/2011	4:59:31 PM	BCl3 valve closed
11/18/2011	4:59:31 PM	PH3 valve closed
11/18/2011	4:59:31 PM	SiCl4 pre valve closed
11/18/2011	4:59:31 PM	SiCl4 post valve closed
11/18/2011	4:59:31 PM	Bypass valve closed
11/18/2011	4:59:31 PM	Main Vac valve closed
11/18/2011	4:59:31 PM	Bubbler valve closed
11/18/2011	4:59:31 PM	Helium MFC set to  0.000000
11/18/2011	4:59:31 PM	H2 MFC set to  0.000000
11/18/2011	4:59:31 PM	BCl3 MFC set to  0.000000
11/18/2011	4:59:31 PM	PHl3 MFC set to  0.000000
11/18/2011	4:59:31 PM	SiCl4 MFC set to  0.000000
11/18/2011	4:59:31 PM	Tube furnace set to 0
11/18/2011	4:59:33 PM	Main Vac valve opened
11/18/2011	5:02:28 PM	Main Vac valve closed
11/18/2011	5:02:40 PM	Main Vac valve opened
11/18/2011	5:03:06 PM	Recipe started at 5:03 PM
11/18/2011	5:03:06 PM	Helium valve closed
11/18/2011	5:03:06 PM	H2 valve closed
11/18/2011	5:03:06 PM	BCl3 valve closed
11/18/2011	5:03:06 PM	PH3 valve closed
11/18/2011	5:03:06 PM	SiCl4 pre valve closed
11/18/2011	5:03:06 PM	SiCl4 post valve closed
11/18/2011	5:03:06 PM	Main Vac valve closed
11/18/2011	5:03:06 PM	Bypass valve closed
11/18/2011	5:03:06 PM	Bubbler valve closed
11/18/2011	5:03:06 PM	Helium MFC set to  0.000000
11/18/2011	5:03:06 PM	H2 MFC set to  0.000000
11/18/2011	5:03:06 PM	BCl3 MFC set to  0.000000
11/18/2011	5:03:06 PM	PHl3 MFC set to  0.000000
11/18/2011	5:03:06 PM	SiCl4 MFC set to  0.000000
11/18/2011	5:03:06 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	5:03:06 PM	Tube furnace set to 0
11/18/2011	5:03:09 PM	Helium valve closed
11/18/2011	5:03:09 PM	BCl3 valve closed
11/18/2011	5:03:09 PM	PH3 valve closed
11/18/2011	5:03:09 PM	SiCl4 pre valve closed
11/18/2011	5:03:09 PM	SiCl4 post valve closed
11/18/2011	5:03:09 PM	Main Vac valve closed
11/18/2011	5:03:09 PM	Bypass valve closed
11/18/2011	5:03:09 PM	Bubbler valve closed
11/18/2011	5:03:09 PM	H2 valve opened
11/18/2011	5:03:09 PM	Helium MFC set to  0.000000
11/18/2011	5:03:09 PM	H2 MFC set to  500.000000
11/18/2011	5:03:09 PM	BCl3 MFC set to  0.000000
11/18/2011	5:03:09 PM	PHl3 MFC set to  0.000000
11/18/2011	5:03:09 PM	SiCl4 MFC set to  0.000000
11/18/2011	5:03:09 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	5:03:09 PM	Tube furnace set to 50
11/18/2011	5:04:11 PM	Helium valve closed
11/18/2011	5:04:11 PM	BCl3 valve closed
11/18/2011	5:04:11 PM	PH3 valve closed
11/18/2011	5:04:11 PM	SiCl4 pre valve closed
11/18/2011	5:04:11 PM	SiCl4 post valve closed
11/18/2011	5:04:11 PM	Main Vac valve closed
11/18/2011	5:04:11 PM	Bypass valve closed
11/18/2011	5:04:11 PM	H2 valve opened
11/18/2011	5:04:11 PM	Bubbler valve opened
11/18/2011	5:04:11 PM	Helium MFC set to  0.000000
11/18/2011	5:04:11 PM	H2 MFC set to  500.000000
11/18/2011	5:04:11 PM	BCl3 MFC set to  0.000000
11/18/2011	5:04:11 PM	PHl3 MFC set to  0.000000
11/18/2011	5:04:11 PM	SiCl4 MFC set to  0.000000
11/18/2011	5:04:11 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	5:04:11 PM	Tube furnace set to 50
11/18/2011	5:04:12 PM	Helium valve closed
11/18/2011	5:04:12 PM	BCl3 valve closed
11/18/2011	5:04:12 PM	PH3 valve closed
11/18/2011	5:04:12 PM	SiCl4 pre valve closed
11/18/2011	5:04:12 PM	SiCl4 post valve closed
11/18/2011	5:04:12 PM	Main Vac valve closed
11/18/2011	5:04:12 PM	Bypass valve closed
11/18/2011	5:04:12 PM	H2 valve opened
11/18/2011	5:04:12 PM	Bubbler valve opened
11/18/2011	5:04:12 PM	Helium MFC set to  0.000000
11/18/2011	5:04:12 PM	H2 MFC set to  495.000000
11/18/2011	5:04:12 PM	BCl3 MFC set to  0.000000
11/18/2011	5:04:12 PM	PHl3 MFC set to  0.000000
11/18/2011	5:04:12 PM	SiCl4 MFC set to  0.000000
11/18/2011	5:04:12 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	5:04:12 PM	Tube furnace set to 1000
11/18/2011	5:24:12 PM	Helium valve closed
11/18/2011	5:24:12 PM	BCl3 valve closed
11/18/2011	5:24:12 PM	PH3 valve closed
11/18/2011	5:24:12 PM	Main Vac valve closed
11/18/2011	5:24:12 PM	Bypass valve closed
11/18/2011	5:24:12 PM	H2 valve opened
11/18/2011	5:24:12 PM	SiCl4 pre valve opened
11/18/2011	5:24:12 PM	SiCl4 post valve opened
11/18/2011	5:24:12 PM	Bubbler valve opened
11/18/2011	5:24:12 PM	Helium MFC set to  0.000000
11/18/2011	5:24:12 PM	H2 MFC set to  495.000000
11/18/2011	5:24:12 PM	BCl3 MFC set to  0.000000
11/18/2011	5:24:12 PM	PHl3 MFC set to  0.000000
11/18/2011	5:24:12 PM	SiCl4 MFC set to  24.000000
11/18/2011	5:24:12 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	5:24:13 PM	Tube furnace set to 1000
11/18/2011	5:52:13 PM	Helium valve closed
11/18/2011	5:52:13 PM	BCl3 valve closed
11/18/2011	5:52:13 PM	PH3 valve closed
11/18/2011	5:52:13 PM	SiCl4 pre valve closed
11/18/2011	5:52:13 PM	SiCl4 post valve closed
11/18/2011	5:52:13 PM	Main Vac valve closed
11/18/2011	5:52:13 PM	Bypass valve closed
11/18/2011	5:52:13 PM	H2 valve opened
11/18/2011	5:52:13 PM	Bubbler valve opened
11/18/2011	5:52:13 PM	Helium MFC set to  0.000000
11/18/2011	5:52:13 PM	H2 MFC set to  480.000000
11/18/2011	5:52:13 PM	BCl3 MFC set to  0.000000
11/18/2011	5:52:13 PM	PHl3 MFC set to  0.000000
11/18/2011	5:52:13 PM	SiCl4 MFC set to  0.000000
11/18/2011	5:52:13 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	5:52:13 PM	Tube furnace set to 750
11/18/2011	6:02:13 PM	H2 valve closed
11/18/2011	6:02:13 PM	BCl3 valve closed
11/18/2011	6:02:13 PM	PH3 valve closed
11/18/2011	6:02:13 PM	SiCl4 pre valve closed
11/18/2011	6:02:13 PM	SiCl4 post valve closed
11/18/2011	6:02:13 PM	Main Vac valve closed
11/18/2011	6:02:13 PM	Bypass valve closed
11/18/2011	6:02:13 PM	Helium valve opened
11/18/2011	6:02:13 PM	Bubbler valve opened
11/18/2011	6:02:13 PM	Helium MFC set to  400.000000
11/18/2011	6:02:13 PM	H2 MFC set to  0.000000
11/18/2011	6:02:13 PM	BCl3 MFC set to  0.000000
11/18/2011	6:02:13 PM	PHl3 MFC set to  0.000000
11/18/2011	6:02:13 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:02:13 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:02:13 PM	Tube furnace set to 0
11/18/2011	6:06:55 PM	Run aborted at 6:06 PM
11/18/2011	6:06:55 PM	Helium valve closed
11/18/2011	6:06:55 PM	H2 valve closed
11/18/2011	6:06:55 PM	BCl3 valve closed
11/18/2011	6:06:55 PM	PH3 valve closed
11/18/2011	6:06:55 PM	SiCl4 pre valve closed
11/18/2011	6:06:55 PM	SiCl4 post valve closed
11/18/2011	6:06:55 PM	Bypass valve closed
11/18/2011	6:06:55 PM	Main Vac valve closed
11/18/2011	6:06:55 PM	Bubbler valve closed
11/18/2011	6:06:55 PM	Helium MFC set to  0.000000
11/18/2011	6:06:55 PM	H2 MFC set to  0.000000
11/18/2011	6:06:55 PM	BCl3 MFC set to  0.000000
11/18/2011	6:06:55 PM	PHl3 MFC set to  0.000000
11/18/2011	6:06:55 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:06:55 PM	Tube furnace set to 0
11/18/2011	6:06:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/18/2011	6:06:58 PM	Recipe started at 6:06 PM
11/18/2011	6:06:58 PM	Helium valve closed
11/18/2011	6:06:58 PM	H2 valve closed
11/18/2011	6:06:58 PM	BCl3 valve closed
11/18/2011	6:06:58 PM	PH3 valve closed
11/18/2011	6:06:58 PM	SiCl4 pre valve closed
11/18/2011	6:06:58 PM	SiCl4 post valve closed
11/18/2011	6:06:58 PM	Main Vac valve closed
11/18/2011	6:06:58 PM	Bypass valve closed
11/18/2011	6:06:58 PM	Bubbler valve closed
11/18/2011	6:06:58 PM	Helium MFC set to  0.000000
11/18/2011	6:06:58 PM	H2 MFC set to  0.000000
11/18/2011	6:06:58 PM	BCl3 MFC set to  0.000000
11/18/2011	6:06:58 PM	PHl3 MFC set to  0.000000
11/18/2011	6:06:58 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:06:58 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:06:58 PM	Tube furnace set to 0
11/18/2011	6:07:01 PM	H2 valve closed
11/18/2011	6:07:01 PM	BCl3 valve closed
11/18/2011	6:07:01 PM	PH3 valve closed
11/18/2011	6:07:01 PM	SiCl4 pre valve closed
11/18/2011	6:07:01 PM	SiCl4 post valve closed
11/18/2011	6:07:01 PM	Main Vac valve closed
11/18/2011	6:07:01 PM	Bypass valve closed
11/18/2011	6:07:01 PM	Bubbler valve closed
11/18/2011	6:07:01 PM	Helium valve opened
11/18/2011	6:07:01 PM	Helium MFC set to  500.000000
11/18/2011	6:07:01 PM	H2 MFC set to  0.000000
11/18/2011	6:07:01 PM	BCl3 MFC set to  0.000000
11/18/2011	6:07:01 PM	PHl3 MFC set to  0.000000
11/18/2011	6:07:01 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:07:01 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:07:01 PM	Tube furnace set to 0
11/18/2011	6:07:01 PM	Helium valve closed
11/18/2011	6:07:01 PM	H2 valve closed
11/18/2011	6:07:01 PM	BCl3 valve closed
11/18/2011	6:07:01 PM	PH3 valve closed
11/18/2011	6:07:01 PM	SiCl4 pre valve closed
11/18/2011	6:07:01 PM	SiCl4 post valve closed
11/18/2011	6:07:01 PM	Main Vac valve closed
11/18/2011	6:07:01 PM	Bypass valve closed
11/18/2011	6:07:01 PM	Bubbler valve closed
11/18/2011	6:07:01 PM	Helium MFC set to  0.000000
11/18/2011	6:07:01 PM	H2 MFC set to  0.000000
11/18/2011	6:07:01 PM	BCl3 MFC set to  0.000000
11/18/2011	6:07:01 PM	PHl3 MFC set to  0.000000
11/18/2011	6:07:01 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:07:01 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:07:01 PM	Tube furnace set to 0
11/18/2011	6:07:02 PM	Run finished at 6:07 PM
11/18/2011	6:07:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/18/2011	6:11:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/18/2011	6:11:32 PM	Recipe started at 6:11 PM
11/18/2011	6:11:32 PM	Helium valve closed
11/18/2011	6:11:32 PM	H2 valve closed
11/18/2011	6:11:32 PM	BCl3 valve closed
11/18/2011	6:11:32 PM	PH3 valve closed
11/18/2011	6:11:32 PM	SiCl4 pre valve closed
11/18/2011	6:11:32 PM	SiCl4 post valve closed
11/18/2011	6:11:32 PM	Main Vac valve closed
11/18/2011	6:11:32 PM	Bubbler valve closed
11/18/2011	6:11:32 PM	Bypass valve opened
11/18/2011	6:11:32 PM	Helium MFC set to  0.000000
11/18/2011	6:11:32 PM	H2 MFC set to  0.000000
11/18/2011	6:11:32 PM	BCl3 MFC set to  0.000000
11/18/2011	6:11:32 PM	PHl3 MFC set to  0.000000
11/18/2011	6:11:32 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:11:32 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:11:32 PM	Tube furnace set to 0
11/18/2011	6:13:14 PM	Helium valve closed
11/18/2011	6:13:14 PM	H2 valve closed
11/18/2011	6:13:14 PM	BCl3 valve closed
11/18/2011	6:13:14 PM	PH3 valve closed
11/18/2011	6:13:14 PM	SiCl4 pre valve closed
11/18/2011	6:13:14 PM	SiCl4 post valve closed
11/18/2011	6:13:14 PM	Main Vac valve closed
11/18/2011	6:13:14 PM	Bubbler valve closed
11/18/2011	6:13:14 PM	Bypass valve opened
11/18/2011	6:13:14 PM	Helium MFC set to  0.000000
11/18/2011	6:13:14 PM	H2 MFC set to  0.000000
11/18/2011	6:13:14 PM	BCl3 MFC set to  0.000000
11/18/2011	6:13:14 PM	PHl3 MFC set to  0.000000
11/18/2011	6:13:14 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:13:14 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:13:14 PM	Tube furnace set to 0
11/18/2011	6:14:14 PM	Helium valve closed
11/18/2011	6:14:14 PM	H2 valve closed
11/18/2011	6:14:14 PM	BCl3 valve closed
11/18/2011	6:14:14 PM	PH3 valve closed
11/18/2011	6:14:14 PM	SiCl4 pre valve closed
11/18/2011	6:14:14 PM	SiCl4 post valve closed
11/18/2011	6:14:14 PM	Bypass valve closed
11/18/2011	6:14:14 PM	Bubbler valve closed
11/18/2011	6:14:14 PM	Main Vac valve opened
11/18/2011	6:14:14 PM	Helium MFC set to  0.000000
11/18/2011	6:14:14 PM	H2 MFC set to  0.000000
11/18/2011	6:14:14 PM	BCl3 MFC set to  0.000000
11/18/2011	6:14:14 PM	PHl3 MFC set to  0.000000
11/18/2011	6:14:14 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:14:14 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:14:15 PM	Tube furnace set to 0
11/18/2011	6:14:16 PM	Run finished at 6:14 PM
11/18/2011	6:14:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/18/2011	6:26:42 PM	Recipe started at 6:26 PM
11/18/2011	6:26:42 PM	Helium valve closed
11/18/2011	6:26:42 PM	H2 valve closed
11/18/2011	6:26:42 PM	BCl3 valve closed
11/18/2011	6:26:42 PM	PH3 valve closed
11/18/2011	6:26:42 PM	SiCl4 pre valve closed
11/18/2011	6:26:42 PM	SiCl4 post valve closed
11/18/2011	6:26:42 PM	Main Vac valve closed
11/18/2011	6:26:42 PM	Bubbler valve closed
11/18/2011	6:26:42 PM	Bypass valve opened
11/18/2011	6:26:42 PM	Helium MFC set to  0.000000
11/18/2011	6:26:42 PM	H2 MFC set to  0.000000
11/18/2011	6:26:42 PM	BCl3 MFC set to  0.000000
11/18/2011	6:26:42 PM	PHl3 MFC set to  0.000000
11/18/2011	6:26:42 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:26:42 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:26:42 PM	Tube furnace set to 180
11/18/2011	6:26:43 PM	Helium valve closed
11/18/2011	6:26:43 PM	H2 valve closed
11/18/2011	6:26:43 PM	BCl3 valve closed
11/18/2011	6:26:43 PM	PH3 valve closed
11/18/2011	6:26:43 PM	SiCl4 pre valve closed
11/18/2011	6:26:43 PM	SiCl4 post valve closed
11/18/2011	6:26:43 PM	Main Vac valve closed
11/18/2011	6:26:43 PM	Bubbler valve closed
11/18/2011	6:26:43 PM	Bypass valve opened
11/18/2011	6:26:43 PM	Helium MFC set to  0.000000
11/18/2011	6:26:43 PM	H2 MFC set to  0.000000
11/18/2011	6:26:43 PM	BCl3 MFC set to  0.000000
11/18/2011	6:26:43 PM	PHl3 MFC set to  0.000000
11/18/2011	6:26:43 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:26:43 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:26:43 PM	Tube furnace set to 150
11/18/2011	6:27:13 PM	Helium valve closed
11/18/2011	6:27:13 PM	H2 valve closed
11/18/2011	6:27:13 PM	BCl3 valve closed
11/18/2011	6:27:13 PM	PH3 valve closed
11/18/2011	6:27:13 PM	SiCl4 pre valve closed
11/18/2011	6:27:13 PM	SiCl4 post valve closed
11/18/2011	6:27:13 PM	Bypass valve closed
11/18/2011	6:27:13 PM	Bubbler valve closed
11/18/2011	6:27:13 PM	Main Vac valve opened
11/18/2011	6:27:13 PM	Helium MFC set to  0.000000
11/18/2011	6:27:13 PM	H2 MFC set to  0.000000
11/18/2011	6:27:13 PM	BCl3 MFC set to  0.000000
11/18/2011	6:27:13 PM	PHl3 MFC set to  0.000000
11/18/2011	6:27:13 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:27:13 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:27:13 PM	Tube furnace set to 180
11/18/2011	6:27:43 PM	H2 valve closed
11/18/2011	6:27:43 PM	BCl3 valve closed
11/18/2011	6:27:43 PM	PH3 valve closed
11/18/2011	6:27:43 PM	SiCl4 pre valve closed
11/18/2011	6:27:43 PM	SiCl4 post valve closed
11/18/2011	6:27:43 PM	Bypass valve closed
11/18/2011	6:27:43 PM	Bubbler valve closed
11/18/2011	6:27:43 PM	Helium valve opened
11/18/2011	6:27:43 PM	Main Vac valve opened
11/18/2011	6:27:43 PM	Helium MFC set to  20.000000
11/18/2011	6:27:43 PM	H2 MFC set to  0.000000
11/18/2011	6:27:43 PM	BCl3 MFC set to  0.000000
11/18/2011	6:27:43 PM	PHl3 MFC set to  0.000000
11/18/2011	6:27:43 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:27:43 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:27:43 PM	Tube furnace set to 180
11/18/2011	6:28:13 PM	Helium valve closed
11/18/2011	6:28:13 PM	H2 valve closed
11/18/2011	6:28:13 PM	BCl3 valve closed
11/18/2011	6:28:13 PM	PH3 valve closed
11/18/2011	6:28:13 PM	SiCl4 pre valve closed
11/18/2011	6:28:13 PM	SiCl4 post valve closed
11/18/2011	6:28:13 PM	Bypass valve closed
11/18/2011	6:28:13 PM	Bubbler valve closed
11/18/2011	6:28:13 PM	Main Vac valve opened
11/18/2011	6:28:13 PM	Helium MFC set to  0.000000
11/18/2011	6:28:13 PM	H2 MFC set to  0.000000
11/18/2011	6:28:13 PM	BCl3 MFC set to  0.000000
11/18/2011	6:28:13 PM	PHl3 MFC set to  0.000000
11/18/2011	6:28:13 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:28:13 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:28:13 PM	Tube furnace set to 150
11/18/2011	6:28:43 PM	H2 valve closed
11/18/2011	6:28:43 PM	BCl3 valve closed
11/18/2011	6:28:43 PM	PH3 valve closed
11/18/2011	6:28:43 PM	SiCl4 pre valve closed
11/18/2011	6:28:43 PM	SiCl4 post valve closed
11/18/2011	6:28:43 PM	Bypass valve closed
11/18/2011	6:28:43 PM	Bubbler valve closed
11/18/2011	6:28:43 PM	Helium valve opened
11/18/2011	6:28:43 PM	Main Vac valve opened
11/18/2011	6:28:43 PM	Helium MFC set to  20.000000
11/18/2011	6:28:43 PM	H2 MFC set to  0.000000
11/18/2011	6:28:43 PM	BCl3 MFC set to  0.000000
11/18/2011	6:28:43 PM	PHl3 MFC set to  0.000000
11/18/2011	6:28:43 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:28:43 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:28:44 PM	Tube furnace set to 180
11/18/2011	6:29:14 PM	Helium valve closed
11/18/2011	6:29:14 PM	H2 valve closed
11/18/2011	6:29:14 PM	BCl3 valve closed
11/18/2011	6:29:14 PM	PH3 valve closed
11/18/2011	6:29:14 PM	SiCl4 pre valve closed
11/18/2011	6:29:14 PM	SiCl4 post valve closed
11/18/2011	6:29:14 PM	Bypass valve closed
11/18/2011	6:29:14 PM	Bubbler valve closed
11/18/2011	6:29:14 PM	Main Vac valve opened
11/18/2011	6:29:14 PM	Helium MFC set to  0.000000
11/18/2011	6:29:14 PM	H2 MFC set to  0.000000
11/18/2011	6:29:14 PM	BCl3 MFC set to  0.000000
11/18/2011	6:29:14 PM	PHl3 MFC set to  0.000000
11/18/2011	6:29:14 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:29:14 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:29:14 PM	Tube furnace set to 150
11/18/2011	6:29:44 PM	H2 valve closed
11/18/2011	6:29:44 PM	BCl3 valve closed
11/18/2011	6:29:44 PM	PH3 valve closed
11/18/2011	6:29:44 PM	SiCl4 pre valve closed
11/18/2011	6:29:44 PM	SiCl4 post valve closed
11/18/2011	6:29:44 PM	Bypass valve closed
11/18/2011	6:29:44 PM	Bubbler valve closed
11/18/2011	6:29:44 PM	Helium valve opened
11/18/2011	6:29:44 PM	Main Vac valve opened
11/18/2011	6:29:44 PM	Helium MFC set to  20.000000
11/18/2011	6:29:44 PM	H2 MFC set to  0.000000
11/18/2011	6:29:44 PM	BCl3 MFC set to  0.000000
11/18/2011	6:29:44 PM	PHl3 MFC set to  0.000000
11/18/2011	6:29:44 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:29:44 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:29:44 PM	Tube furnace set to 150
11/18/2011	6:30:14 PM	Helium valve closed
11/18/2011	6:30:14 PM	H2 valve closed
11/18/2011	6:30:14 PM	BCl3 valve closed
11/18/2011	6:30:14 PM	PH3 valve closed
11/18/2011	6:30:14 PM	SiCl4 pre valve closed
11/18/2011	6:30:14 PM	SiCl4 post valve closed
11/18/2011	6:30:14 PM	Bypass valve closed
11/18/2011	6:30:14 PM	Bubbler valve closed
11/18/2011	6:30:14 PM	Main Vac valve opened
11/18/2011	6:30:14 PM	Helium MFC set to  0.000000
11/18/2011	6:30:14 PM	H2 MFC set to  0.000000
11/18/2011	6:30:14 PM	BCl3 MFC set to  0.000000
11/18/2011	6:30:14 PM	PHl3 MFC set to  0.000000
11/18/2011	6:30:14 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:30:14 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:30:14 PM	Tube furnace set to 150
11/18/2011	6:30:44 PM	H2 valve closed
11/18/2011	6:30:44 PM	BCl3 valve closed
11/18/2011	6:30:44 PM	PH3 valve closed
11/18/2011	6:30:44 PM	SiCl4 pre valve closed
11/18/2011	6:30:44 PM	SiCl4 post valve closed
11/18/2011	6:30:44 PM	Bypass valve closed
11/18/2011	6:30:44 PM	Bubbler valve closed
11/18/2011	6:30:44 PM	Helium valve opened
11/18/2011	6:30:44 PM	Main Vac valve opened
11/18/2011	6:30:44 PM	Helium MFC set to  20.000000
11/18/2011	6:30:44 PM	H2 MFC set to  0.000000
11/18/2011	6:30:44 PM	BCl3 MFC set to  0.000000
11/18/2011	6:30:44 PM	PHl3 MFC set to  0.000000
11/18/2011	6:30:44 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:30:44 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:30:44 PM	Tube furnace set to 180
11/18/2011	6:31:14 PM	Helium valve closed
11/18/2011	6:31:14 PM	H2 valve closed
11/18/2011	6:31:14 PM	BCl3 valve closed
11/18/2011	6:31:14 PM	PH3 valve closed
11/18/2011	6:31:14 PM	SiCl4 pre valve closed
11/18/2011	6:31:14 PM	SiCl4 post valve closed
11/18/2011	6:31:14 PM	Bypass valve closed
11/18/2011	6:31:14 PM	Bubbler valve closed
11/18/2011	6:31:14 PM	Main Vac valve opened
11/18/2011	6:31:14 PM	Helium MFC set to  0.000000
11/18/2011	6:31:15 PM	H2 MFC set to  0.000000
11/18/2011	6:31:15 PM	BCl3 MFC set to  0.000000
11/18/2011	6:31:15 PM	PHl3 MFC set to  0.000000
11/18/2011	6:31:15 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:31:15 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:31:15 PM	Tube furnace set to 150
11/18/2011	6:31:45 PM	H2 valve closed
11/18/2011	6:31:45 PM	BCl3 valve closed
11/18/2011	6:31:45 PM	PH3 valve closed
11/18/2011	6:31:45 PM	SiCl4 pre valve closed
11/18/2011	6:31:45 PM	SiCl4 post valve closed
11/18/2011	6:31:45 PM	Bypass valve closed
11/18/2011	6:31:45 PM	Bubbler valve closed
11/18/2011	6:31:45 PM	Helium valve opened
11/18/2011	6:31:45 PM	Main Vac valve opened
11/18/2011	6:31:45 PM	Helium MFC set to  20.000000
11/18/2011	6:31:45 PM	H2 MFC set to  0.000000
11/18/2011	6:31:45 PM	BCl3 MFC set to  0.000000
11/18/2011	6:31:45 PM	PHl3 MFC set to  0.000000
11/18/2011	6:31:45 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:31:45 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:31:45 PM	Tube furnace set to 150
11/18/2011	6:32:15 PM	Helium valve closed
11/18/2011	6:32:15 PM	H2 valve closed
11/18/2011	6:32:15 PM	BCl3 valve closed
11/18/2011	6:32:15 PM	PH3 valve closed
11/18/2011	6:32:15 PM	SiCl4 pre valve closed
11/18/2011	6:32:15 PM	SiCl4 post valve closed
11/18/2011	6:32:15 PM	Bypass valve closed
11/18/2011	6:32:15 PM	Bubbler valve closed
11/18/2011	6:32:15 PM	Main Vac valve opened
11/18/2011	6:32:15 PM	Helium MFC set to  0.000000
11/18/2011	6:32:15 PM	H2 MFC set to  0.000000
11/18/2011	6:32:15 PM	BCl3 MFC set to  0.000000
11/18/2011	6:32:15 PM	PHl3 MFC set to  0.000000
11/18/2011	6:32:15 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:32:15 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:32:15 PM	Tube furnace set to 150
11/18/2011	6:32:45 PM	H2 valve closed
11/18/2011	6:32:45 PM	BCl3 valve closed
11/18/2011	6:32:45 PM	PH3 valve closed
11/18/2011	6:32:45 PM	SiCl4 pre valve closed
11/18/2011	6:32:45 PM	SiCl4 post valve closed
11/18/2011	6:32:45 PM	Bypass valve closed
11/18/2011	6:32:45 PM	Bubbler valve closed
11/18/2011	6:32:45 PM	Helium valve opened
11/18/2011	6:32:45 PM	Main Vac valve opened
11/18/2011	6:32:45 PM	Helium MFC set to  20.000000
11/18/2011	6:32:45 PM	H2 MFC set to  0.000000
11/18/2011	6:32:45 PM	BCl3 MFC set to  0.000000
11/18/2011	6:32:45 PM	PHl3 MFC set to  0.000000
11/18/2011	6:32:45 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:32:45 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:32:45 PM	Tube furnace set to 150
11/18/2011	6:33:15 PM	Helium valve closed
11/18/2011	6:33:15 PM	H2 valve closed
11/18/2011	6:33:15 PM	BCl3 valve closed
11/18/2011	6:33:15 PM	PH3 valve closed
11/18/2011	6:33:15 PM	SiCl4 pre valve closed
11/18/2011	6:33:15 PM	SiCl4 post valve closed
11/18/2011	6:33:15 PM	Bypass valve closed
11/18/2011	6:33:15 PM	Bubbler valve closed
11/18/2011	6:33:15 PM	Main Vac valve opened
11/18/2011	6:33:15 PM	Helium MFC set to  0.000000
11/18/2011	6:33:15 PM	H2 MFC set to  0.000000
11/18/2011	6:33:15 PM	BCl3 MFC set to  0.000000
11/18/2011	6:33:15 PM	PHl3 MFC set to  0.000000
11/18/2011	6:33:15 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:33:15 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:33:15 PM	Tube furnace set to 150
11/18/2011	6:33:46 PM	H2 valve closed
11/18/2011	6:33:46 PM	BCl3 valve closed
11/18/2011	6:33:46 PM	PH3 valve closed
11/18/2011	6:33:46 PM	SiCl4 pre valve closed
11/18/2011	6:33:46 PM	SiCl4 post valve closed
11/18/2011	6:33:46 PM	Bypass valve closed
11/18/2011	6:33:46 PM	Bubbler valve closed
11/18/2011	6:33:46 PM	Helium valve opened
11/18/2011	6:33:46 PM	Main Vac valve opened
11/18/2011	6:33:46 PM	Helium MFC set to  20.000000
11/18/2011	6:33:46 PM	H2 MFC set to  0.000000
11/18/2011	6:33:46 PM	BCl3 MFC set to  0.000000
11/18/2011	6:33:46 PM	PHl3 MFC set to  0.000000
11/18/2011	6:33:46 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:33:46 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:33:46 PM	Tube furnace set to 150
11/18/2011	6:34:16 PM	Helium valve closed
11/18/2011	6:34:16 PM	H2 valve closed
11/18/2011	6:34:16 PM	BCl3 valve closed
11/18/2011	6:34:16 PM	PH3 valve closed
11/18/2011	6:34:16 PM	SiCl4 pre valve closed
11/18/2011	6:34:16 PM	SiCl4 post valve closed
11/18/2011	6:34:16 PM	Bypass valve closed
11/18/2011	6:34:16 PM	Bubbler valve closed
11/18/2011	6:34:16 PM	Main Vac valve opened
11/18/2011	6:34:16 PM	Helium MFC set to  0.000000
11/18/2011	6:34:16 PM	H2 MFC set to  0.000000
11/18/2011	6:34:16 PM	BCl3 MFC set to  0.000000
11/18/2011	6:34:16 PM	PHl3 MFC set to  0.000000
11/18/2011	6:34:16 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:34:16 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:34:16 PM	Tube furnace set to 150
11/18/2011	6:34:46 PM	H2 valve closed
11/18/2011	6:34:46 PM	BCl3 valve closed
11/18/2011	6:34:46 PM	PH3 valve closed
11/18/2011	6:34:46 PM	SiCl4 pre valve closed
11/18/2011	6:34:46 PM	SiCl4 post valve closed
11/18/2011	6:34:46 PM	Bypass valve closed
11/18/2011	6:34:46 PM	Bubbler valve closed
11/18/2011	6:34:46 PM	Helium valve opened
11/18/2011	6:34:46 PM	Main Vac valve opened
11/18/2011	6:34:46 PM	Helium MFC set to  20.000000
11/18/2011	6:34:46 PM	H2 MFC set to  0.000000
11/18/2011	6:34:46 PM	BCl3 MFC set to  0.000000
11/18/2011	6:34:46 PM	PHl3 MFC set to  0.000000
11/18/2011	6:34:46 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:34:46 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:34:46 PM	Tube furnace set to 150
11/18/2011	6:35:16 PM	Helium valve closed
11/18/2011	6:35:16 PM	H2 valve closed
11/18/2011	6:35:16 PM	BCl3 valve closed
11/18/2011	6:35:16 PM	PH3 valve closed
11/18/2011	6:35:16 PM	SiCl4 pre valve closed
11/18/2011	6:35:16 PM	SiCl4 post valve closed
11/18/2011	6:35:16 PM	Bypass valve closed
11/18/2011	6:35:16 PM	Bubbler valve closed
11/18/2011	6:35:16 PM	Main Vac valve opened
11/18/2011	6:35:16 PM	Helium MFC set to  0.000000
11/18/2011	6:35:16 PM	H2 MFC set to  0.000000
11/18/2011	6:35:16 PM	BCl3 MFC set to  0.000000
11/18/2011	6:35:16 PM	PHl3 MFC set to  0.000000
11/18/2011	6:35:16 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:35:16 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:35:16 PM	Tube furnace set to 150
11/18/2011	6:35:46 PM	H2 valve closed
11/18/2011	6:35:46 PM	BCl3 valve closed
11/18/2011	6:35:46 PM	PH3 valve closed
11/18/2011	6:35:46 PM	SiCl4 pre valve closed
11/18/2011	6:35:46 PM	SiCl4 post valve closed
11/18/2011	6:35:46 PM	Bypass valve closed
11/18/2011	6:35:46 PM	Bubbler valve closed
11/18/2011	6:35:46 PM	Helium valve opened
11/18/2011	6:35:46 PM	Main Vac valve opened
11/18/2011	6:35:46 PM	Helium MFC set to  20.000000
11/18/2011	6:35:46 PM	H2 MFC set to  0.000000
11/18/2011	6:35:46 PM	BCl3 MFC set to  0.000000
11/18/2011	6:35:46 PM	PHl3 MFC set to  0.000000
11/18/2011	6:35:46 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:35:46 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:35:46 PM	Tube furnace set to 150
11/18/2011	6:36:17 PM	Helium valve closed
11/18/2011	6:36:17 PM	H2 valve closed
11/18/2011	6:36:17 PM	BCl3 valve closed
11/18/2011	6:36:17 PM	PH3 valve closed
11/18/2011	6:36:17 PM	SiCl4 pre valve closed
11/18/2011	6:36:17 PM	SiCl4 post valve closed
11/18/2011	6:36:17 PM	Bypass valve closed
11/18/2011	6:36:17 PM	Bubbler valve closed
11/18/2011	6:36:17 PM	Main Vac valve opened
11/18/2011	6:36:17 PM	Helium MFC set to  0.000000
11/18/2011	6:36:17 PM	H2 MFC set to  0.000000
11/18/2011	6:36:17 PM	BCl3 MFC set to  0.000000
11/18/2011	6:36:17 PM	PHl3 MFC set to  0.000000
11/18/2011	6:36:17 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:36:17 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:36:17 PM	Tube furnace set to 150
11/18/2011	6:36:47 PM	H2 valve closed
11/18/2011	6:36:47 PM	BCl3 valve closed
11/18/2011	6:36:47 PM	PH3 valve closed
11/18/2011	6:36:47 PM	SiCl4 pre valve closed
11/18/2011	6:36:47 PM	SiCl4 post valve closed
11/18/2011	6:36:47 PM	Bypass valve closed
11/18/2011	6:36:47 PM	Bubbler valve closed
11/18/2011	6:36:47 PM	Helium valve opened
11/18/2011	6:36:47 PM	Main Vac valve opened
11/18/2011	6:36:47 PM	Helium MFC set to  20.000000
11/18/2011	6:36:47 PM	H2 MFC set to  0.000000
11/18/2011	6:36:47 PM	BCl3 MFC set to  0.000000
11/18/2011	6:36:47 PM	PHl3 MFC set to  0.000000
11/18/2011	6:36:47 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:36:47 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:36:47 PM	Tube furnace set to 150
11/18/2011	6:37:17 PM	Helium valve closed
11/18/2011	6:37:17 PM	H2 valve closed
11/18/2011	6:37:17 PM	BCl3 valve closed
11/18/2011	6:37:17 PM	PH3 valve closed
11/18/2011	6:37:17 PM	SiCl4 pre valve closed
11/18/2011	6:37:17 PM	SiCl4 post valve closed
11/18/2011	6:37:17 PM	Bypass valve closed
11/18/2011	6:37:17 PM	Bubbler valve closed
11/18/2011	6:37:17 PM	Main Vac valve opened
11/18/2011	6:37:17 PM	Helium MFC set to  0.000000
11/18/2011	6:37:17 PM	H2 MFC set to  0.000000
11/18/2011	6:37:17 PM	BCl3 MFC set to  0.000000
11/18/2011	6:37:17 PM	PHl3 MFC set to  0.000000
11/18/2011	6:37:17 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:37:17 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:37:17 PM	Tube furnace set to 150
11/18/2011	6:37:47 PM	H2 valve closed
11/18/2011	6:37:47 PM	BCl3 valve closed
11/18/2011	6:37:47 PM	PH3 valve closed
11/18/2011	6:37:47 PM	SiCl4 pre valve closed
11/18/2011	6:37:47 PM	SiCl4 post valve closed
11/18/2011	6:37:47 PM	Bypass valve closed
11/18/2011	6:37:47 PM	Bubbler valve closed
11/18/2011	6:37:47 PM	Helium valve opened
11/18/2011	6:37:47 PM	Main Vac valve opened
11/18/2011	6:37:47 PM	Helium MFC set to  20.000000
11/18/2011	6:37:47 PM	H2 MFC set to  0.000000
11/18/2011	6:37:47 PM	BCl3 MFC set to  0.000000
11/18/2011	6:37:47 PM	PHl3 MFC set to  0.000000
11/18/2011	6:37:47 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:37:47 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:37:47 PM	Tube furnace set to 150
11/18/2011	6:38:17 PM	Helium valve closed
11/18/2011	6:38:17 PM	H2 valve closed
11/18/2011	6:38:17 PM	BCl3 valve closed
11/18/2011	6:38:17 PM	PH3 valve closed
11/18/2011	6:38:17 PM	SiCl4 pre valve closed
11/18/2011	6:38:17 PM	SiCl4 post valve closed
11/18/2011	6:38:17 PM	Bypass valve closed
11/18/2011	6:38:17 PM	Bubbler valve closed
11/18/2011	6:38:17 PM	Main Vac valve opened
11/18/2011	6:38:17 PM	Helium MFC set to  0.000000
11/18/2011	6:38:17 PM	H2 MFC set to  0.000000
11/18/2011	6:38:17 PM	BCl3 MFC set to  0.000000
11/18/2011	6:38:17 PM	PHl3 MFC set to  0.000000
11/18/2011	6:38:17 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:38:17 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:38:18 PM	Tube furnace set to 150
11/18/2011	6:38:48 PM	H2 valve closed
11/18/2011	6:38:48 PM	BCl3 valve closed
11/18/2011	6:38:48 PM	PH3 valve closed
11/18/2011	6:38:48 PM	SiCl4 pre valve closed
11/18/2011	6:38:48 PM	SiCl4 post valve closed
11/18/2011	6:38:48 PM	Bypass valve closed
11/18/2011	6:38:48 PM	Bubbler valve closed
11/18/2011	6:38:48 PM	Helium valve opened
11/18/2011	6:38:48 PM	Main Vac valve opened
11/18/2011	6:38:48 PM	Helium MFC set to  20.000000
11/18/2011	6:38:48 PM	H2 MFC set to  0.000000
11/18/2011	6:38:48 PM	BCl3 MFC set to  0.000000
11/18/2011	6:38:48 PM	PHl3 MFC set to  0.000000
11/18/2011	6:38:48 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:38:48 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:38:48 PM	Tube furnace set to 150
11/18/2011	6:39:18 PM	Helium valve closed
11/18/2011	6:39:18 PM	H2 valve closed
11/18/2011	6:39:18 PM	BCl3 valve closed
11/18/2011	6:39:18 PM	PH3 valve closed
11/18/2011	6:39:18 PM	SiCl4 pre valve closed
11/18/2011	6:39:18 PM	SiCl4 post valve closed
11/18/2011	6:39:18 PM	Bypass valve closed
11/18/2011	6:39:18 PM	Bubbler valve closed
11/18/2011	6:39:18 PM	Main Vac valve opened
11/18/2011	6:39:18 PM	Helium MFC set to  0.000000
11/18/2011	6:39:18 PM	H2 MFC set to  0.000000
11/18/2011	6:39:18 PM	BCl3 MFC set to  0.000000
11/18/2011	6:39:18 PM	PHl3 MFC set to  0.000000
11/18/2011	6:39:18 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:39:18 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:39:18 PM	Tube furnace set to 150
11/18/2011	6:39:48 PM	H2 valve closed
11/18/2011	6:39:48 PM	BCl3 valve closed
11/18/2011	6:39:48 PM	PH3 valve closed
11/18/2011	6:39:48 PM	SiCl4 pre valve closed
11/18/2011	6:39:48 PM	SiCl4 post valve closed
11/18/2011	6:39:48 PM	Bypass valve closed
11/18/2011	6:39:48 PM	Bubbler valve closed
11/18/2011	6:39:48 PM	Helium valve opened
11/18/2011	6:39:48 PM	Main Vac valve opened
11/18/2011	6:39:48 PM	Helium MFC set to  20.000000
11/18/2011	6:39:48 PM	H2 MFC set to  0.000000
11/18/2011	6:39:48 PM	BCl3 MFC set to  0.000000
11/18/2011	6:39:48 PM	PHl3 MFC set to  0.000000
11/18/2011	6:39:48 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:39:48 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:39:48 PM	Tube furnace set to 150
11/18/2011	6:40:18 PM	Helium valve closed
11/18/2011	6:40:18 PM	H2 valve closed
11/18/2011	6:40:18 PM	BCl3 valve closed
11/18/2011	6:40:18 PM	PH3 valve closed
11/18/2011	6:40:18 PM	SiCl4 pre valve closed
11/18/2011	6:40:18 PM	SiCl4 post valve closed
11/18/2011	6:40:18 PM	Bypass valve closed
11/18/2011	6:40:18 PM	Bubbler valve closed
11/18/2011	6:40:18 PM	Main Vac valve opened
11/18/2011	6:40:18 PM	Helium MFC set to  0.000000
11/18/2011	6:40:18 PM	H2 MFC set to  0.000000
11/18/2011	6:40:18 PM	BCl3 MFC set to  0.000000
11/18/2011	6:40:18 PM	PHl3 MFC set to  0.000000
11/18/2011	6:40:18 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:40:18 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:40:18 PM	Tube furnace set to 150
11/18/2011	6:40:48 PM	H2 valve closed
11/18/2011	6:40:48 PM	BCl3 valve closed
11/18/2011	6:40:48 PM	PH3 valve closed
11/18/2011	6:40:48 PM	SiCl4 pre valve closed
11/18/2011	6:40:48 PM	SiCl4 post valve closed
11/18/2011	6:40:48 PM	Bypass valve closed
11/18/2011	6:40:48 PM	Bubbler valve closed
11/18/2011	6:40:48 PM	Helium valve opened
11/18/2011	6:40:48 PM	Main Vac valve opened
11/18/2011	6:40:48 PM	Helium MFC set to  20.000000
11/18/2011	6:40:48 PM	H2 MFC set to  0.000000
11/18/2011	6:40:48 PM	BCl3 MFC set to  0.000000
11/18/2011	6:40:48 PM	PHl3 MFC set to  0.000000
11/18/2011	6:40:48 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:40:48 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:40:49 PM	Tube furnace set to 150
11/18/2011	6:41:19 PM	Helium valve closed
11/18/2011	6:41:19 PM	H2 valve closed
11/18/2011	6:41:19 PM	BCl3 valve closed
11/18/2011	6:41:19 PM	PH3 valve closed
11/18/2011	6:41:19 PM	SiCl4 pre valve closed
11/18/2011	6:41:19 PM	SiCl4 post valve closed
11/18/2011	6:41:19 PM	Bypass valve closed
11/18/2011	6:41:19 PM	Bubbler valve closed
11/18/2011	6:41:19 PM	Main Vac valve opened
11/18/2011	6:41:19 PM	Helium MFC set to  0.000000
11/18/2011	6:41:19 PM	H2 MFC set to  0.000000
11/18/2011	6:41:19 PM	BCl3 MFC set to  0.000000
11/18/2011	6:41:19 PM	PHl3 MFC set to  0.000000
11/18/2011	6:41:19 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:41:19 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:41:19 PM	Tube furnace set to 150
11/18/2011	6:41:41 PM	Run aborted at 6:41 PM
11/18/2011	6:41:41 PM	Helium valve closed
11/18/2011	6:41:41 PM	H2 valve closed
11/18/2011	6:41:41 PM	BCl3 valve closed
11/18/2011	6:41:41 PM	PH3 valve closed
11/18/2011	6:41:41 PM	SiCl4 pre valve closed
11/18/2011	6:41:41 PM	SiCl4 post valve closed
11/18/2011	6:41:41 PM	Bypass valve closed
11/18/2011	6:41:41 PM	Main Vac valve closed
11/18/2011	6:41:41 PM	Bubbler valve closed
11/18/2011	6:41:41 PM	Helium MFC set to  0.000000
11/18/2011	6:41:41 PM	H2 MFC set to  0.000000
11/18/2011	6:41:41 PM	BCl3 MFC set to  0.000000
11/18/2011	6:41:41 PM	PHl3 MFC set to  0.000000
11/18/2011	6:41:41 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:41:41 PM	Tube furnace set to 0
11/18/2011	6:41:43 PM	Main Vac valve opened
11/18/2011	6:42:01 PM	Recipe started at 6:41 PM
11/18/2011	6:42:01 PM	Helium valve closed
11/18/2011	6:42:01 PM	H2 valve closed
11/18/2011	6:42:01 PM	BCl3 valve closed
11/18/2011	6:42:01 PM	PH3 valve closed
11/18/2011	6:42:01 PM	SiCl4 pre valve closed
11/18/2011	6:42:01 PM	SiCl4 post valve closed
11/18/2011	6:42:01 PM	Main Vac valve closed
11/18/2011	6:42:01 PM	Bubbler valve closed
11/18/2011	6:42:01 PM	Bypass valve opened
11/18/2011	6:42:01 PM	Helium MFC set to  0.000000
11/18/2011	6:42:01 PM	H2 MFC set to  0.000000
11/18/2011	6:42:01 PM	BCl3 MFC set to  0.000000
11/18/2011	6:42:01 PM	PHl3 MFC set to  0.000000
11/18/2011	6:42:01 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:42:01 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:42:01 PM	Tube furnace set to 180
11/18/2011	6:42:01 PM	Helium valve closed
11/18/2011	6:42:01 PM	H2 valve closed
11/18/2011	6:42:01 PM	BCl3 valve closed
11/18/2011	6:42:01 PM	PH3 valve closed
11/18/2011	6:42:01 PM	SiCl4 pre valve closed
11/18/2011	6:42:01 PM	SiCl4 post valve closed
11/18/2011	6:42:01 PM	Main Vac valve closed
11/18/2011	6:42:01 PM	Bubbler valve closed
11/18/2011	6:42:01 PM	Bypass valve opened
11/18/2011	6:42:01 PM	Helium MFC set to  0.000000
11/18/2011	6:42:01 PM	H2 MFC set to  0.000000
11/18/2011	6:42:01 PM	BCl3 MFC set to  0.000000
11/18/2011	6:42:01 PM	PHl3 MFC set to  0.000000
11/18/2011	6:42:01 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:42:01 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:42:01 PM	Tube furnace set to 150
11/18/2011	6:42:31 PM	Helium valve closed
11/18/2011	6:42:31 PM	H2 valve closed
11/18/2011	6:42:31 PM	BCl3 valve closed
11/18/2011	6:42:31 PM	PH3 valve closed
11/18/2011	6:42:31 PM	SiCl4 pre valve closed
11/18/2011	6:42:31 PM	SiCl4 post valve closed
11/18/2011	6:42:31 PM	Bypass valve closed
11/18/2011	6:42:31 PM	Bubbler valve closed
11/18/2011	6:42:31 PM	Main Vac valve opened
11/18/2011	6:42:31 PM	Helium MFC set to  0.000000
11/18/2011	6:42:31 PM	H2 MFC set to  0.000000
11/18/2011	6:42:31 PM	BCl3 MFC set to  0.000000
11/18/2011	6:42:31 PM	PHl3 MFC set to  0.000000
11/18/2011	6:42:31 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:42:31 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:42:31 PM	Tube furnace set to 180
11/18/2011	6:43:01 PM	H2 valve closed
11/18/2011	6:43:01 PM	BCl3 valve closed
11/18/2011	6:43:01 PM	PH3 valve closed
11/18/2011	6:43:01 PM	SiCl4 pre valve closed
11/18/2011	6:43:01 PM	SiCl4 post valve closed
11/18/2011	6:43:01 PM	Bypass valve closed
11/18/2011	6:43:01 PM	Bubbler valve closed
11/18/2011	6:43:01 PM	Helium valve opened
11/18/2011	6:43:01 PM	Main Vac valve opened
11/18/2011	6:43:01 PM	Helium MFC set to  20.000000
11/18/2011	6:43:01 PM	H2 MFC set to  0.000000
11/18/2011	6:43:01 PM	BCl3 MFC set to  0.000000
11/18/2011	6:43:01 PM	PHl3 MFC set to  0.000000
11/18/2011	6:43:01 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:43:01 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:43:02 PM	Tube furnace set to 180
11/18/2011	6:43:32 PM	Helium valve closed
11/18/2011	6:43:32 PM	H2 valve closed
11/18/2011	6:43:32 PM	BCl3 valve closed
11/18/2011	6:43:32 PM	PH3 valve closed
11/18/2011	6:43:32 PM	SiCl4 pre valve closed
11/18/2011	6:43:32 PM	SiCl4 post valve closed
11/18/2011	6:43:32 PM	Bypass valve closed
11/18/2011	6:43:32 PM	Bubbler valve closed
11/18/2011	6:43:32 PM	Main Vac valve opened
11/18/2011	6:43:32 PM	Helium MFC set to  0.000000
11/18/2011	6:43:32 PM	H2 MFC set to  0.000000
11/18/2011	6:43:32 PM	BCl3 MFC set to  0.000000
11/18/2011	6:43:32 PM	PHl3 MFC set to  0.000000
11/18/2011	6:43:32 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:43:32 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:43:32 PM	Tube furnace set to 150
11/18/2011	6:44:02 PM	H2 valve closed
11/18/2011	6:44:02 PM	BCl3 valve closed
11/18/2011	6:44:02 PM	PH3 valve closed
11/18/2011	6:44:02 PM	SiCl4 pre valve closed
11/18/2011	6:44:02 PM	SiCl4 post valve closed
11/18/2011	6:44:02 PM	Bypass valve closed
11/18/2011	6:44:02 PM	Bubbler valve closed
11/18/2011	6:44:02 PM	Helium valve opened
11/18/2011	6:44:02 PM	Main Vac valve opened
11/18/2011	6:44:02 PM	Helium MFC set to  20.000000
11/18/2011	6:44:02 PM	H2 MFC set to  0.000000
11/18/2011	6:44:02 PM	BCl3 MFC set to  0.000000
11/18/2011	6:44:02 PM	PHl3 MFC set to  0.000000
11/18/2011	6:44:02 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:44:02 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:44:02 PM	Tube furnace set to 180
11/18/2011	6:44:06 PM	Run aborted at 6:44 PM
11/18/2011	6:44:06 PM	Helium valve closed
11/18/2011	6:44:06 PM	H2 valve closed
11/18/2011	6:44:06 PM	BCl3 valve closed
11/18/2011	6:44:06 PM	PH3 valve closed
11/18/2011	6:44:06 PM	SiCl4 pre valve closed
11/18/2011	6:44:06 PM	SiCl4 post valve closed
11/18/2011	6:44:06 PM	Bypass valve closed
11/18/2011	6:44:06 PM	Main Vac valve closed
11/18/2011	6:44:06 PM	Bubbler valve closed
11/18/2011	6:44:06 PM	Helium MFC set to  0.000000
11/18/2011	6:44:06 PM	H2 MFC set to  0.000000
11/18/2011	6:44:06 PM	BCl3 MFC set to  0.000000
11/18/2011	6:44:06 PM	PHl3 MFC set to  0.000000
11/18/2011	6:44:06 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:44:06 PM	Tube furnace set to 0
11/18/2011	6:44:08 PM	Main Vac valve opened
11/18/2011	6:45:31 PM	Main Vac valve closed
11/18/2011	6:45:41 PM	Main Vac valve opened
11/18/2011	6:46:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
11/18/2011	6:46:13 PM	Recipe started at 6:46 PM
11/18/2011	6:46:13 PM	Helium valve closed
11/18/2011	6:46:13 PM	H2 valve closed
11/18/2011	6:46:13 PM	BCl3 valve closed
11/18/2011	6:46:13 PM	PH3 valve closed
11/18/2011	6:46:13 PM	SiCl4 pre valve closed
11/18/2011	6:46:13 PM	SiCl4 post valve closed
11/18/2011	6:46:13 PM	Main Vac valve closed
11/18/2011	6:46:13 PM	Bubbler valve closed
11/18/2011	6:46:13 PM	Bypass valve opened
11/18/2011	6:46:13 PM	Helium MFC set to  0.000000
11/18/2011	6:46:13 PM	H2 MFC set to  0.000000
11/18/2011	6:46:13 PM	BCl3 MFC set to  0.000000
11/18/2011	6:46:13 PM	PHl3 MFC set to  0.000000
11/18/2011	6:46:13 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:46:13 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:46:13 PM	Tube furnace set to 0
11/18/2011	6:46:13 PM	Helium valve closed
11/18/2011	6:46:13 PM	H2 valve closed
11/18/2011	6:46:13 PM	BCl3 valve closed
11/18/2011	6:46:13 PM	PH3 valve closed
11/18/2011	6:46:13 PM	SiCl4 pre valve closed
11/18/2011	6:46:13 PM	SiCl4 post valve closed
11/18/2011	6:46:13 PM	Main Vac valve closed
11/18/2011	6:46:13 PM	Bubbler valve closed
11/18/2011	6:46:13 PM	Bypass valve opened
11/18/2011	6:46:13 PM	Helium MFC set to  0.000000
11/18/2011	6:46:13 PM	H2 MFC set to  0.000000
11/18/2011	6:46:13 PM	BCl3 MFC set to  0.000000
11/18/2011	6:46:13 PM	PHl3 MFC set to  0.000000
11/18/2011	6:46:13 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:46:13 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:46:13 PM	Tube furnace set to 0
11/18/2011	6:46:17 PM	Helium valve closed
11/18/2011	6:46:17 PM	H2 valve closed
11/18/2011	6:46:17 PM	BCl3 valve closed
11/18/2011	6:46:17 PM	PH3 valve closed
11/18/2011	6:46:17 PM	SiCl4 pre valve closed
11/18/2011	6:46:17 PM	SiCl4 post valve closed
11/18/2011	6:46:17 PM	Bypass valve closed
11/18/2011	6:46:17 PM	Bubbler valve closed
11/18/2011	6:46:17 PM	Main Vac valve opened
11/18/2011	6:46:17 PM	Helium MFC set to  0.000000
11/18/2011	6:46:17 PM	H2 MFC set to  0.000000
11/18/2011	6:46:17 PM	BCl3 MFC set to  0.000000
11/18/2011	6:46:17 PM	PHl3 MFC set to  0.000000
11/18/2011	6:46:17 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:46:17 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:46:17 PM	Tube furnace set to 0
11/18/2011	6:46:47 PM	H2 valve closed
11/18/2011	6:46:47 PM	BCl3 valve closed
11/18/2011	6:46:47 PM	PH3 valve closed
11/18/2011	6:46:47 PM	SiCl4 pre valve closed
11/18/2011	6:46:47 PM	SiCl4 post valve closed
11/18/2011	6:46:47 PM	Bypass valve closed
11/18/2011	6:46:47 PM	Bubbler valve closed
11/18/2011	6:46:47 PM	Helium valve opened
11/18/2011	6:46:47 PM	Main Vac valve opened
11/18/2011	6:46:47 PM	Helium MFC set to  20.000000
11/18/2011	6:46:47 PM	H2 MFC set to  0.000000
11/18/2011	6:46:47 PM	BCl3 MFC set to  0.000000
11/18/2011	6:46:47 PM	PHl3 MFC set to  0.000000
11/18/2011	6:46:47 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:46:47 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:46:47 PM	Tube furnace set to 0
11/18/2011	6:47:17 PM	Helium valve closed
11/18/2011	6:47:17 PM	H2 valve closed
11/18/2011	6:47:17 PM	BCl3 valve closed
11/18/2011	6:47:17 PM	PH3 valve closed
11/18/2011	6:47:17 PM	SiCl4 pre valve closed
11/18/2011	6:47:17 PM	SiCl4 post valve closed
11/18/2011	6:47:17 PM	Bypass valve closed
11/18/2011	6:47:17 PM	Bubbler valve closed
11/18/2011	6:47:17 PM	Main Vac valve opened
11/18/2011	6:47:17 PM	Helium MFC set to  0.000000
11/18/2011	6:47:17 PM	H2 MFC set to  0.000000
11/18/2011	6:47:17 PM	BCl3 MFC set to  0.000000
11/18/2011	6:47:17 PM	PHl3 MFC set to  0.000000
11/18/2011	6:47:17 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:47:17 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:47:17 PM	Tube furnace set to 0
11/18/2011	6:47:47 PM	H2 valve closed
11/18/2011	6:47:47 PM	BCl3 valve closed
11/18/2011	6:47:47 PM	PH3 valve closed
11/18/2011	6:47:47 PM	SiCl4 pre valve closed
11/18/2011	6:47:47 PM	SiCl4 post valve closed
11/18/2011	6:47:47 PM	Bypass valve closed
11/18/2011	6:47:47 PM	Bubbler valve closed
11/18/2011	6:47:47 PM	Helium valve opened
11/18/2011	6:47:47 PM	Main Vac valve opened
11/18/2011	6:47:47 PM	Helium MFC set to  20.000000
11/18/2011	6:47:47 PM	H2 MFC set to  0.000000
11/18/2011	6:47:47 PM	BCl3 MFC set to  0.000000
11/18/2011	6:47:47 PM	PHl3 MFC set to  0.000000
11/18/2011	6:47:47 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:47:47 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:47:47 PM	Tube furnace set to 0
11/18/2011	6:48:17 PM	Helium valve closed
11/18/2011	6:48:17 PM	H2 valve closed
11/18/2011	6:48:17 PM	BCl3 valve closed
11/18/2011	6:48:17 PM	PH3 valve closed
11/18/2011	6:48:17 PM	SiCl4 pre valve closed
11/18/2011	6:48:17 PM	SiCl4 post valve closed
11/18/2011	6:48:17 PM	Bypass valve closed
11/18/2011	6:48:17 PM	Bubbler valve closed
11/18/2011	6:48:17 PM	Main Vac valve opened
11/18/2011	6:48:17 PM	Helium MFC set to  0.000000
11/18/2011	6:48:17 PM	H2 MFC set to  0.000000
11/18/2011	6:48:17 PM	BCl3 MFC set to  0.000000
11/18/2011	6:48:17 PM	PHl3 MFC set to  0.000000
11/18/2011	6:48:17 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:48:17 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:48:18 PM	Tube furnace set to 0
11/18/2011	6:48:48 PM	H2 valve closed
11/18/2011	6:48:48 PM	BCl3 valve closed
11/18/2011	6:48:48 PM	PH3 valve closed
11/18/2011	6:48:48 PM	SiCl4 pre valve closed
11/18/2011	6:48:48 PM	SiCl4 post valve closed
11/18/2011	6:48:48 PM	Bypass valve closed
11/18/2011	6:48:48 PM	Bubbler valve closed
11/18/2011	6:48:48 PM	Helium valve opened
11/18/2011	6:48:48 PM	Main Vac valve opened
11/18/2011	6:48:48 PM	Helium MFC set to  20.000000
11/18/2011	6:48:48 PM	H2 MFC set to  0.000000
11/18/2011	6:48:48 PM	BCl3 MFC set to  0.000000
11/18/2011	6:48:48 PM	PHl3 MFC set to  0.000000
11/18/2011	6:48:48 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:48:48 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:48:48 PM	Tube furnace set to 0
11/18/2011	6:49:18 PM	Helium valve closed
11/18/2011	6:49:18 PM	H2 valve closed
11/18/2011	6:49:18 PM	BCl3 valve closed
11/18/2011	6:49:18 PM	PH3 valve closed
11/18/2011	6:49:18 PM	SiCl4 pre valve closed
11/18/2011	6:49:18 PM	SiCl4 post valve closed
11/18/2011	6:49:18 PM	Bypass valve closed
11/18/2011	6:49:18 PM	Bubbler valve closed
11/18/2011	6:49:18 PM	Main Vac valve opened
11/18/2011	6:49:18 PM	Helium MFC set to  0.000000
11/18/2011	6:49:18 PM	H2 MFC set to  0.000000
11/18/2011	6:49:18 PM	BCl3 MFC set to  0.000000
11/18/2011	6:49:18 PM	PHl3 MFC set to  0.000000
11/18/2011	6:49:18 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:49:18 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:49:18 PM	Tube furnace set to 0
11/18/2011	6:49:48 PM	H2 valve closed
11/18/2011	6:49:48 PM	BCl3 valve closed
11/18/2011	6:49:48 PM	PH3 valve closed
11/18/2011	6:49:48 PM	SiCl4 pre valve closed
11/18/2011	6:49:48 PM	SiCl4 post valve closed
11/18/2011	6:49:48 PM	Bypass valve closed
11/18/2011	6:49:48 PM	Bubbler valve closed
11/18/2011	6:49:48 PM	Helium valve opened
11/18/2011	6:49:48 PM	Main Vac valve opened
11/18/2011	6:49:48 PM	Helium MFC set to  20.000000
11/18/2011	6:49:48 PM	H2 MFC set to  0.000000
11/18/2011	6:49:48 PM	BCl3 MFC set to  0.000000
11/18/2011	6:49:48 PM	PHl3 MFC set to  0.000000
11/18/2011	6:49:48 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:49:48 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:49:48 PM	Tube furnace set to 0
11/18/2011	6:50:18 PM	Helium valve closed
11/18/2011	6:50:18 PM	H2 valve closed
11/18/2011	6:50:18 PM	BCl3 valve closed
11/18/2011	6:50:18 PM	PH3 valve closed
11/18/2011	6:50:18 PM	SiCl4 pre valve closed
11/18/2011	6:50:18 PM	SiCl4 post valve closed
11/18/2011	6:50:18 PM	Bypass valve closed
11/18/2011	6:50:18 PM	Bubbler valve closed
11/18/2011	6:50:18 PM	Main Vac valve opened
11/18/2011	6:50:18 PM	Helium MFC set to  0.000000
11/18/2011	6:50:18 PM	H2 MFC set to  0.000000
11/18/2011	6:50:18 PM	BCl3 MFC set to  0.000000
11/18/2011	6:50:18 PM	PHl3 MFC set to  0.000000
11/18/2011	6:50:18 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:50:18 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:50:18 PM	Tube furnace set to 0
11/18/2011	6:50:48 PM	H2 valve closed
11/18/2011	6:50:48 PM	BCl3 valve closed
11/18/2011	6:50:48 PM	PH3 valve closed
11/18/2011	6:50:48 PM	SiCl4 pre valve closed
11/18/2011	6:50:48 PM	SiCl4 post valve closed
11/18/2011	6:50:48 PM	Bypass valve closed
11/18/2011	6:50:48 PM	Bubbler valve closed
11/18/2011	6:50:48 PM	Helium valve opened
11/18/2011	6:50:48 PM	Main Vac valve opened
11/18/2011	6:50:48 PM	Helium MFC set to  20.000000
11/18/2011	6:50:49 PM	H2 MFC set to  0.000000
11/18/2011	6:50:49 PM	BCl3 MFC set to  0.000000
11/18/2011	6:50:49 PM	PHl3 MFC set to  0.000000
11/18/2011	6:50:49 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:50:49 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:50:49 PM	Tube furnace set to 0
11/18/2011	6:51:19 PM	Helium valve closed
11/18/2011	6:51:19 PM	H2 valve closed
11/18/2011	6:51:19 PM	BCl3 valve closed
11/18/2011	6:51:19 PM	PH3 valve closed
11/18/2011	6:51:19 PM	SiCl4 pre valve closed
11/18/2011	6:51:19 PM	SiCl4 post valve closed
11/18/2011	6:51:19 PM	Bypass valve closed
11/18/2011	6:51:19 PM	Bubbler valve closed
11/18/2011	6:51:19 PM	Main Vac valve opened
11/18/2011	6:51:19 PM	Helium MFC set to  0.000000
11/18/2011	6:51:19 PM	H2 MFC set to  0.000000
11/18/2011	6:51:19 PM	BCl3 MFC set to  0.000000
11/18/2011	6:51:19 PM	PHl3 MFC set to  0.000000
11/18/2011	6:51:19 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:51:19 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:51:19 PM	Tube furnace set to 0
11/18/2011	6:51:49 PM	H2 valve closed
11/18/2011	6:51:49 PM	BCl3 valve closed
11/18/2011	6:51:49 PM	PH3 valve closed
11/18/2011	6:51:49 PM	SiCl4 pre valve closed
11/18/2011	6:51:49 PM	SiCl4 post valve closed
11/18/2011	6:51:49 PM	Bypass valve closed
11/18/2011	6:51:49 PM	Bubbler valve closed
11/18/2011	6:51:49 PM	Helium valve opened
11/18/2011	6:51:49 PM	Main Vac valve opened
11/18/2011	6:51:49 PM	Helium MFC set to  20.000000
11/18/2011	6:51:49 PM	H2 MFC set to  0.000000
11/18/2011	6:51:49 PM	BCl3 MFC set to  0.000000
11/18/2011	6:51:49 PM	PHl3 MFC set to  0.000000
11/18/2011	6:51:49 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:51:49 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:51:49 PM	Tube furnace set to 0
11/18/2011	6:52:19 PM	Helium valve closed
11/18/2011	6:52:19 PM	H2 valve closed
11/18/2011	6:52:19 PM	BCl3 valve closed
11/18/2011	6:52:19 PM	PH3 valve closed
11/18/2011	6:52:19 PM	SiCl4 pre valve closed
11/18/2011	6:52:19 PM	SiCl4 post valve closed
11/18/2011	6:52:19 PM	Bypass valve closed
11/18/2011	6:52:19 PM	Bubbler valve closed
11/18/2011	6:52:19 PM	Main Vac valve opened
11/18/2011	6:52:19 PM	Helium MFC set to  0.000000
11/18/2011	6:52:19 PM	H2 MFC set to  0.000000
11/18/2011	6:52:19 PM	BCl3 MFC set to  0.000000
11/18/2011	6:52:19 PM	PHl3 MFC set to  0.000000
11/18/2011	6:52:19 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:52:19 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:52:19 PM	Tube furnace set to 0
11/18/2011	6:52:49 PM	H2 valve closed
11/18/2011	6:52:49 PM	BCl3 valve closed
11/18/2011	6:52:49 PM	PH3 valve closed
11/18/2011	6:52:49 PM	SiCl4 pre valve closed
11/18/2011	6:52:49 PM	SiCl4 post valve closed
11/18/2011	6:52:49 PM	Bypass valve closed
11/18/2011	6:52:49 PM	Bubbler valve closed
11/18/2011	6:52:49 PM	Helium valve opened
11/18/2011	6:52:49 PM	Main Vac valve opened
11/18/2011	6:52:49 PM	Helium MFC set to  20.000000
11/18/2011	6:52:49 PM	H2 MFC set to  0.000000
11/18/2011	6:52:49 PM	BCl3 MFC set to  0.000000
11/18/2011	6:52:49 PM	PHl3 MFC set to  0.000000
11/18/2011	6:52:49 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:52:49 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:52:49 PM	Tube furnace set to 0
11/18/2011	6:53:20 PM	Helium valve closed
11/18/2011	6:53:20 PM	H2 valve closed
11/18/2011	6:53:20 PM	BCl3 valve closed
11/18/2011	6:53:20 PM	PH3 valve closed
11/18/2011	6:53:20 PM	SiCl4 pre valve closed
11/18/2011	6:53:20 PM	SiCl4 post valve closed
11/18/2011	6:53:20 PM	Bypass valve closed
11/18/2011	6:53:20 PM	Bubbler valve closed
11/18/2011	6:53:20 PM	Main Vac valve opened
11/18/2011	6:53:20 PM	Helium MFC set to  0.000000
11/18/2011	6:53:20 PM	H2 MFC set to  0.000000
11/18/2011	6:53:20 PM	BCl3 MFC set to  0.000000
11/18/2011	6:53:20 PM	PHl3 MFC set to  0.000000
11/18/2011	6:53:20 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:53:20 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:53:20 PM	Tube furnace set to 0
11/18/2011	6:53:50 PM	H2 valve closed
11/18/2011	6:53:50 PM	BCl3 valve closed
11/18/2011	6:53:50 PM	PH3 valve closed
11/18/2011	6:53:50 PM	SiCl4 pre valve closed
11/18/2011	6:53:50 PM	SiCl4 post valve closed
11/18/2011	6:53:50 PM	Bypass valve closed
11/18/2011	6:53:50 PM	Bubbler valve closed
11/18/2011	6:53:50 PM	Helium valve opened
11/18/2011	6:53:50 PM	Main Vac valve opened
11/18/2011	6:53:50 PM	Helium MFC set to  20.000000
11/18/2011	6:53:50 PM	H2 MFC set to  0.000000
11/18/2011	6:53:50 PM	BCl3 MFC set to  0.000000
11/18/2011	6:53:50 PM	PHl3 MFC set to  0.000000
11/18/2011	6:53:50 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:53:50 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:53:50 PM	Tube furnace set to 0
11/18/2011	6:54:20 PM	Helium valve closed
11/18/2011	6:54:20 PM	H2 valve closed
11/18/2011	6:54:20 PM	BCl3 valve closed
11/18/2011	6:54:20 PM	PH3 valve closed
11/18/2011	6:54:20 PM	SiCl4 pre valve closed
11/18/2011	6:54:20 PM	SiCl4 post valve closed
11/18/2011	6:54:20 PM	Bypass valve closed
11/18/2011	6:54:20 PM	Bubbler valve closed
11/18/2011	6:54:20 PM	Main Vac valve opened
11/18/2011	6:54:20 PM	Helium MFC set to  0.000000
11/18/2011	6:54:20 PM	H2 MFC set to  0.000000
11/18/2011	6:54:20 PM	BCl3 MFC set to  0.000000
11/18/2011	6:54:20 PM	PHl3 MFC set to  0.000000
11/18/2011	6:54:20 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:54:20 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:54:20 PM	Tube furnace set to 0
11/18/2011	6:54:50 PM	H2 valve closed
11/18/2011	6:54:50 PM	BCl3 valve closed
11/18/2011	6:54:50 PM	PH3 valve closed
11/18/2011	6:54:50 PM	SiCl4 pre valve closed
11/18/2011	6:54:50 PM	SiCl4 post valve closed
11/18/2011	6:54:50 PM	Bypass valve closed
11/18/2011	6:54:50 PM	Bubbler valve closed
11/18/2011	6:54:50 PM	Helium valve opened
11/18/2011	6:54:50 PM	Main Vac valve opened
11/18/2011	6:54:50 PM	Helium MFC set to  20.000000
11/18/2011	6:54:50 PM	H2 MFC set to  0.000000
11/18/2011	6:54:50 PM	BCl3 MFC set to  0.000000
11/18/2011	6:54:50 PM	PHl3 MFC set to  0.000000
11/18/2011	6:54:50 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:54:50 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:54:50 PM	Tube furnace set to 0
11/18/2011	6:55:20 PM	Helium valve closed
11/18/2011	6:55:20 PM	H2 valve closed
11/18/2011	6:55:20 PM	BCl3 valve closed
11/18/2011	6:55:20 PM	PH3 valve closed
11/18/2011	6:55:20 PM	SiCl4 pre valve closed
11/18/2011	6:55:20 PM	SiCl4 post valve closed
11/18/2011	6:55:20 PM	Bypass valve closed
11/18/2011	6:55:20 PM	Bubbler valve closed
11/18/2011	6:55:20 PM	Main Vac valve opened
11/18/2011	6:55:20 PM	Helium MFC set to  0.000000
11/18/2011	6:55:20 PM	H2 MFC set to  0.000000
11/18/2011	6:55:20 PM	BCl3 MFC set to  0.000000
11/18/2011	6:55:20 PM	PHl3 MFC set to  0.000000
11/18/2011	6:55:20 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:55:20 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:55:21 PM	Tube furnace set to 0
11/18/2011	6:55:48 PM	Run aborted at 6:55 PM
11/18/2011	6:55:48 PM	Helium valve closed
11/18/2011	6:55:48 PM	H2 valve closed
11/18/2011	6:55:48 PM	BCl3 valve closed
11/18/2011	6:55:48 PM	PH3 valve closed
11/18/2011	6:55:48 PM	SiCl4 pre valve closed
11/18/2011	6:55:48 PM	SiCl4 post valve closed
11/18/2011	6:55:48 PM	Bypass valve closed
11/18/2011	6:55:48 PM	Main Vac valve closed
11/18/2011	6:55:48 PM	Bubbler valve closed
11/18/2011	6:55:48 PM	Helium MFC set to  0.000000
11/18/2011	6:55:48 PM	H2 MFC set to  0.000000
11/18/2011	6:55:48 PM	BCl3 MFC set to  0.000000
11/18/2011	6:55:48 PM	PHl3 MFC set to  0.000000
11/18/2011	6:55:48 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:55:48 PM	Tube furnace set to 0
11/18/2011	6:55:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
11/18/2011	6:55:50 PM	Main Vac valve opened
11/18/2011	6:56:04 PM	Main Vac valve closed
11/18/2011	6:56:14 PM	Main Vac valve opened
11/18/2011	6:57:06 PM	Recipe started at 6:57 PM
11/18/2011	6:57:06 PM	Helium valve closed
11/18/2011	6:57:06 PM	H2 valve closed
11/18/2011	6:57:06 PM	BCl3 valve closed
11/18/2011	6:57:06 PM	PH3 valve closed
11/18/2011	6:57:06 PM	SiCl4 pre valve closed
11/18/2011	6:57:06 PM	SiCl4 post valve closed
11/18/2011	6:57:06 PM	Main Vac valve closed
11/18/2011	6:57:06 PM	Bypass valve closed
11/18/2011	6:57:06 PM	Bubbler valve closed
11/18/2011	6:57:06 PM	Helium MFC set to  0.000000
11/18/2011	6:57:06 PM	H2 MFC set to  0.000000
11/18/2011	6:57:06 PM	BCl3 MFC set to  0.000000
11/18/2011	6:57:06 PM	PHl3 MFC set to  0.000000
11/18/2011	6:57:06 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:57:06 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:57:06 PM	Tube furnace set to 0
11/18/2011	6:57:09 PM	Helium valve closed
11/18/2011	6:57:09 PM	BCl3 valve closed
11/18/2011	6:57:09 PM	PH3 valve closed
11/18/2011	6:57:09 PM	SiCl4 pre valve closed
11/18/2011	6:57:09 PM	SiCl4 post valve closed
11/18/2011	6:57:09 PM	Main Vac valve closed
11/18/2011	6:57:09 PM	Bypass valve closed
11/18/2011	6:57:09 PM	Bubbler valve closed
11/18/2011	6:57:09 PM	H2 valve opened
11/18/2011	6:57:09 PM	Helium MFC set to  0.000000
11/18/2011	6:57:09 PM	H2 MFC set to  500.000000
11/18/2011	6:57:09 PM	BCl3 MFC set to  0.000000
11/18/2011	6:57:09 PM	PHl3 MFC set to  0.000000
11/18/2011	6:57:09 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:57:09 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:57:09 PM	Tube furnace set to 50
11/18/2011	6:58:10 PM	Helium valve closed
11/18/2011	6:58:10 PM	BCl3 valve closed
11/18/2011	6:58:10 PM	PH3 valve closed
11/18/2011	6:58:10 PM	SiCl4 pre valve closed
11/18/2011	6:58:10 PM	SiCl4 post valve closed
11/18/2011	6:58:10 PM	Main Vac valve closed
11/18/2011	6:58:10 PM	Bypass valve closed
11/18/2011	6:58:10 PM	H2 valve opened
11/18/2011	6:58:10 PM	Bubbler valve opened
11/18/2011	6:58:10 PM	Helium MFC set to  0.000000
11/18/2011	6:58:10 PM	H2 MFC set to  500.000000
11/18/2011	6:58:10 PM	BCl3 MFC set to  0.000000
11/18/2011	6:58:10 PM	PHl3 MFC set to  0.000000
11/18/2011	6:58:10 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:58:10 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:58:11 PM	Tube furnace set to 50
11/18/2011	6:58:12 PM	Helium valve closed
11/18/2011	6:58:12 PM	BCl3 valve closed
11/18/2011	6:58:12 PM	PH3 valve closed
11/18/2011	6:58:12 PM	SiCl4 pre valve closed
11/18/2011	6:58:12 PM	SiCl4 post valve closed
11/18/2011	6:58:12 PM	Main Vac valve closed
11/18/2011	6:58:12 PM	Bypass valve closed
11/18/2011	6:58:12 PM	H2 valve opened
11/18/2011	6:58:12 PM	Bubbler valve opened
11/18/2011	6:58:12 PM	Helium MFC set to  0.000000
11/18/2011	6:58:12 PM	H2 MFC set to  495.000000
11/18/2011	6:58:12 PM	BCl3 MFC set to  0.000000
11/18/2011	6:58:12 PM	PHl3 MFC set to  0.000000
11/18/2011	6:58:12 PM	SiCl4 MFC set to  0.000000
11/18/2011	6:58:12 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	6:58:12 PM	Tube furnace set to 1000
11/18/2011	7:18:12 PM	Helium valve closed
11/18/2011	7:18:12 PM	BCl3 valve closed
11/18/2011	7:18:12 PM	PH3 valve closed
11/18/2011	7:18:12 PM	Main Vac valve closed
11/18/2011	7:18:12 PM	Bypass valve closed
11/18/2011	7:18:12 PM	H2 valve opened
11/18/2011	7:18:12 PM	SiCl4 pre valve opened
11/18/2011	7:18:12 PM	SiCl4 post valve opened
11/18/2011	7:18:12 PM	Bubbler valve opened
11/18/2011	7:18:12 PM	Helium MFC set to  0.000000
11/18/2011	7:18:12 PM	H2 MFC set to  495.000000
11/18/2011	7:18:12 PM	BCl3 MFC set to  0.000000
11/18/2011	7:18:12 PM	PHl3 MFC set to  0.000000
11/18/2011	7:18:12 PM	SiCl4 MFC set to  24.000000
11/18/2011	7:18:12 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	7:18:12 PM	Tube furnace set to 1000
11/18/2011	7:38:12 PM	Helium valve closed
11/18/2011	7:38:12 PM	BCl3 valve closed
11/18/2011	7:38:12 PM	PH3 valve closed
11/18/2011	7:38:12 PM	SiCl4 pre valve closed
11/18/2011	7:38:12 PM	SiCl4 post valve closed
11/18/2011	7:38:12 PM	Main Vac valve closed
11/18/2011	7:38:12 PM	Bypass valve closed
11/18/2011	7:38:12 PM	H2 valve opened
11/18/2011	7:38:12 PM	Bubbler valve opened
11/18/2011	7:38:12 PM	Helium MFC set to  0.000000
11/18/2011	7:38:12 PM	H2 MFC set to  480.000000
11/18/2011	7:38:12 PM	BCl3 MFC set to  0.000000
11/18/2011	7:38:12 PM	PHl3 MFC set to  0.000000
11/18/2011	7:38:12 PM	SiCl4 MFC set to  0.000000
11/18/2011	7:38:12 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	7:38:12 PM	Tube furnace set to 750
11/18/2011	7:48:12 PM	H2 valve closed
11/18/2011	7:48:12 PM	BCl3 valve closed
11/18/2011	7:48:12 PM	PH3 valve closed
11/18/2011	7:48:12 PM	SiCl4 pre valve closed
11/18/2011	7:48:12 PM	SiCl4 post valve closed
11/18/2011	7:48:12 PM	Main Vac valve closed
11/18/2011	7:48:12 PM	Bypass valve closed
11/18/2011	7:48:12 PM	Helium valve opened
11/18/2011	7:48:12 PM	Bubbler valve opened
11/18/2011	7:48:12 PM	Helium MFC set to  400.000000
11/18/2011	7:48:12 PM	H2 MFC set to  0.000000
11/18/2011	7:48:12 PM	BCl3 MFC set to  0.000000
11/18/2011	7:48:12 PM	PHl3 MFC set to  0.000000
11/18/2011	7:48:12 PM	SiCl4 MFC set to  0.000000
11/18/2011	7:48:12 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	7:48:12 PM	Tube furnace set to 0
11/18/2011	7:59:52 PM	Run aborted at 7:59 PM
11/18/2011	7:59:52 PM	Helium valve closed
11/18/2011	7:59:52 PM	H2 valve closed
11/18/2011	7:59:52 PM	BCl3 valve closed
11/18/2011	7:59:52 PM	PH3 valve closed
11/18/2011	7:59:52 PM	SiCl4 pre valve closed
11/18/2011	7:59:52 PM	SiCl4 post valve closed
11/18/2011	7:59:52 PM	Bypass valve closed
11/18/2011	7:59:52 PM	Main Vac valve closed
11/18/2011	7:59:52 PM	Bubbler valve closed
11/18/2011	7:59:52 PM	Helium MFC set to  0.000000
11/18/2011	7:59:52 PM	H2 MFC set to  0.000000
11/18/2011	7:59:52 PM	BCl3 MFC set to  0.000000
11/18/2011	7:59:52 PM	PHl3 MFC set to  0.000000
11/18/2011	7:59:52 PM	SiCl4 MFC set to  0.000000
11/18/2011	7:59:52 PM	Tube furnace set to 0
11/18/2011	7:59:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/18/2011	7:59:56 PM	Recipe started at 7:59 PM
11/18/2011	7:59:56 PM	Helium valve closed
11/18/2011	7:59:56 PM	H2 valve closed
11/18/2011	7:59:56 PM	BCl3 valve closed
11/18/2011	7:59:56 PM	PH3 valve closed
11/18/2011	7:59:56 PM	SiCl4 pre valve closed
11/18/2011	7:59:56 PM	SiCl4 post valve closed
11/18/2011	7:59:56 PM	Main Vac valve closed
11/18/2011	7:59:56 PM	Bypass valve closed
11/18/2011	7:59:56 PM	Bubbler valve closed
11/18/2011	7:59:56 PM	Helium MFC set to  0.000000
11/18/2011	7:59:56 PM	H2 MFC set to  0.000000
11/18/2011	7:59:56 PM	BCl3 MFC set to  0.000000
11/18/2011	7:59:56 PM	PHl3 MFC set to  0.000000
11/18/2011	7:59:56 PM	SiCl4 MFC set to  0.000000
11/18/2011	7:59:56 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	7:59:56 PM	Tube furnace set to 0
11/18/2011	7:59:59 PM	H2 valve closed
11/18/2011	7:59:59 PM	BCl3 valve closed
11/18/2011	7:59:59 PM	PH3 valve closed
11/18/2011	7:59:59 PM	SiCl4 pre valve closed
11/18/2011	7:59:59 PM	SiCl4 post valve closed
11/18/2011	7:59:59 PM	Main Vac valve closed
11/18/2011	7:59:59 PM	Bypass valve closed
11/18/2011	7:59:59 PM	Bubbler valve closed
11/18/2011	7:59:59 PM	Helium valve opened
11/18/2011	7:59:59 PM	Helium MFC set to  500.000000
11/18/2011	7:59:59 PM	H2 MFC set to  0.000000
11/18/2011	7:59:59 PM	BCl3 MFC set to  0.000000
11/18/2011	7:59:59 PM	PHl3 MFC set to  0.000000
11/18/2011	7:59:59 PM	SiCl4 MFC set to  0.000000
11/18/2011	7:59:59 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	7:59:59 PM	Tube furnace set to 0
11/18/2011	7:59:59 PM	Helium valve closed
11/18/2011	7:59:59 PM	H2 valve closed
11/18/2011	7:59:59 PM	BCl3 valve closed
11/18/2011	7:59:59 PM	PH3 valve closed
11/18/2011	7:59:59 PM	SiCl4 pre valve closed
11/18/2011	7:59:59 PM	SiCl4 post valve closed
11/18/2011	7:59:59 PM	Main Vac valve closed
11/18/2011	7:59:59 PM	Bypass valve closed
11/18/2011	7:59:59 PM	Bubbler valve closed
11/18/2011	7:59:59 PM	Helium MFC set to  0.000000
11/18/2011	7:59:59 PM	H2 MFC set to  0.000000
11/18/2011	7:59:59 PM	BCl3 MFC set to  0.000000
11/18/2011	7:59:59 PM	PHl3 MFC set to  0.000000
11/18/2011	7:59:59 PM	SiCl4 MFC set to  0.000000
11/18/2011	7:59:59 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	7:59:59 PM	Tube furnace set to 0
11/18/2011	8:00:00 PM	Run finished at 8:00 PM
11/18/2011	8:00:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/18/2011	8:07:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/18/2011	8:07:38 PM	Recipe started at 8:07 PM
11/18/2011	8:07:38 PM	Helium valve closed
11/18/2011	8:07:38 PM	H2 valve closed
11/18/2011	8:07:38 PM	BCl3 valve closed
11/18/2011	8:07:38 PM	PH3 valve closed
11/18/2011	8:07:38 PM	SiCl4 pre valve closed
11/18/2011	8:07:38 PM	SiCl4 post valve closed
11/18/2011	8:07:38 PM	Main Vac valve closed
11/18/2011	8:07:38 PM	Bubbler valve closed
11/18/2011	8:07:38 PM	Bypass valve opened
11/18/2011	8:07:38 PM	Helium MFC set to  0.000000
11/18/2011	8:07:38 PM	H2 MFC set to  0.000000
11/18/2011	8:07:38 PM	BCl3 MFC set to  0.000000
11/18/2011	8:07:38 PM	PHl3 MFC set to  0.000000
11/18/2011	8:07:38 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:07:38 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:07:38 PM	Tube furnace set to 0
11/18/2011	8:09:43 PM	Helium valve closed
11/18/2011	8:09:43 PM	H2 valve closed
11/18/2011	8:09:43 PM	BCl3 valve closed
11/18/2011	8:09:43 PM	PH3 valve closed
11/18/2011	8:09:43 PM	SiCl4 pre valve closed
11/18/2011	8:09:43 PM	SiCl4 post valve closed
11/18/2011	8:09:43 PM	Main Vac valve closed
11/18/2011	8:09:43 PM	Bubbler valve closed
11/18/2011	8:09:43 PM	Bypass valve opened
11/18/2011	8:09:43 PM	Helium MFC set to  0.000000
11/18/2011	8:09:43 PM	H2 MFC set to  0.000000
11/18/2011	8:09:43 PM	BCl3 MFC set to  0.000000
11/18/2011	8:09:43 PM	PHl3 MFC set to  0.000000
11/18/2011	8:09:43 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:09:43 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:09:43 PM	Tube furnace set to 0
11/18/2011	8:10:43 PM	Helium valve closed
11/18/2011	8:10:43 PM	H2 valve closed
11/18/2011	8:10:43 PM	BCl3 valve closed
11/18/2011	8:10:43 PM	PH3 valve closed
11/18/2011	8:10:43 PM	SiCl4 pre valve closed
11/18/2011	8:10:43 PM	SiCl4 post valve closed
11/18/2011	8:10:43 PM	Bypass valve closed
11/18/2011	8:10:43 PM	Bubbler valve closed
11/18/2011	8:10:43 PM	Main Vac valve opened
11/18/2011	8:10:43 PM	Helium MFC set to  0.000000
11/18/2011	8:10:43 PM	H2 MFC set to  0.000000
11/18/2011	8:10:43 PM	BCl3 MFC set to  0.000000
11/18/2011	8:10:43 PM	PHl3 MFC set to  0.000000
11/18/2011	8:10:43 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:10:43 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:10:43 PM	Tube furnace set to 0
11/18/2011	8:10:44 PM	Run finished at 8:10 PM
11/18/2011	8:10:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/18/2011	8:27:05 PM	Recipe started at 8:26 PM
11/18/2011	8:27:05 PM	Helium valve closed
11/18/2011	8:27:05 PM	H2 valve closed
11/18/2011	8:27:05 PM	BCl3 valve closed
11/18/2011	8:27:05 PM	PH3 valve closed
11/18/2011	8:27:05 PM	SiCl4 pre valve closed
11/18/2011	8:27:05 PM	SiCl4 post valve closed
11/18/2011	8:27:05 PM	Main Vac valve closed
11/18/2011	8:27:05 PM	Bubbler valve closed
11/18/2011	8:27:05 PM	Bypass valve opened
11/18/2011	8:27:05 PM	Helium MFC set to  0.000000
11/18/2011	8:27:05 PM	H2 MFC set to  0.000000
11/18/2011	8:27:05 PM	BCl3 MFC set to  0.000000
11/18/2011	8:27:05 PM	PHl3 MFC set to  0.000000
11/18/2011	8:27:05 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:27:05 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:27:05 PM	Tube furnace set to 180
11/18/2011	8:27:09 PM	Helium valve closed
11/18/2011	8:27:09 PM	H2 valve closed
11/18/2011	8:27:09 PM	BCl3 valve closed
11/18/2011	8:27:09 PM	PH3 valve closed
11/18/2011	8:27:09 PM	SiCl4 pre valve closed
11/18/2011	8:27:09 PM	SiCl4 post valve closed
11/18/2011	8:27:09 PM	Main Vac valve closed
11/18/2011	8:27:09 PM	Bubbler valve closed
11/18/2011	8:27:09 PM	Bypass valve opened
11/18/2011	8:27:09 PM	Helium MFC set to  0.000000
11/18/2011	8:27:09 PM	H2 MFC set to  0.000000
11/18/2011	8:27:09 PM	BCl3 MFC set to  0.000000
11/18/2011	8:27:09 PM	PHl3 MFC set to  0.000000
11/18/2011	8:27:09 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:27:09 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:27:09 PM	Tube furnace set to 150
11/18/2011	8:27:10 PM	Helium valve closed
11/18/2011	8:27:10 PM	H2 valve closed
11/18/2011	8:27:10 PM	BCl3 valve closed
11/18/2011	8:27:10 PM	PH3 valve closed
11/18/2011	8:27:10 PM	SiCl4 pre valve closed
11/18/2011	8:27:10 PM	SiCl4 post valve closed
11/18/2011	8:27:10 PM	Bypass valve closed
11/18/2011	8:27:10 PM	Bubbler valve closed
11/18/2011	8:27:10 PM	Main Vac valve opened
11/18/2011	8:27:10 PM	Helium MFC set to  0.000000
11/18/2011	8:27:10 PM	H2 MFC set to  0.000000
11/18/2011	8:27:10 PM	BCl3 MFC set to  0.000000
11/18/2011	8:27:10 PM	PHl3 MFC set to  0.000000
11/18/2011	8:27:10 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:27:10 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:27:10 PM	Tube furnace set to 180
11/18/2011	8:27:40 PM	H2 valve closed
11/18/2011	8:27:40 PM	BCl3 valve closed
11/18/2011	8:27:40 PM	PH3 valve closed
11/18/2011	8:27:40 PM	SiCl4 pre valve closed
11/18/2011	8:27:40 PM	SiCl4 post valve closed
11/18/2011	8:27:40 PM	Bypass valve closed
11/18/2011	8:27:40 PM	Bubbler valve closed
11/18/2011	8:27:40 PM	Helium valve opened
11/18/2011	8:27:40 PM	Main Vac valve opened
11/18/2011	8:27:40 PM	Helium MFC set to  20.000000
11/18/2011	8:27:40 PM	H2 MFC set to  0.000000
11/18/2011	8:27:40 PM	BCl3 MFC set to  0.000000
11/18/2011	8:27:40 PM	PHl3 MFC set to  0.000000
11/18/2011	8:27:40 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:27:40 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:27:40 PM	Tube furnace set to 180
11/18/2011	8:28:10 PM	Helium valve closed
11/18/2011	8:28:10 PM	H2 valve closed
11/18/2011	8:28:10 PM	BCl3 valve closed
11/18/2011	8:28:10 PM	PH3 valve closed
11/18/2011	8:28:10 PM	SiCl4 pre valve closed
11/18/2011	8:28:10 PM	SiCl4 post valve closed
11/18/2011	8:28:10 PM	Bypass valve closed
11/18/2011	8:28:10 PM	Bubbler valve closed
11/18/2011	8:28:10 PM	Main Vac valve opened
11/18/2011	8:28:10 PM	Helium MFC set to  0.000000
11/18/2011	8:28:10 PM	H2 MFC set to  0.000000
11/18/2011	8:28:10 PM	BCl3 MFC set to  0.000000
11/18/2011	8:28:10 PM	PHl3 MFC set to  0.000000
11/18/2011	8:28:10 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:28:10 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:28:11 PM	Tube furnace set to 150
11/18/2011	8:28:41 PM	H2 valve closed
11/18/2011	8:28:41 PM	BCl3 valve closed
11/18/2011	8:28:41 PM	PH3 valve closed
11/18/2011	8:28:41 PM	SiCl4 pre valve closed
11/18/2011	8:28:41 PM	SiCl4 post valve closed
11/18/2011	8:28:41 PM	Bypass valve closed
11/18/2011	8:28:41 PM	Bubbler valve closed
11/18/2011	8:28:41 PM	Helium valve opened
11/18/2011	8:28:41 PM	Main Vac valve opened
11/18/2011	8:28:41 PM	Helium MFC set to  20.000000
11/18/2011	8:28:41 PM	H2 MFC set to  0.000000
11/18/2011	8:28:41 PM	BCl3 MFC set to  0.000000
11/18/2011	8:28:41 PM	PHl3 MFC set to  0.000000
11/18/2011	8:28:41 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:28:41 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:28:41 PM	Tube furnace set to 180
11/18/2011	8:29:11 PM	Helium valve closed
11/18/2011	8:29:11 PM	H2 valve closed
11/18/2011	8:29:11 PM	BCl3 valve closed
11/18/2011	8:29:11 PM	PH3 valve closed
11/18/2011	8:29:11 PM	SiCl4 pre valve closed
11/18/2011	8:29:11 PM	SiCl4 post valve closed
11/18/2011	8:29:11 PM	Bypass valve closed
11/18/2011	8:29:11 PM	Bubbler valve closed
11/18/2011	8:29:11 PM	Main Vac valve opened
11/18/2011	8:29:11 PM	Helium MFC set to  0.000000
11/18/2011	8:29:11 PM	H2 MFC set to  0.000000
11/18/2011	8:29:11 PM	BCl3 MFC set to  0.000000
11/18/2011	8:29:11 PM	PHl3 MFC set to  0.000000
11/18/2011	8:29:11 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:29:11 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:29:11 PM	Tube furnace set to 150
11/18/2011	8:29:41 PM	H2 valve closed
11/18/2011	8:29:41 PM	BCl3 valve closed
11/18/2011	8:29:41 PM	PH3 valve closed
11/18/2011	8:29:41 PM	SiCl4 pre valve closed
11/18/2011	8:29:41 PM	SiCl4 post valve closed
11/18/2011	8:29:41 PM	Bypass valve closed
11/18/2011	8:29:41 PM	Bubbler valve closed
11/18/2011	8:29:41 PM	Helium valve opened
11/18/2011	8:29:41 PM	Main Vac valve opened
11/18/2011	8:29:41 PM	Helium MFC set to  20.000000
11/18/2011	8:29:41 PM	H2 MFC set to  0.000000
11/18/2011	8:29:41 PM	BCl3 MFC set to  0.000000
11/18/2011	8:29:41 PM	PHl3 MFC set to  0.000000
11/18/2011	8:29:41 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:29:41 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:29:41 PM	Tube furnace set to 150
11/18/2011	8:30:11 PM	Helium valve closed
11/18/2011	8:30:11 PM	H2 valve closed
11/18/2011	8:30:11 PM	BCl3 valve closed
11/18/2011	8:30:11 PM	PH3 valve closed
11/18/2011	8:30:11 PM	SiCl4 pre valve closed
11/18/2011	8:30:11 PM	SiCl4 post valve closed
11/18/2011	8:30:11 PM	Bypass valve closed
11/18/2011	8:30:11 PM	Bubbler valve closed
11/18/2011	8:30:11 PM	Main Vac valve opened
11/18/2011	8:30:11 PM	Helium MFC set to  0.000000
11/18/2011	8:30:11 PM	H2 MFC set to  0.000000
11/18/2011	8:30:11 PM	BCl3 MFC set to  0.000000
11/18/2011	8:30:11 PM	PHl3 MFC set to  0.000000
11/18/2011	8:30:11 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:30:11 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:30:11 PM	Tube furnace set to 150
11/18/2011	8:30:41 PM	H2 valve closed
11/18/2011	8:30:41 PM	BCl3 valve closed
11/18/2011	8:30:41 PM	PH3 valve closed
11/18/2011	8:30:41 PM	SiCl4 pre valve closed
11/18/2011	8:30:41 PM	SiCl4 post valve closed
11/18/2011	8:30:41 PM	Bypass valve closed
11/18/2011	8:30:41 PM	Bubbler valve closed
11/18/2011	8:30:41 PM	Helium valve opened
11/18/2011	8:30:41 PM	Main Vac valve opened
11/18/2011	8:30:41 PM	Helium MFC set to  20.000000
11/18/2011	8:30:41 PM	H2 MFC set to  0.000000
11/18/2011	8:30:41 PM	BCl3 MFC set to  0.000000
11/18/2011	8:30:41 PM	PHl3 MFC set to  0.000000
11/18/2011	8:30:41 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:30:41 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:30:42 PM	Tube furnace set to 180
11/18/2011	8:31:12 PM	Helium valve closed
11/18/2011	8:31:12 PM	H2 valve closed
11/18/2011	8:31:12 PM	BCl3 valve closed
11/18/2011	8:31:12 PM	PH3 valve closed
11/18/2011	8:31:12 PM	SiCl4 pre valve closed
11/18/2011	8:31:12 PM	SiCl4 post valve closed
11/18/2011	8:31:12 PM	Bypass valve closed
11/18/2011	8:31:12 PM	Bubbler valve closed
11/18/2011	8:31:12 PM	Main Vac valve opened
11/18/2011	8:31:12 PM	Helium MFC set to  0.000000
11/18/2011	8:31:12 PM	H2 MFC set to  0.000000
11/18/2011	8:31:12 PM	BCl3 MFC set to  0.000000
11/18/2011	8:31:12 PM	PHl3 MFC set to  0.000000
11/18/2011	8:31:12 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:31:12 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:31:12 PM	Tube furnace set to 150
11/18/2011	8:31:42 PM	H2 valve closed
11/18/2011	8:31:42 PM	BCl3 valve closed
11/18/2011	8:31:42 PM	PH3 valve closed
11/18/2011	8:31:42 PM	SiCl4 pre valve closed
11/18/2011	8:31:42 PM	SiCl4 post valve closed
11/18/2011	8:31:42 PM	Bypass valve closed
11/18/2011	8:31:42 PM	Bubbler valve closed
11/18/2011	8:31:42 PM	Helium valve opened
11/18/2011	8:31:42 PM	Main Vac valve opened
11/18/2011	8:31:42 PM	Helium MFC set to  20.000000
11/18/2011	8:31:42 PM	H2 MFC set to  0.000000
11/18/2011	8:31:42 PM	BCl3 MFC set to  0.000000
11/18/2011	8:31:42 PM	PHl3 MFC set to  0.000000
11/18/2011	8:31:42 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:31:42 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:31:42 PM	Tube furnace set to 150
11/18/2011	8:32:12 PM	Helium valve closed
11/18/2011	8:32:12 PM	H2 valve closed
11/18/2011	8:32:12 PM	BCl3 valve closed
11/18/2011	8:32:12 PM	PH3 valve closed
11/18/2011	8:32:12 PM	SiCl4 pre valve closed
11/18/2011	8:32:12 PM	SiCl4 post valve closed
11/18/2011	8:32:12 PM	Bypass valve closed
11/18/2011	8:32:12 PM	Bubbler valve closed
11/18/2011	8:32:12 PM	Main Vac valve opened
11/18/2011	8:32:12 PM	Helium MFC set to  0.000000
11/18/2011	8:32:12 PM	H2 MFC set to  0.000000
11/18/2011	8:32:12 PM	BCl3 MFC set to  0.000000
11/18/2011	8:32:12 PM	PHl3 MFC set to  0.000000
11/18/2011	8:32:12 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:32:12 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:32:12 PM	Tube furnace set to 150
11/18/2011	8:32:42 PM	H2 valve closed
11/18/2011	8:32:42 PM	BCl3 valve closed
11/18/2011	8:32:42 PM	PH3 valve closed
11/18/2011	8:32:42 PM	SiCl4 pre valve closed
11/18/2011	8:32:42 PM	SiCl4 post valve closed
11/18/2011	8:32:42 PM	Bypass valve closed
11/18/2011	8:32:42 PM	Bubbler valve closed
11/18/2011	8:32:42 PM	Helium valve opened
11/18/2011	8:32:42 PM	Main Vac valve opened
11/18/2011	8:32:42 PM	Helium MFC set to  20.000000
11/18/2011	8:32:42 PM	H2 MFC set to  0.000000
11/18/2011	8:32:42 PM	BCl3 MFC set to  0.000000
11/18/2011	8:32:42 PM	PHl3 MFC set to  0.000000
11/18/2011	8:32:42 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:32:42 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:32:42 PM	Tube furnace set to 150
11/18/2011	8:33:12 PM	Helium valve closed
11/18/2011	8:33:12 PM	H2 valve closed
11/18/2011	8:33:12 PM	BCl3 valve closed
11/18/2011	8:33:12 PM	PH3 valve closed
11/18/2011	8:33:12 PM	SiCl4 pre valve closed
11/18/2011	8:33:12 PM	SiCl4 post valve closed
11/18/2011	8:33:12 PM	Bypass valve closed
11/18/2011	8:33:12 PM	Bubbler valve closed
11/18/2011	8:33:12 PM	Main Vac valve opened
11/18/2011	8:33:12 PM	Helium MFC set to  0.000000
11/18/2011	8:33:12 PM	H2 MFC set to  0.000000
11/18/2011	8:33:12 PM	BCl3 MFC set to  0.000000
11/18/2011	8:33:12 PM	PHl3 MFC set to  0.000000
11/18/2011	8:33:12 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:33:12 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:33:13 PM	Tube furnace set to 150
11/18/2011	8:33:43 PM	H2 valve closed
11/18/2011	8:33:43 PM	BCl3 valve closed
11/18/2011	8:33:43 PM	PH3 valve closed
11/18/2011	8:33:43 PM	SiCl4 pre valve closed
11/18/2011	8:33:43 PM	SiCl4 post valve closed
11/18/2011	8:33:43 PM	Bypass valve closed
11/18/2011	8:33:43 PM	Bubbler valve closed
11/18/2011	8:33:43 PM	Helium valve opened
11/18/2011	8:33:43 PM	Main Vac valve opened
11/18/2011	8:33:43 PM	Helium MFC set to  20.000000
11/18/2011	8:33:43 PM	H2 MFC set to  0.000000
11/18/2011	8:33:43 PM	BCl3 MFC set to  0.000000
11/18/2011	8:33:43 PM	PHl3 MFC set to  0.000000
11/18/2011	8:33:43 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:33:43 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:33:43 PM	Tube furnace set to 150
11/18/2011	8:34:13 PM	Helium valve closed
11/18/2011	8:34:13 PM	H2 valve closed
11/18/2011	8:34:13 PM	BCl3 valve closed
11/18/2011	8:34:13 PM	PH3 valve closed
11/18/2011	8:34:13 PM	SiCl4 pre valve closed
11/18/2011	8:34:13 PM	SiCl4 post valve closed
11/18/2011	8:34:13 PM	Bypass valve closed
11/18/2011	8:34:13 PM	Bubbler valve closed
11/18/2011	8:34:13 PM	Main Vac valve opened
11/18/2011	8:34:13 PM	Helium MFC set to  0.000000
11/18/2011	8:34:13 PM	H2 MFC set to  0.000000
11/18/2011	8:34:13 PM	BCl3 MFC set to  0.000000
11/18/2011	8:34:13 PM	PHl3 MFC set to  0.000000
11/18/2011	8:34:13 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:34:13 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:34:13 PM	Tube furnace set to 150
11/18/2011	8:34:43 PM	H2 valve closed
11/18/2011	8:34:43 PM	BCl3 valve closed
11/18/2011	8:34:43 PM	PH3 valve closed
11/18/2011	8:34:43 PM	SiCl4 pre valve closed
11/18/2011	8:34:43 PM	SiCl4 post valve closed
11/18/2011	8:34:43 PM	Bypass valve closed
11/18/2011	8:34:43 PM	Bubbler valve closed
11/18/2011	8:34:43 PM	Helium valve opened
11/18/2011	8:34:43 PM	Main Vac valve opened
11/18/2011	8:34:43 PM	Helium MFC set to  20.000000
11/18/2011	8:34:43 PM	H2 MFC set to  0.000000
11/18/2011	8:34:43 PM	BCl3 MFC set to  0.000000
11/18/2011	8:34:43 PM	PHl3 MFC set to  0.000000
11/18/2011	8:34:43 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:34:43 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:34:43 PM	Tube furnace set to 150
11/18/2011	8:35:13 PM	Helium valve closed
11/18/2011	8:35:13 PM	H2 valve closed
11/18/2011	8:35:13 PM	BCl3 valve closed
11/18/2011	8:35:13 PM	PH3 valve closed
11/18/2011	8:35:13 PM	SiCl4 pre valve closed
11/18/2011	8:35:13 PM	SiCl4 post valve closed
11/18/2011	8:35:13 PM	Bypass valve closed
11/18/2011	8:35:13 PM	Bubbler valve closed
11/18/2011	8:35:13 PM	Main Vac valve opened
11/18/2011	8:35:13 PM	Helium MFC set to  0.000000
11/18/2011	8:35:13 PM	H2 MFC set to  0.000000
11/18/2011	8:35:13 PM	BCl3 MFC set to  0.000000
11/18/2011	8:35:13 PM	PHl3 MFC set to  0.000000
11/18/2011	8:35:13 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:35:13 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:35:13 PM	Tube furnace set to 150
11/18/2011	8:35:43 PM	H2 valve closed
11/18/2011	8:35:43 PM	BCl3 valve closed
11/18/2011	8:35:43 PM	PH3 valve closed
11/18/2011	8:35:43 PM	SiCl4 pre valve closed
11/18/2011	8:35:43 PM	SiCl4 post valve closed
11/18/2011	8:35:43 PM	Bypass valve closed
11/18/2011	8:35:43 PM	Bubbler valve closed
11/18/2011	8:35:43 PM	Helium valve opened
11/18/2011	8:35:43 PM	Main Vac valve opened
11/18/2011	8:35:44 PM	Helium MFC set to  20.000000
11/18/2011	8:35:44 PM	H2 MFC set to  0.000000
11/18/2011	8:35:44 PM	BCl3 MFC set to  0.000000
11/18/2011	8:35:44 PM	PHl3 MFC set to  0.000000
11/18/2011	8:35:44 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:35:44 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:35:44 PM	Tube furnace set to 150
11/18/2011	8:36:14 PM	Helium valve closed
11/18/2011	8:36:14 PM	H2 valve closed
11/18/2011	8:36:14 PM	BCl3 valve closed
11/18/2011	8:36:14 PM	PH3 valve closed
11/18/2011	8:36:14 PM	SiCl4 pre valve closed
11/18/2011	8:36:14 PM	SiCl4 post valve closed
11/18/2011	8:36:14 PM	Bypass valve closed
11/18/2011	8:36:14 PM	Bubbler valve closed
11/18/2011	8:36:14 PM	Main Vac valve opened
11/18/2011	8:36:14 PM	Helium MFC set to  0.000000
11/18/2011	8:36:14 PM	H2 MFC set to  0.000000
11/18/2011	8:36:14 PM	BCl3 MFC set to  0.000000
11/18/2011	8:36:14 PM	PHl3 MFC set to  0.000000
11/18/2011	8:36:14 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:36:14 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:36:14 PM	Tube furnace set to 150
11/18/2011	8:36:44 PM	H2 valve closed
11/18/2011	8:36:44 PM	BCl3 valve closed
11/18/2011	8:36:44 PM	PH3 valve closed
11/18/2011	8:36:44 PM	SiCl4 pre valve closed
11/18/2011	8:36:44 PM	SiCl4 post valve closed
11/18/2011	8:36:44 PM	Bypass valve closed
11/18/2011	8:36:44 PM	Bubbler valve closed
11/18/2011	8:36:44 PM	Helium valve opened
11/18/2011	8:36:44 PM	Main Vac valve opened
11/18/2011	8:36:44 PM	Helium MFC set to  20.000000
11/18/2011	8:36:44 PM	H2 MFC set to  0.000000
11/18/2011	8:36:44 PM	BCl3 MFC set to  0.000000
11/18/2011	8:36:44 PM	PHl3 MFC set to  0.000000
11/18/2011	8:36:44 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:36:44 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:36:44 PM	Tube furnace set to 150
11/18/2011	8:37:14 PM	Helium valve closed
11/18/2011	8:37:14 PM	H2 valve closed
11/18/2011	8:37:14 PM	BCl3 valve closed
11/18/2011	8:37:14 PM	PH3 valve closed
11/18/2011	8:37:14 PM	SiCl4 pre valve closed
11/18/2011	8:37:14 PM	SiCl4 post valve closed
11/18/2011	8:37:14 PM	Bypass valve closed
11/18/2011	8:37:14 PM	Bubbler valve closed
11/18/2011	8:37:14 PM	Main Vac valve opened
11/18/2011	8:37:14 PM	Helium MFC set to  0.000000
11/18/2011	8:37:14 PM	H2 MFC set to  0.000000
11/18/2011	8:37:14 PM	BCl3 MFC set to  0.000000
11/18/2011	8:37:14 PM	PHl3 MFC set to  0.000000
11/18/2011	8:37:14 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:37:14 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:37:14 PM	Tube furnace set to 150
11/18/2011	8:37:44 PM	H2 valve closed
11/18/2011	8:37:44 PM	BCl3 valve closed
11/18/2011	8:37:44 PM	PH3 valve closed
11/18/2011	8:37:44 PM	SiCl4 pre valve closed
11/18/2011	8:37:44 PM	SiCl4 post valve closed
11/18/2011	8:37:44 PM	Bypass valve closed
11/18/2011	8:37:44 PM	Bubbler valve closed
11/18/2011	8:37:44 PM	Helium valve opened
11/18/2011	8:37:44 PM	Main Vac valve opened
11/18/2011	8:37:44 PM	Helium MFC set to  20.000000
11/18/2011	8:37:44 PM	H2 MFC set to  0.000000
11/18/2011	8:37:44 PM	BCl3 MFC set to  0.000000
11/18/2011	8:37:44 PM	PHl3 MFC set to  0.000000
11/18/2011	8:37:44 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:37:44 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:37:44 PM	Tube furnace set to 150
11/18/2011	8:38:15 PM	Helium valve closed
11/18/2011	8:38:15 PM	H2 valve closed
11/18/2011	8:38:15 PM	BCl3 valve closed
11/18/2011	8:38:15 PM	PH3 valve closed
11/18/2011	8:38:15 PM	SiCl4 pre valve closed
11/18/2011	8:38:15 PM	SiCl4 post valve closed
11/18/2011	8:38:15 PM	Bypass valve closed
11/18/2011	8:38:15 PM	Bubbler valve closed
11/18/2011	8:38:15 PM	Main Vac valve opened
11/18/2011	8:38:15 PM	Helium MFC set to  0.000000
11/18/2011	8:38:15 PM	H2 MFC set to  0.000000
11/18/2011	8:38:15 PM	BCl3 MFC set to  0.000000
11/18/2011	8:38:15 PM	PHl3 MFC set to  0.000000
11/18/2011	8:38:15 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:38:15 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:38:15 PM	Tube furnace set to 150
11/18/2011	8:38:45 PM	H2 valve closed
11/18/2011	8:38:45 PM	BCl3 valve closed
11/18/2011	8:38:45 PM	PH3 valve closed
11/18/2011	8:38:45 PM	SiCl4 pre valve closed
11/18/2011	8:38:45 PM	SiCl4 post valve closed
11/18/2011	8:38:45 PM	Bypass valve closed
11/18/2011	8:38:45 PM	Bubbler valve closed
11/18/2011	8:38:45 PM	Helium valve opened
11/18/2011	8:38:45 PM	Main Vac valve opened
11/18/2011	8:38:45 PM	Helium MFC set to  20.000000
11/18/2011	8:38:45 PM	H2 MFC set to  0.000000
11/18/2011	8:38:45 PM	BCl3 MFC set to  0.000000
11/18/2011	8:38:45 PM	PHl3 MFC set to  0.000000
11/18/2011	8:38:45 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:38:45 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:38:45 PM	Tube furnace set to 150
11/18/2011	8:39:15 PM	Helium valve closed
11/18/2011	8:39:15 PM	H2 valve closed
11/18/2011	8:39:15 PM	BCl3 valve closed
11/18/2011	8:39:15 PM	PH3 valve closed
11/18/2011	8:39:15 PM	SiCl4 pre valve closed
11/18/2011	8:39:15 PM	SiCl4 post valve closed
11/18/2011	8:39:15 PM	Bypass valve closed
11/18/2011	8:39:15 PM	Bubbler valve closed
11/18/2011	8:39:15 PM	Main Vac valve opened
11/18/2011	8:39:15 PM	Helium MFC set to  0.000000
11/18/2011	8:39:15 PM	H2 MFC set to  0.000000
11/18/2011	8:39:15 PM	BCl3 MFC set to  0.000000
11/18/2011	8:39:15 PM	PHl3 MFC set to  0.000000
11/18/2011	8:39:15 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:39:15 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:39:15 PM	Tube furnace set to 150
11/18/2011	8:39:45 PM	H2 valve closed
11/18/2011	8:39:45 PM	BCl3 valve closed
11/18/2011	8:39:45 PM	PH3 valve closed
11/18/2011	8:39:45 PM	SiCl4 pre valve closed
11/18/2011	8:39:45 PM	SiCl4 post valve closed
11/18/2011	8:39:45 PM	Bypass valve closed
11/18/2011	8:39:45 PM	Bubbler valve closed
11/18/2011	8:39:45 PM	Helium valve opened
11/18/2011	8:39:45 PM	Main Vac valve opened
11/18/2011	8:39:45 PM	Helium MFC set to  20.000000
11/18/2011	8:39:45 PM	H2 MFC set to  0.000000
11/18/2011	8:39:45 PM	BCl3 MFC set to  0.000000
11/18/2011	8:39:45 PM	PHl3 MFC set to  0.000000
11/18/2011	8:39:45 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:39:45 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:39:45 PM	Tube furnace set to 150
11/18/2011	8:40:15 PM	Helium valve closed
11/18/2011	8:40:15 PM	H2 valve closed
11/18/2011	8:40:15 PM	BCl3 valve closed
11/18/2011	8:40:15 PM	PH3 valve closed
11/18/2011	8:40:15 PM	SiCl4 pre valve closed
11/18/2011	8:40:15 PM	SiCl4 post valve closed
11/18/2011	8:40:15 PM	Bypass valve closed
11/18/2011	8:40:15 PM	Bubbler valve closed
11/18/2011	8:40:15 PM	Main Vac valve opened
11/18/2011	8:40:15 PM	Helium MFC set to  0.000000
11/18/2011	8:40:15 PM	H2 MFC set to  0.000000
11/18/2011	8:40:15 PM	BCl3 MFC set to  0.000000
11/18/2011	8:40:15 PM	PHl3 MFC set to  0.000000
11/18/2011	8:40:15 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:40:15 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:40:16 PM	Tube furnace set to 150
11/18/2011	8:40:46 PM	H2 valve closed
11/18/2011	8:40:46 PM	BCl3 valve closed
11/18/2011	8:40:46 PM	PH3 valve closed
11/18/2011	8:40:46 PM	SiCl4 pre valve closed
11/18/2011	8:40:46 PM	SiCl4 post valve closed
11/18/2011	8:40:46 PM	Bypass valve closed
11/18/2011	8:40:46 PM	Bubbler valve closed
11/18/2011	8:40:46 PM	Helium valve opened
11/18/2011	8:40:46 PM	Main Vac valve opened
11/18/2011	8:40:46 PM	Helium MFC set to  20.000000
11/18/2011	8:40:46 PM	H2 MFC set to  0.000000
11/18/2011	8:40:46 PM	BCl3 MFC set to  0.000000
11/18/2011	8:40:46 PM	PHl3 MFC set to  0.000000
11/18/2011	8:40:46 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:40:46 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:40:46 PM	Tube furnace set to 150
11/18/2011	8:41:16 PM	Helium valve closed
11/18/2011	8:41:16 PM	H2 valve closed
11/18/2011	8:41:16 PM	BCl3 valve closed
11/18/2011	8:41:16 PM	PH3 valve closed
11/18/2011	8:41:16 PM	SiCl4 pre valve closed
11/18/2011	8:41:16 PM	SiCl4 post valve closed
11/18/2011	8:41:16 PM	Bypass valve closed
11/18/2011	8:41:16 PM	Bubbler valve closed
11/18/2011	8:41:16 PM	Main Vac valve opened
11/18/2011	8:41:16 PM	Helium MFC set to  0.000000
11/18/2011	8:41:16 PM	H2 MFC set to  0.000000
11/18/2011	8:41:16 PM	BCl3 MFC set to  0.000000
11/18/2011	8:41:16 PM	PHl3 MFC set to  0.000000
11/18/2011	8:41:16 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:41:16 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:41:16 PM	Tube furnace set to 150
11/18/2011	8:41:46 PM	H2 valve closed
11/18/2011	8:41:46 PM	BCl3 valve closed
11/18/2011	8:41:46 PM	PH3 valve closed
11/18/2011	8:41:46 PM	SiCl4 pre valve closed
11/18/2011	8:41:46 PM	SiCl4 post valve closed
11/18/2011	8:41:46 PM	Bypass valve closed
11/18/2011	8:41:46 PM	Bubbler valve closed
11/18/2011	8:41:46 PM	Helium valve opened
11/18/2011	8:41:46 PM	Main Vac valve opened
11/18/2011	8:41:46 PM	Helium MFC set to  20.000000
11/18/2011	8:41:46 PM	H2 MFC set to  0.000000
11/18/2011	8:41:46 PM	BCl3 MFC set to  0.000000
11/18/2011	8:41:46 PM	PHl3 MFC set to  0.000000
11/18/2011	8:41:46 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:41:46 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:41:46 PM	Tube furnace set to 150
11/18/2011	8:42:16 PM	Helium valve closed
11/18/2011	8:42:16 PM	H2 valve closed
11/18/2011	8:42:16 PM	BCl3 valve closed
11/18/2011	8:42:16 PM	PH3 valve closed
11/18/2011	8:42:16 PM	SiCl4 pre valve closed
11/18/2011	8:42:16 PM	SiCl4 post valve closed
11/18/2011	8:42:16 PM	Bypass valve closed
11/18/2011	8:42:16 PM	Bubbler valve closed
11/18/2011	8:42:16 PM	Main Vac valve opened
11/18/2011	8:42:16 PM	Helium MFC set to  0.000000
11/18/2011	8:42:16 PM	H2 MFC set to  0.000000
11/18/2011	8:42:16 PM	BCl3 MFC set to  0.000000
11/18/2011	8:42:16 PM	PHl3 MFC set to  0.000000
11/18/2011	8:42:16 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:42:16 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:42:16 PM	Tube furnace set to 150
11/18/2011	8:42:46 PM	H2 valve closed
11/18/2011	8:42:46 PM	BCl3 valve closed
11/18/2011	8:42:46 PM	PH3 valve closed
11/18/2011	8:42:46 PM	SiCl4 pre valve closed
11/18/2011	8:42:46 PM	SiCl4 post valve closed
11/18/2011	8:42:46 PM	Bypass valve closed
11/18/2011	8:42:46 PM	Bubbler valve closed
11/18/2011	8:42:46 PM	Helium valve opened
11/18/2011	8:42:46 PM	Main Vac valve opened
11/18/2011	8:42:46 PM	Helium MFC set to  20.000000
11/18/2011	8:42:46 PM	H2 MFC set to  0.000000
11/18/2011	8:42:46 PM	BCl3 MFC set to  0.000000
11/18/2011	8:42:46 PM	PHl3 MFC set to  0.000000
11/18/2011	8:42:46 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:42:46 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:42:47 PM	Tube furnace set to 150
11/18/2011	8:43:17 PM	Helium valve closed
11/18/2011	8:43:17 PM	H2 valve closed
11/18/2011	8:43:17 PM	BCl3 valve closed
11/18/2011	8:43:17 PM	PH3 valve closed
11/18/2011	8:43:17 PM	SiCl4 pre valve closed
11/18/2011	8:43:17 PM	SiCl4 post valve closed
11/18/2011	8:43:17 PM	Bypass valve closed
11/18/2011	8:43:17 PM	Bubbler valve closed
11/18/2011	8:43:17 PM	Main Vac valve opened
11/18/2011	8:43:17 PM	Helium MFC set to  0.000000
11/18/2011	8:43:17 PM	H2 MFC set to  0.000000
11/18/2011	8:43:17 PM	BCl3 MFC set to  0.000000
11/18/2011	8:43:17 PM	PHl3 MFC set to  0.000000
11/18/2011	8:43:17 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:43:17 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:43:17 PM	Tube furnace set to 150
11/18/2011	8:43:47 PM	H2 valve closed
11/18/2011	8:43:47 PM	BCl3 valve closed
11/18/2011	8:43:47 PM	PH3 valve closed
11/18/2011	8:43:47 PM	SiCl4 pre valve closed
11/18/2011	8:43:47 PM	SiCl4 post valve closed
11/18/2011	8:43:47 PM	Bypass valve closed
11/18/2011	8:43:47 PM	Bubbler valve closed
11/18/2011	8:43:47 PM	Helium valve opened
11/18/2011	8:43:47 PM	Main Vac valve opened
11/18/2011	8:43:47 PM	Helium MFC set to  20.000000
11/18/2011	8:43:47 PM	H2 MFC set to  0.000000
11/18/2011	8:43:47 PM	BCl3 MFC set to  0.000000
11/18/2011	8:43:47 PM	PHl3 MFC set to  0.000000
11/18/2011	8:43:47 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:43:47 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:43:47 PM	Tube furnace set to 150
11/18/2011	8:44:17 PM	Helium valve closed
11/18/2011	8:44:17 PM	H2 valve closed
11/18/2011	8:44:17 PM	BCl3 valve closed
11/18/2011	8:44:17 PM	PH3 valve closed
11/18/2011	8:44:17 PM	SiCl4 pre valve closed
11/18/2011	8:44:17 PM	SiCl4 post valve closed
11/18/2011	8:44:17 PM	Bypass valve closed
11/18/2011	8:44:17 PM	Bubbler valve closed
11/18/2011	8:44:17 PM	Main Vac valve opened
11/18/2011	8:44:17 PM	Helium MFC set to  0.000000
11/18/2011	8:44:17 PM	H2 MFC set to  0.000000
11/18/2011	8:44:17 PM	BCl3 MFC set to  0.000000
11/18/2011	8:44:17 PM	PHl3 MFC set to  0.000000
11/18/2011	8:44:17 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:44:17 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:44:17 PM	Tube furnace set to 150
11/18/2011	8:44:47 PM	H2 valve closed
11/18/2011	8:44:47 PM	BCl3 valve closed
11/18/2011	8:44:47 PM	PH3 valve closed
11/18/2011	8:44:47 PM	SiCl4 pre valve closed
11/18/2011	8:44:47 PM	SiCl4 post valve closed
11/18/2011	8:44:47 PM	Bypass valve closed
11/18/2011	8:44:47 PM	Bubbler valve closed
11/18/2011	8:44:47 PM	Helium valve opened
11/18/2011	8:44:47 PM	Main Vac valve opened
11/18/2011	8:44:47 PM	Helium MFC set to  20.000000
11/18/2011	8:44:47 PM	H2 MFC set to  0.000000
11/18/2011	8:44:47 PM	BCl3 MFC set to  0.000000
11/18/2011	8:44:47 PM	PHl3 MFC set to  0.000000
11/18/2011	8:44:47 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:44:47 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:44:47 PM	Tube furnace set to 150
11/18/2011	8:45:17 PM	Helium valve closed
11/18/2011	8:45:17 PM	H2 valve closed
11/18/2011	8:45:17 PM	BCl3 valve closed
11/18/2011	8:45:17 PM	PH3 valve closed
11/18/2011	8:45:17 PM	SiCl4 pre valve closed
11/18/2011	8:45:17 PM	SiCl4 post valve closed
11/18/2011	8:45:17 PM	Bypass valve closed
11/18/2011	8:45:17 PM	Bubbler valve closed
11/18/2011	8:45:17 PM	Main Vac valve opened
11/18/2011	8:45:17 PM	Helium MFC set to  0.000000
11/18/2011	8:45:17 PM	H2 MFC set to  0.000000
11/18/2011	8:45:17 PM	BCl3 MFC set to  0.000000
11/18/2011	8:45:17 PM	PHl3 MFC set to  0.000000
11/18/2011	8:45:17 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:45:17 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:45:18 PM	Tube furnace set to 150
11/18/2011	8:45:48 PM	H2 valve closed
11/18/2011	8:45:48 PM	BCl3 valve closed
11/18/2011	8:45:48 PM	PH3 valve closed
11/18/2011	8:45:48 PM	SiCl4 pre valve closed
11/18/2011	8:45:48 PM	SiCl4 post valve closed
11/18/2011	8:45:48 PM	Bypass valve closed
11/18/2011	8:45:48 PM	Bubbler valve closed
11/18/2011	8:45:48 PM	Helium valve opened
11/18/2011	8:45:48 PM	Main Vac valve opened
11/18/2011	8:45:48 PM	Helium MFC set to  20.000000
11/18/2011	8:45:48 PM	H2 MFC set to  0.000000
11/18/2011	8:45:48 PM	BCl3 MFC set to  0.000000
11/18/2011	8:45:48 PM	PHl3 MFC set to  0.000000
11/18/2011	8:45:48 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:45:48 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:45:48 PM	Tube furnace set to 150
11/18/2011	8:46:18 PM	Helium valve closed
11/18/2011	8:46:18 PM	H2 valve closed
11/18/2011	8:46:18 PM	BCl3 valve closed
11/18/2011	8:46:18 PM	PH3 valve closed
11/18/2011	8:46:18 PM	SiCl4 pre valve closed
11/18/2011	8:46:18 PM	SiCl4 post valve closed
11/18/2011	8:46:18 PM	Bypass valve closed
11/18/2011	8:46:18 PM	Bubbler valve closed
11/18/2011	8:46:18 PM	Main Vac valve opened
11/18/2011	8:46:18 PM	Helium MFC set to  0.000000
11/18/2011	8:46:18 PM	H2 MFC set to  0.000000
11/18/2011	8:46:18 PM	BCl3 MFC set to  0.000000
11/18/2011	8:46:18 PM	PHl3 MFC set to  0.000000
11/18/2011	8:46:18 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:46:18 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:46:18 PM	Tube furnace set to 150
11/18/2011	8:46:48 PM	H2 valve closed
11/18/2011	8:46:48 PM	BCl3 valve closed
11/18/2011	8:46:48 PM	PH3 valve closed
11/18/2011	8:46:48 PM	SiCl4 pre valve closed
11/18/2011	8:46:48 PM	SiCl4 post valve closed
11/18/2011	8:46:48 PM	Bypass valve closed
11/18/2011	8:46:48 PM	Bubbler valve closed
11/18/2011	8:46:48 PM	Helium valve opened
11/18/2011	8:46:48 PM	Main Vac valve opened
11/18/2011	8:46:48 PM	Helium MFC set to  20.000000
11/18/2011	8:46:48 PM	H2 MFC set to  0.000000
11/18/2011	8:46:48 PM	BCl3 MFC set to  0.000000
11/18/2011	8:46:48 PM	PHl3 MFC set to  0.000000
11/18/2011	8:46:48 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:46:48 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:46:48 PM	Tube furnace set to 150
11/18/2011	8:47:18 PM	Helium valve closed
11/18/2011	8:47:18 PM	H2 valve closed
11/18/2011	8:47:18 PM	BCl3 valve closed
11/18/2011	8:47:18 PM	PH3 valve closed
11/18/2011	8:47:18 PM	SiCl4 pre valve closed
11/18/2011	8:47:18 PM	SiCl4 post valve closed
11/18/2011	8:47:18 PM	Bypass valve closed
11/18/2011	8:47:18 PM	Bubbler valve closed
11/18/2011	8:47:18 PM	Main Vac valve opened
11/18/2011	8:47:18 PM	Helium MFC set to  0.000000
11/18/2011	8:47:18 PM	H2 MFC set to  0.000000
11/18/2011	8:47:18 PM	BCl3 MFC set to  0.000000
11/18/2011	8:47:18 PM	PHl3 MFC set to  0.000000
11/18/2011	8:47:18 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:47:18 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:47:18 PM	Tube furnace set to 180
11/18/2011	8:47:23 PM	Run finished at 8:47 PM
11/18/2011	8:49:42 PM	Main Vac valve closed
11/18/2011	8:49:53 PM	Main Vac valve opened
11/18/2011	8:50:32 PM	Recipe started at 8:50 PM
11/18/2011	8:50:32 PM	Helium valve closed
11/18/2011	8:50:32 PM	H2 valve closed
11/18/2011	8:50:32 PM	BCl3 valve closed
11/18/2011	8:50:32 PM	PH3 valve closed
11/18/2011	8:50:32 PM	SiCl4 pre valve closed
11/18/2011	8:50:32 PM	SiCl4 post valve closed
11/18/2011	8:50:32 PM	Main Vac valve closed
11/18/2011	8:50:32 PM	Bypass valve closed
11/18/2011	8:50:32 PM	Bubbler valve closed
11/18/2011	8:50:32 PM	Helium MFC set to  0.000000
11/18/2011	8:50:32 PM	H2 MFC set to  0.000000
11/18/2011	8:50:32 PM	BCl3 MFC set to  0.000000
11/18/2011	8:50:32 PM	PHl3 MFC set to  0.000000
11/18/2011	8:50:32 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:50:32 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:50:32 PM	Tube furnace set to 0
11/18/2011	8:50:35 PM	Helium valve closed
11/18/2011	8:50:35 PM	BCl3 valve closed
11/18/2011	8:50:35 PM	PH3 valve closed
11/18/2011	8:50:35 PM	SiCl4 pre valve closed
11/18/2011	8:50:35 PM	SiCl4 post valve closed
11/18/2011	8:50:35 PM	Main Vac valve closed
11/18/2011	8:50:35 PM	Bypass valve closed
11/18/2011	8:50:35 PM	Bubbler valve closed
11/18/2011	8:50:35 PM	H2 valve opened
11/18/2011	8:50:35 PM	Helium MFC set to  0.000000
11/18/2011	8:50:35 PM	H2 MFC set to  500.000000
11/18/2011	8:50:35 PM	BCl3 MFC set to  0.000000
11/18/2011	8:50:35 PM	PHl3 MFC set to  0.000000
11/18/2011	8:50:35 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:50:35 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:50:36 PM	Tube furnace set to 50
11/18/2011	8:51:37 PM	Helium valve closed
11/18/2011	8:51:37 PM	BCl3 valve closed
11/18/2011	8:51:37 PM	PH3 valve closed
11/18/2011	8:51:37 PM	SiCl4 pre valve closed
11/18/2011	8:51:37 PM	SiCl4 post valve closed
11/18/2011	8:51:37 PM	Main Vac valve closed
11/18/2011	8:51:37 PM	Bypass valve closed
11/18/2011	8:51:37 PM	H2 valve opened
11/18/2011	8:51:37 PM	Bubbler valve opened
11/18/2011	8:51:37 PM	Helium MFC set to  0.000000
11/18/2011	8:51:37 PM	H2 MFC set to  500.000000
11/18/2011	8:51:37 PM	BCl3 MFC set to  0.000000
11/18/2011	8:51:37 PM	PHl3 MFC set to  0.000000
11/18/2011	8:51:37 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:51:37 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:51:38 PM	Tube furnace set to 50
11/18/2011	8:51:39 PM	Helium valve closed
11/18/2011	8:51:39 PM	BCl3 valve closed
11/18/2011	8:51:39 PM	PH3 valve closed
11/18/2011	8:51:39 PM	SiCl4 pre valve closed
11/18/2011	8:51:39 PM	SiCl4 post valve closed
11/18/2011	8:51:39 PM	Main Vac valve closed
11/18/2011	8:51:39 PM	Bypass valve closed
11/18/2011	8:51:39 PM	H2 valve opened
11/18/2011	8:51:39 PM	Bubbler valve opened
11/18/2011	8:51:39 PM	Helium MFC set to  0.000000
11/18/2011	8:51:39 PM	H2 MFC set to  495.000000
11/18/2011	8:51:39 PM	BCl3 MFC set to  0.000000
11/18/2011	8:51:39 PM	PHl3 MFC set to  0.000000
11/18/2011	8:51:39 PM	SiCl4 MFC set to  0.000000
11/18/2011	8:51:39 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	8:51:39 PM	Tube furnace set to 1000
11/18/2011	9:11:39 PM	Helium valve closed
11/18/2011	9:11:39 PM	BCl3 valve closed
11/18/2011	9:11:39 PM	PH3 valve closed
11/18/2011	9:11:39 PM	Main Vac valve closed
11/18/2011	9:11:39 PM	Bypass valve closed
11/18/2011	9:11:39 PM	H2 valve opened
11/18/2011	9:11:39 PM	SiCl4 pre valve opened
11/18/2011	9:11:39 PM	SiCl4 post valve opened
11/18/2011	9:11:39 PM	Bubbler valve opened
11/18/2011	9:11:39 PM	Helium MFC set to  0.000000
11/18/2011	9:11:39 PM	H2 MFC set to  495.000000
11/18/2011	9:11:39 PM	BCl3 MFC set to  0.000000
11/18/2011	9:11:39 PM	PHl3 MFC set to  0.000000
11/18/2011	9:11:39 PM	SiCl4 MFC set to  24.000000
11/18/2011	9:11:39 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	9:11:39 PM	Tube furnace set to 1000
11/18/2011	9:33:39 PM	Helium valve closed
11/18/2011	9:33:39 PM	BCl3 valve closed
11/18/2011	9:33:39 PM	PH3 valve closed
11/18/2011	9:33:39 PM	SiCl4 pre valve closed
11/18/2011	9:33:39 PM	SiCl4 post valve closed
11/18/2011	9:33:39 PM	Main Vac valve closed
11/18/2011	9:33:39 PM	Bypass valve closed
11/18/2011	9:33:39 PM	H2 valve opened
11/18/2011	9:33:39 PM	Bubbler valve opened
11/18/2011	9:33:39 PM	Helium MFC set to  0.000000
11/18/2011	9:33:39 PM	H2 MFC set to  480.000000
11/18/2011	9:33:39 PM	BCl3 MFC set to  0.000000
11/18/2011	9:33:39 PM	PHl3 MFC set to  0.000000
11/18/2011	9:33:39 PM	SiCl4 MFC set to  0.000000
11/18/2011	9:33:39 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	9:33:39 PM	Tube furnace set to 750
11/18/2011	9:43:39 PM	H2 valve closed
11/18/2011	9:43:39 PM	BCl3 valve closed
11/18/2011	9:43:39 PM	PH3 valve closed
11/18/2011	9:43:39 PM	SiCl4 pre valve closed
11/18/2011	9:43:39 PM	SiCl4 post valve closed
11/18/2011	9:43:39 PM	Main Vac valve closed
11/18/2011	9:43:39 PM	Bypass valve closed
11/18/2011	9:43:39 PM	Helium valve opened
11/18/2011	9:43:39 PM	Bubbler valve opened
11/18/2011	9:43:39 PM	Helium MFC set to  400.000000
11/18/2011	9:43:39 PM	H2 MFC set to  0.000000
11/18/2011	9:43:39 PM	BCl3 MFC set to  0.000000
11/18/2011	9:43:39 PM	PHl3 MFC set to  0.000000
11/18/2011	9:43:39 PM	SiCl4 MFC set to  0.000000
11/18/2011	9:43:39 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	9:43:39 PM	Tube furnace set to 0
11/18/2011	10:07:08 PM	Run aborted at 10:07 PM
11/18/2011	10:07:08 PM	Helium valve closed
11/18/2011	10:07:08 PM	H2 valve closed
11/18/2011	10:07:08 PM	BCl3 valve closed
11/18/2011	10:07:08 PM	PH3 valve closed
11/18/2011	10:07:08 PM	SiCl4 pre valve closed
11/18/2011	10:07:08 PM	SiCl4 post valve closed
11/18/2011	10:07:08 PM	Bypass valve closed
11/18/2011	10:07:08 PM	Main Vac valve closed
11/18/2011	10:07:08 PM	Bubbler valve closed
11/18/2011	10:07:08 PM	Helium MFC set to  0.000000
11/18/2011	10:07:08 PM	H2 MFC set to  0.000000
11/18/2011	10:07:08 PM	BCl3 MFC set to  0.000000
11/18/2011	10:07:08 PM	PHl3 MFC set to  0.000000
11/18/2011	10:07:08 PM	SiCl4 MFC set to  0.000000
11/18/2011	10:07:09 PM	Tube furnace set to 0
11/18/2011	10:07:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/18/2011	10:07:12 PM	Recipe started at 10:07 PM
11/18/2011	10:07:12 PM	Helium valve closed
11/18/2011	10:07:12 PM	H2 valve closed
11/18/2011	10:07:12 PM	BCl3 valve closed
11/18/2011	10:07:12 PM	PH3 valve closed
11/18/2011	10:07:12 PM	SiCl4 pre valve closed
11/18/2011	10:07:12 PM	SiCl4 post valve closed
11/18/2011	10:07:12 PM	Main Vac valve closed
11/18/2011	10:07:12 PM	Bypass valve closed
11/18/2011	10:07:12 PM	Bubbler valve closed
11/18/2011	10:07:12 PM	Helium MFC set to  0.000000
11/18/2011	10:07:12 PM	H2 MFC set to  0.000000
11/18/2011	10:07:12 PM	BCl3 MFC set to  0.000000
11/18/2011	10:07:12 PM	PHl3 MFC set to  0.000000
11/18/2011	10:07:12 PM	SiCl4 MFC set to  0.000000
11/18/2011	10:07:12 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:07:13 PM	Tube furnace set to 0
11/18/2011	10:07:16 PM	H2 valve closed
11/18/2011	10:07:16 PM	BCl3 valve closed
11/18/2011	10:07:16 PM	PH3 valve closed
11/18/2011	10:07:16 PM	SiCl4 pre valve closed
11/18/2011	10:07:16 PM	SiCl4 post valve closed
11/18/2011	10:07:16 PM	Main Vac valve closed
11/18/2011	10:07:16 PM	Bypass valve closed
11/18/2011	10:07:16 PM	Bubbler valve closed
11/18/2011	10:07:16 PM	Helium valve opened
11/18/2011	10:07:16 PM	Helium MFC set to  500.000000
11/18/2011	10:07:16 PM	H2 MFC set to  0.000000
11/18/2011	10:07:16 PM	BCl3 MFC set to  0.000000
11/18/2011	10:07:16 PM	PHl3 MFC set to  0.000000
11/18/2011	10:07:16 PM	SiCl4 MFC set to  0.000000
11/18/2011	10:07:16 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:07:16 PM	Tube furnace set to 0
11/18/2011	10:07:16 PM	Helium valve closed
11/18/2011	10:07:16 PM	H2 valve closed
11/18/2011	10:07:16 PM	BCl3 valve closed
11/18/2011	10:07:16 PM	PH3 valve closed
11/18/2011	10:07:16 PM	SiCl4 pre valve closed
11/18/2011	10:07:16 PM	SiCl4 post valve closed
11/18/2011	10:07:16 PM	Main Vac valve closed
11/18/2011	10:07:16 PM	Bypass valve closed
11/18/2011	10:07:16 PM	Bubbler valve closed
11/18/2011	10:07:16 PM	Helium MFC set to  0.000000
11/18/2011	10:07:16 PM	H2 MFC set to  0.000000
11/18/2011	10:07:16 PM	BCl3 MFC set to  0.000000
11/18/2011	10:07:16 PM	PHl3 MFC set to  0.000000
11/18/2011	10:07:16 PM	SiCl4 MFC set to  0.000000
11/18/2011	10:07:16 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:07:16 PM	Tube furnace set to 0
11/18/2011	10:07:17 PM	Run finished at 10:07 PM
11/18/2011	10:07:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/18/2011	10:11:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/18/2011	10:11:57 PM	Recipe started at 10:11 PM
11/18/2011	10:11:57 PM	Helium valve closed
11/18/2011	10:11:57 PM	H2 valve closed
11/18/2011	10:11:57 PM	BCl3 valve closed
11/18/2011	10:11:57 PM	PH3 valve closed
11/18/2011	10:11:57 PM	SiCl4 pre valve closed
11/18/2011	10:11:57 PM	SiCl4 post valve closed
11/18/2011	10:11:57 PM	Main Vac valve closed
11/18/2011	10:11:57 PM	Bubbler valve closed
11/18/2011	10:11:57 PM	Bypass valve opened
11/18/2011	10:11:57 PM	Helium MFC set to  0.000000
11/18/2011	10:11:57 PM	H2 MFC set to  0.000000
11/18/2011	10:11:57 PM	BCl3 MFC set to  0.000000
11/18/2011	10:11:57 PM	PHl3 MFC set to  0.000000
11/18/2011	10:11:57 PM	SiCl4 MFC set to  0.000000
11/18/2011	10:11:57 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:11:57 PM	Tube furnace set to 0
11/18/2011	10:13:59 PM	Helium valve closed
11/18/2011	10:13:59 PM	H2 valve closed
11/18/2011	10:13:59 PM	BCl3 valve closed
11/18/2011	10:13:59 PM	PH3 valve closed
11/18/2011	10:13:59 PM	SiCl4 pre valve closed
11/18/2011	10:13:59 PM	SiCl4 post valve closed
11/18/2011	10:13:59 PM	Main Vac valve closed
11/18/2011	10:13:59 PM	Bubbler valve closed
11/18/2011	10:13:59 PM	Bypass valve opened
11/18/2011	10:14:00 PM	Helium MFC set to  0.000000
11/18/2011	10:14:00 PM	H2 MFC set to  0.000000
11/18/2011	10:14:00 PM	BCl3 MFC set to  0.000000
11/18/2011	10:14:00 PM	PHl3 MFC set to  0.000000
11/18/2011	10:14:00 PM	SiCl4 MFC set to  0.000000
11/18/2011	10:14:00 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:14:00 PM	Tube furnace set to 0
11/18/2011	10:15:00 PM	Helium valve closed
11/18/2011	10:15:00 PM	H2 valve closed
11/18/2011	10:15:00 PM	BCl3 valve closed
11/18/2011	10:15:00 PM	PH3 valve closed
11/18/2011	10:15:00 PM	SiCl4 pre valve closed
11/18/2011	10:15:00 PM	SiCl4 post valve closed
11/18/2011	10:15:00 PM	Bypass valve closed
11/18/2011	10:15:00 PM	Bubbler valve closed
11/18/2011	10:15:00 PM	Main Vac valve opened
11/18/2011	10:15:00 PM	Helium MFC set to  0.000000
11/18/2011	10:15:00 PM	H2 MFC set to  0.000000
11/18/2011	10:15:00 PM	BCl3 MFC set to  0.000000
11/18/2011	10:15:00 PM	PHl3 MFC set to  0.000000
11/18/2011	10:15:00 PM	SiCl4 MFC set to  0.000000
11/18/2011	10:15:00 PM	Bypass solenoid MFC set to  0.000000
11/18/2011	10:15:00 PM	Tube furnace set to 0
11/18/2011	10:15:01 PM	Run finished at 10:15 PM
11/18/2011	10:15:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
